Mechanical stress control in a VLSI-fabrication process: a method for obtaining the relation between stress levels and stress-induced failures

An ideal fabrication process is designed to minimize mechanical stress in semiconductor devices and to improve device reliability. Mechanical stress levels were predicted by in-house simulations supported by a thin-film database. These stress levels were correlated with stress-induced defects by TEM analysis supported by fail bit addressing on matured megabit SRAMs. Amorphous-doped silicon film with various annealing temperatures were used for the gate electrode to change the mechanical stress in devices and to get the direct relationship between predicted stress levels and stress related defects. The authors describe brief guidelines for suppressing dislocations in the small geometry shallow-trench isolation process utilizing this system. Polysilicon thickness in the W-polycide gate electrode is designed to minimize mechanical stress in the gate oxide and to suppress the gate oxide failure in probe and class tests. Moreover, critical stress generates dislocations during post source/drain ion implantation anneal obtained by a ball indentation method. This indicated that lower temperature anneal is effective in suppressing the dislocations. A two-step anneal was introduced to suppress dislocations and to enable higher ion activation.     

TRVs and fault clearing stresses in extra-high-voltage radial networks

To cope with the high rate of increase of power demand in the main industrialized districts in Japan, 550-kV transmission systems covering the districts have been reinforced, with most of the main power plants connected directly to these systems. Through 550-/300-kV substations, the majority of power to the districts is supplied by 300-kV systems. To limit the excess short-circuit capacity in the 300-kV systems, they tend to be reconstructed as so-called radial networks. In radial networks with high short-circuit capacity and relatively small number of transmission lines connected to the substation busbars, the rate of rise of TRV can be far higher than standard value. This paper analyzes the transient recovery voltages (TRV) in such extra-high-voltage radial networks in Japan, together with the relevant stresses to circuit-breakers during fault clearings. Future system conditions have also been introduced. As the typical rate of rise of the TRV values, more than twice that of today's standard ones are probable.     

Robust stabilization of a magnetic suspension system using H∞ Control Theory

This paper presents the robust control design of a magnetic suspension system for a flexible beam which is a simplified model of an elastic rotor in a magnetic bearing system. To stabilize this magnetic suspension system which is unstable in nature, the H^infin; control theory is applied for a design of the control system. To apply the H^infin; control theory, a statespace model of an augmented plant with frequency-weighting functions is constructed. This augmented plant has two inputs which are the exogenous inputs and the control inputs, and two outputs which are the sensor outputs and the regulated outputs. Here we consider the mixed sensitivity problem. The H^infin; controller is implemented by a digital controller which is able to execute the computations very quickly. For the evaluation of the control performance, several experiments are made. The robustness of the closed-loop system is confirmed by the experimental results. The result of this study is useful for the control design of a magnetic bearing system.     

Stress intensity factors of microstructurally small crack

The stress intensity factor (SIF) is widely used for evaluating integrity of cracked components. Averaging the anisotropy of each crystal, the macroscopic behavior of polycrystalline materials is isotropic and homogenous in terms of elastic deformation. However, the anisotropic and/or inhomogeneous property influences on the stress field around a crack if the crack size is small in comparison with the grain. Thus, the SIF of the microstructurally small crack may differ from that in the isotropic body. In present study, the effect of anisotropic/inhomogeneous elasticity on the SIF is investigated by using the finite element analysis (FEA). At first, the SIFs of semi-circular crack in a single crystal and a polycrystalline material are calculated. These reveal that the magnitude of SIF is dependent not only on the crystal orientation but also on the deformation constraint by the neighboring crystals. Then, the statistical scatter of SIF due to the random orientation of crystal orientation in a polycrystal is examined by a Monte Carlo simulation.     

Measurement of aerosol particles by dynamic light scattering-I. effects of non-Gaussian concentration fluctuation in real time photon correlation spectroscopy

Effects of non-Gaussian concentration fluctuations in real time photon correlation spectroscopy were investigated with several sizes of mono-disperse polystyrene latex particles. The non-Gaussian correlation model for a full or a quasi-full (scaled) correlator showed good performance for particle sizing in the case of scaled correlation. The clipped correlation showed an equivalent performance with the scaled correlation except for the case of non-Gaussian fluctuation, where the measured diameter became inaccurate more rapidly with decreasing particle concentration in the scattering volume. The cause of such an instability of PCS in the clipped mode is attributed to baseline fluctuations of the correlogram induced by information loss of the clipped correlator.     

