Chemical mechanical polishing of polymer films

Strategies to reduce capacitance effects associated with shrinking integrated circuit (IC) design rules include incorporating low resistivity metals and insulators with low dielectric values, or “low-κ” materials. Using such materials in current IC fabrication schemes necessitates the development of reliable chemical mechanical polishing (CMP) processes and process consumables tailored for them. Here we present results of CMP experiments performed on FLARE™ 2.0 using a specialized zirconium oxide (ZrO₂) polishing slurry. FLARE™ 2.0 is a poly(arylene) ether from AlliedSignal, Inc. with a nominal dielectric constant of 2.8. In addition, we provide insight into possible removal mechanisms during the CMP of organic polymers by examining the performance of numerous abrasive slurries. Although specific to a limited number of polymers, the authors suggest that the information presented in this paper is relevant to the CMP performance of many polymer dielectric materials.     

聚合物复合材料填充剂的改性

在前人研究的基础之上，归纳总结了聚合物复合材料填充剂的种类，综述了对其进行表面改性的目的、条件、方法、工艺以及对改性结果的表征等。文章还分析了影响填充聚合物复合材料性能的因素，指出了今后发展的方向。     

无机膜的应用与展望

本文综述了无机膜的发展、制备方法和应用。     

在柔性变焦系统中的压力变焦镜

从理论上和实验上对水冷镜的镜面曲率半径随压力变化的规律作了研究。对压力变形后镜面相对于球面作了波像差分析，分析表明压力变焦镜用于中红外激光系统是合适的     

高可靠镀Ni／Au工艺及其在微波PTFE电路上的应用

介绍了高可靠电镀Ｎｉ／Ａｕ工艺在ＰＴＦＥ微波印制电路上的应用，并分析了氨基磺酸盐镀软镍和亚硫酸盐镀软金工艺的影响因素及提高Ｎｉ／Ａｕ镀层之间附着力的措施。通过实验及应用证明了与直接镀金工艺相比，在软基材ＰＴＦＥ敷铜箔板上镀Ｎｉ／Ａｕ工艺能大大提高微波电路的可焊性，高温稳定性和长期可靠性，并且用其所制作的微波器件的高频性能也优于直接镀金工业。     

测井数据实时采集与接口设计

介绍了一种采用改进型的ＣＬＳ３７００数控测井系统对微电阻率扫描仪数据采集与控制接口的设计及实现方法。基于ＣＬＳ３７００数控测井仪和ＦＭＳ仪采用８９Ｃ５１单片机设计出通信接口，解决了微电阻率方法。基于ＣＬＳ３７００数控测井仪和ＦＭＳ仪采用８９Ｃ５１单片机设备出通信接口电路，解决了微电阻主扫描仪现现场实时处理中的瓶颈问题。     

动态波前相位的高分辨率测量

动态波前相位信息测量是大气光学，气动光学和激光技术等领域的重要实验手段。提出了一种具有高的时间和空间分辨率以及长的测量持续时间的动态波前相位测量方法。应用Ｈａｒｔｍａｎｎ－Ｓｈａｃｋ波前传感器获得高空间分辨率的相位信息，采用高帧频ＣＣＤ摄象机获得高时间分辨率图象数据。     

Reliability and performance analysis of time – space – time switching networks with multiple separated space switches

Since electronic switching systems usually require very strict reliability requirements as well as good performance objectives, we need to jointly analyse the performance and reliability of switching systems. In this paper, we compare conventional time–space–time switches with single space switches with those with multiple separated space switches, from the viewpoints of reliability and performance. We consider time–space–time switching networks which consist of N incoming time switches, i.e. one NxN space switch, two (N/2)x(N/2) space switches, and four (N/4)x(N/4) space switches. We introduce a Markov reliability model to study the effect of failures and analyse the reliability and performance of three different types of switching networks in terms of average blocking probability and the mean time to unreliable operation, as we vary the offered traffic. As a result, T–S–T switching networks with multiple separated space switches exhibit better performance and reliability than those with single space switches.     

Principles for radiation of time-harmonic elementary current in magnetized electron plasma half-space

The radiation emitted by a time-harmonic elementary current in magnetized electron plasma half-space, bounded by an ideal electric plane, is investigated using an exact formulation. It is found that: conventional image principle holds for vertical magnetization case; while for parallel magnetization case, coupled image principle seems to be valid.