Chemical mechanical polishing of polymer films

Strategies to reduce capacitance effects associated with shrinking integrated circuit (IC) design rules include incorporating low resistivity metals and insulators with low dielectric values, or “low-κ” materials. Using such materials in current IC fabrication schemes necessitates the development of reliable chemical mechanical polishing (CMP) processes and process consumables tailored for them. Here we present results of CMP experiments performed on FLARE™ 2.0 using a specialized zirconium oxide (ZrO₂) polishing slurry. FLARE™ 2.0 is a poly(arylene) ether from AlliedSignal, Inc. with a nominal dielectric constant of 2.8. In addition, we provide insight into possible removal mechanisms during the CMP of organic polymers by examining the performance of numerous abrasive slurries. Although specific to a limited number of polymers, the authors suggest that the information presented in this paper is relevant to the CMP performance of many polymer dielectric materials.     

Coliphage prevalence in high school septic effluent and associated ground water

At the present time, somatic and male-specific coliphage and human enterovirus groups are being considered as indicators of possible pathogenic human enteric virus contamination from fecal contamination. A primary attribute for any indicator of fecal contamination is its prevalence at the source and in associated ground water. It must be consistently found in the source material at concentrations that are measurable with available techniques. Over a period of ten months, male-specific and somatic coliphage ranged from 7000 to 4,000,000 PFU/L in the effluent from a multi-user septic-tank. Unlike the values determined for septic-tank effluent, coliphage concentrations measured in ground water over this same period only varied by five-fold. Coliphage concentration in ground water under the down-gradient edge of the drainfield contained 1000 PFU/L. This concentration decreased at −1 log₁₀/5 m during 17.4 m of ground-water transport. From these data, coliphage concentrations in septic-tank effluent seem sufficient to allow their use as indicators of fecal contamination in ground water.     

城市加油站的防火与消防管理

介绍汽车加油站在防火设计与消防管理方面需注意的问题，主要包括站址选择、总平面布置、油罐设置、管线布置、卸油方式等方面，同时对加油站的日常操作与防火消防管理提出了要求。     

Reliability and performance analysis of time – space – time switching networks with multiple separated space switches

Since electronic switching systems usually require very strict reliability requirements as well as good performance objectives, we need to jointly analyse the performance and reliability of switching systems. In this paper, we compare conventional time–space–time switches with single space switches with those with multiple separated space switches, from the viewpoints of reliability and performance. We consider time–space–time switching networks which consist of N incoming time switches, i.e. one NxN space switch, two (N/2)x(N/2) space switches, and four (N/4)x(N/4) space switches. We introduce a Markov reliability model to study the effect of failures and analyse the reliability and performance of three different types of switching networks in terms of average blocking probability and the mean time to unreliable operation, as we vary the offered traffic. As a result, T–S–T switching networks with multiple separated space switches exhibit better performance and reliability than those with single space switches.     

基于空间矩的灰度边缘亚像元度量精度分析

灰度图像中边缘定位受采样密度限制，亚像元精度度量方法在需要高精度的应用中受到重视，要想知识到底需要多高的分辨率才能达到定精度指标，就有必要分析特征定位方法的最坏情况的精度，文中用分析和实验的方法给出了基于空间矩的边缘定位方法，对于边缘点，边缘直线以及直边缘区域的最坏情况定位精度分析。分析和讨论的结果不但可以用来确定已知形状位置估计的最大误差，而且还可用于对准的形状几何参数，以获得较高的精度。     

简单网络 解脱众多——传感器连线束缚

有了合适的协议以后(如ZigBee),无需经常与外界交流的传感器就不会消耗过多能量。有时,一节碱性电池就可以为它们提供长达十年的能量。     

三峡库区产业结构特征与调整研究

区域产业结构的调整与优化是推动区域经济增长和发展的重要途径.立足定量分析方法,依托Moore结构变动值、结构偏离度和结构相似系数法等分析手段,对三峡库区三大产业在产值结构、内部结构和结构速率方面的演变特征进行剖析,针对库区现有产业结构与就业结构的不对称,产业的空虚化与同质化问题,提出区域产业结构调整的政策建议.     

非理想截面脊形介质光波导导波模式的研究

提出了一种求解任意截面形状脊形光波导的方法，先利用有效折射率的概念解出某种截面形状脊形光波导的等效折射率，再利用转移矩阵的理论求解出波导的模式色散方程。     

三点弯曲下的钢纤维高强混凝土断裂能

通过100个尺寸为100mm×100mm×515mm的不同体积率的钢纤维高强混凝土切口梁三点弯曲试验,探讨了钢纤维体积率和裂缝相对切口深度对高强混凝土断裂能和作用力功的影响。结果表明,钢纤维改善了高强混凝土的断裂性能与延性。钢纤维高强混凝土断裂能增益比、作用力功增益比以及延性指数随着钢纤维体积率的增加而线性增加,随着切口深度的增加而降低;外力功对断裂能的大小起较大作用。在分析试验结果的基础上,建立了钢纤维高强混凝土作用力功和断裂能的计算公式。     

东濮凹陷马厂构造深层混源气藏气源探讨

根据东濮凹陷马厂深层气藏天然气常规组成、C1-C5单体气态烃碳同位素组成以及轻烃色谱指纹3方面微观信息的分析，并与文留气田文23井典型石炭系-二叠系煤成气以及白庙、刘庄、桥口煤成气-油型气混合天然气进行气／气对比，揭示了马厂深部气藏沙三段-沙四段天然气以煤成气为主，渗混入少量Es3-Es4油型气的混源特征，证实了东濮凹陷南部石炭系-二叠系煤系烃源岩具有一定煤成气供烃能力。