Etch characteristics of TiN/Al2O3 thin film by using a Cl2/Ar adaptive coupled plasma

In this study, we carried out an investigation in the etching characteristics of TiN thin films in a C1₂/Ar adaptive coupled plasma. The maximum etch rate of the TiN thin films was 768 nm/min at a gas mixing ratio of C1₂ (75%)/Ar (25%). At the same time, the etch rate was measured as functions of the various etching parameters. The X-ray photoelectron spectroscopy analysis showed the efficient destruction of the oxide bonds by the ion bombardment as well as the accumulation of low volatile reaction products on the etched surface. Field emission Auger electron spectroscopy analysis was used to examine the efficiency of the ion-stimulated desorption of the reaction products.     

The effect of exposure to alkaline solution and water on the strength–porosity relationship of GFRP rebar

This study examined the accelerated degradation of E-glass fiber/vinylester resin composite rebar in alkaline solution and water and analyzed the relationship between the reduction in mechanical performance and the test conditions using microstructural degradation analysis. In this study, a pH of 12.6 was chosen for the alkaline test group, while water was used for the control group. After immersion for up to 300 days, the tensile strength of the glass fiber-reinforced plastic (GFRP) rebar was tested. In addition, the deformation of the GFRP rebar surface was evaluated under scanning electron microscopy (SEM) and the change in the internal pore distribution was measured using mercury intrusion porosimetry (MIP). The mechanical performance decreased as the exposure time and temperature increased. The SEM analysis showed that the internal pore distribution in the GFRP rebar increased as degradation progressed, reducing the mechanical performance. Moreover, the pore distribution increased with temperature, also reducing the mechanical performance.     

面向低功耗BIST 的VLSI 可测性设计技术

随着手持设备的兴起和芯片对晶片测试越来越高的要求，内建自测试的功耗问题引起了越来越多人的关注，本文对目前内建自测试的可测性设计技术进行了分析并对低功耗的VLSI可测性设计技术的可行性和不足分别进行了探讨。在文章的最后简单介绍了笔者最近提出的一种低功耗的BIST结构。     

一种新型多功能快速分光式膜厚仪

介绍了一种高性能的多通道光学薄膜膜厚监控系统的设计与制作,系统使用了ＣＣＤ作为线阵探测器。详细论述了光源、接收器以及光纤导光系统的设计过程。实验表明该设备可以用于高精度高速测量,也适合于监控制作多层膜滤光片。     

DW DM窄带滤光片用高精度光学膜厚仪

随着信息技术的发展对高密度波分复用（ＤＷＤＭ）滤光片的需要越来越大。而高精度高性能的光学薄膜膜厚监控系统是制备ＤＷＤＭ 滤光片的关键。文中论述了所建立的制备用于１００ＧＨｚ～５０ＧＨｚ ＤＷＤＭ 滤光片的高精度高性能的光学薄膜膜厚监控系统。该系统的波长分辨力为０．１ｎｍ ,重复性精度为±０．０５ｎｍ 。信噪比与温度漂移特性分别为±０．０１％ 和０．０５％ ／ｈ。还论述了该系统的实际实验结果。     

ITO透明导电膜高速成膜的研发

论述了一种采用低能量大束流高密度等离子体作为离子辅助沉积技术、沉积ＩＴＯ薄膜的方法。实验结果表明离子轰击可以有效地增加薄膜的聚集密度,同时减低薄膜的电阻率。此外,高密度等离子体促进了ＩＴＯ薄膜制备过程的氧化,进而大大提高了ＩＴＯ薄膜的沉积速度。     

Characteristics of gas permeation using two-layered alumina membrane prepared by anodic oxidation

The microporous alumina membrane with asymmetrical structure, having upper layer with pore diameter of 10 nm under and lower layer with pore diameter of 36 nm, was prepared by anodic oxidation using DC power supply of constant current mode in an aqueous H₂SO₄ solution as a electrolyte. The aluminum plate was pretreated with thermal oxidation, chemical polishing and electrochemical polishing before anodic oxidation. The membranes were prepared by controlling the current density such as a very low current density for upper layer and a high current density for lower layer of membrane. By controlling the cumulative charge density, the thickness of upper layer of membranes was about 6 Μm and the total thickness of membranes was about 80–90 Μm. We found from gas permeation experiments with the membranes prepared by above method that the mechanism of gas permeation of the all membranes prepared under each condition complied with model of the Knudsen diffusion.     

合成纤维素高级脂肪酸酯的研究进展

纤维素高级脂肪酸酯作为一类新型的生物塑料 ,与传统材料相比 ,其优点突出 ,具有广阔的应用前景。综述了纤维素酯化前提高纤维素可及度和反应性能的各种物理和化学的预处理技术及其发展 ;阐述了国外合成纤维素高级脂肪酸酯的研究进展。     

五味子中木脂素类化合物的电喷雾质谱分析

lignan constituents in Schisandra Chinensis (Turcz.) Baill. were investigated using electrospray ionization multi-stage tandem mass spectrometry (ESI-MSⁿ). Four compounds in Schisandra chinensis (Turcz.) Baill. were observed in the positive mode. The experimental results demonstrate that the ESI-MSⁿ can provide the information of the relative molecular mass and chemical structure of the compounds.