A probabilistic simulator for population dynamics of quasispecies

We constructed a probabilistic simulator that allows all the events in population dynamics such as death, birth, mutation, and suppression/stimulation to be described by probabilistic rules. The simulator also facilitates a lattice used for expressing distribution and diversity (number of distinct strains) of quasispecies. The simulator is used to investigate the diversity threshold in HIV and T-cell interaction. This work was presented in part at the 13th International Symposium on Artificial Life and Robotics, Oita, Japan, January 31–February 2, 2008     

Virtual Fiber Configuration for Dynamic Lightpath Establishment in Large-scaled Optical Networks

Recently, progress has been made in the Generalized Multi-Protocol Label Switching (GMPLS) and Automatic Switched Optical Networks (ASON) standardizations. These technologies realize construction of large-scaled optical networks, interconnections among single-domain Wavelength Division Multiplexing (WDM) networks, and direct communication over multi-domain WDM networks. Meanwhile, it is known that the topology of the Internet exhibits the power-law attribute. Since the topology of the Internet, which is constructed by interconnecting ASs, exhibits the power-law, there is a possibility that large-scale WDM networks, which are constructed by interconnecting WDM networks, will also exhibit the power-law attribute. One of the structural properties of a topology that adheres to the power-law is that most nodes have just a few links, although some have a tremendous number of them. Another property is that the average distance between nodes is smaller than in a mesh-like network. A natural question is how such a structural property performs in WDM networks. In this paper, we first investigate the property of the power-law attribute of physical topologies for WDM networks. We compare the performance of WDM networks with mesh-like and power-law topologies, and show that links connected to high-degree nodes are bottlenecks in power-law topologies. To relax this, we introduce a concept of virtual fiber, which consists of two or more fibers, and propose its configuration method to utilize wavelength resources more effectively. We compare performances of power-law networks with and without our method by computer simulations. The results show that our method reduces the blocking probabilities by more than one order of magnitude.     

The integral experiment on beryllium with D-T neutrons for verification of tritium breeding

A clean benchmark experiment on beryllium was performed with D-T neutrons at the FNS facility of the Japan Atomic Energy Agency. The main objective was to verify the integral data related to the tritium production on lithium isotopes. Tritium production rates, as well as activation reaction rates were measured inside the beryllium assembly that was shaped as a pseudo-cylindrical slab with an area-equivalent diameter of 628 mm and a thickness of 355 mm. Experimental results were analyzed with a three-dimensional Monte Carlo transport code MCNP-4C and FENDL/MC-2.0, JENDL-3.2/3.3 neutron transport libraries. Evaluation of reaction rates was based on the cross section data taken from the JENDL Dosimetry File and ENDF B-VI data libraries. Analysis shows that all calculation combinations (transport and activation cross section libraries) used for evaluation of reaction rates give data that is agreeable with measured values within 10%.     

Characteristics and classification of high-current fault arcs on distribution systems

When a fault occurs on transmission or distribution systems due to lightning or overvoltage, often an arc discharge occurs at the fault point. The arc discharge, which is caused by a fault current, has a high current, high temperature, strong light emission, etc., thus it sometimes causes heavy damages to electric power equipment. The arc discharge is influenced by the conditions around the arcs, i.e., gas, insulation materials, gap length, weather, etc. Also, the arc voltage along the arc column indicates the characteristics of the arc. If the voltage waveforms of the arcs caused by the fault on transmission or distribution systems are classified, it is possible to find the location and the equipment where the fault occurred. In this paper, the arc voltage data in 6-kV class XLPE cables and 6-kV class overhead lines are analyzed and an artificial neural network method is applied to classify the arc voltage waveforms. The results obtained from the six artificial neural networks developed show that the artificial neural network method is effective for classification of arc voltage waveforms if adequate input parameters are selected.