Model reduction for optimization of rapid thermal chemical vapordeposition systems

A model of a three-zone rapid thermal chemical vapor deposition (RTCVD) system is developed to study the effects of spatial wafer temperature patterns on polysilicon deposition uniformity. A sequence of simulated runs is performed, varying the lamp power profiles so that different wafer temperature modes are excited. The dominant spatial wafer thermal modes are extracted via proper orthogonal decomposition and subsequently used as a set of trial functions to represent both the wafer temperature and deposition thickness. A collocation formulation of Galerkin's method is used to discretize the original modeling equations, giving a low-order model which loses little of the original, high order model's fidelity. We make use of the excellent predictive capabilities of the reduced model to optimize power inputs to the lamp banks to achieve a desired polysilicon deposition thickness at the end of a run with minimal deposition spatial nonuniformity. Since the results illustrate that the optimization procedure benefits from the use of the reduced-order model, our future goal is to integrate the model reduction methodology into real-time and run-to-run control algorithms. While developed in the context of optimizing a specific RTP process, the model reduction techniques presented in this paper are applicable to other materials processing systems     

On system design

The general, multiple attribute system design problem is formulated in total quality space which includes all of the microeconomic factors that influence the net value of a product to society. A hypothetical system design task—the development of improved system specifications and new subsystem requirements for the redesign of an automobile—is used to illustrate the approach. A new format is also given for describing design of experiment arrays which facilitates their use in spreadsheet calculations.     

pH control of the condensation reaction and its effect on the properties of formaldehyde/urea resins

The conditions of the preparation of formaldehyde/urea (F/U) resins have been supervised with the aim to reduce formaldehyde emission by influencing the ratio of methylene/dimethylene-ether-bridge linkages in the product. The most crucial point of this task is to keep the pH values of the reacting mixtures on the required level. The effect of formic acid, unevitably present in industrial formaldehyde solutions, was neutralized by applying a new buffer system, containing boric acid and ethylene glycol.     

Corrosion morphologies on magnesium alloy AZ 91

Initiation and early propagation of pitting and filiform corrosion on bare alloy AZ91 (9% Al, 1% Zn) are investigated by natural immersion corrosion tests, electrochemical measurements and microanalytical studies. Initiation sites are few. Corrosion spreads from these sites first in the form of filiform corrosion for a limited period of time and pitting which later develops into a cellular type of etching. The important factors affecting filiform corrosion are temperature, material structure and degree of polarization at the anodic sites. Filiform attack on AZ91, unlike the classical mechanisms of filiform corrosion on coated metals, is driven by hydrogen evolution reaction on the cathodic sites of the surface, occurs under significant anodic control, propagates at a high, constant speed independent of degree of polarization along preferential paths determined by compositional and crystallographic factors, and is a temporary phenomenon under open circuit conditions. Pitting corrosion is more predominant with decreasing anodic polarization.     

Influence of production method on direction of processing heavy Ashal'chinsk crude

Translated from Khimiya i Tekhnologiya Topliv i Masel, No. 6, pp. 7–9, June, 1992.     

Function and sensitivity of signal processing systems based on addition followed by limiting

We show for the first time that signal processing schemes based on noncoherent signal addition will require signal transfer characteristics exhibiting high degrees of curvature. We quantify this by proposing a set of single-input, dual-output, power-conserving transfer functions and generating designs based on these characteristics. We then analyze the sensitivity of such a design scheme to nonidealities in the signal level and device behavior, and show that a sampling operation is only possible for transfer characteristics with residual "low" output of less than about 10% and low intensity reflectivity higher than 98%. For single device signal loss of up to 0.1 dB, we show that the best possible crosstalk-to-noise ratio in a packet forwarder (27 dB), is limited by the availability of the sampling operation.     

Irregular dynamics of a chain of circle maps with quasiperiodic excitation

An analysis is made of the spatial evolution of quasiperiodic regimes in a chain of coupled circle maps. Mechanisms for the appearance of strange nonchaotic dynamics and the properties of irregular attractors are analyzed. Pis’ma Zh. Tekh. Fiz. 23, 73–79 (April 12, 1997)     

LMSMVE: a program for least median of squares regression and robust distances.

The program LMSMVE performs robust regression analysis by using the method of the least median of squares. It also computes robust distances to locate leverage points, that is, outliers with respect to the set of independent variables. LMSMVE constructs plots of least median of squares residuals against robust distances. Both methods can tolerate up to half the data being outliers before they fail to give results that describe the bulk of the data. A complete system that operates directly on SYSTAT files is available for the IBM PC and compatibles; it includes a utility that converts ASCII files to SYSTAT format.