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141.
142.
Ha J.H. Kim S.W. Seol Y.S. Park H.K. Choi S.H. 《Semiconductor Manufacturing, IEEE Transactions on》1996,9(2):289-291
The plug loading effect occurring during the etchback of tungsten was investigated in a magnetically enhanced reactive ion etcher using SF 6/Ar mixtures. It was found that while the plug loading effect is independent of varying SF6/Ar flow rate ratio and magnetic field intensity, it is reduced under the condition of high selectivity of tungsten relative to TiN which was achieved at high chamber pressure and low RF power. It is proposed that when TiN is used as a glue layer, the W etch rate enhancement in the plug is mainly controlled by a local loading effect. Under the optimized etchback conditions the plug loss was successfully controlled without the tungsten residue left on severe topology 相似文献
143.
本文介绍了采金船渡汛时的停泊方向及采金船在洪水中可能产生拖曳力的估算方法,为了防止采金船汛期发生溜船事故,建议采用缆绳牵拉固船的措施,以保障采金船的汛期安全。 相似文献
144.
145.
文中简要地介绍了一个具有分散采集信号,集中报警的安全报警器的设计,作者利用单片机的优点和功能,成功地设计了复盖地域大,既简单又灵活的报警器。 相似文献
146.
Haan-Go Choi Principe J.C. Hutchison A.A. Wozniak J.A. 《IEEE transactions on bio-medical engineering》1994,41(3):257-266
Analysis of respiratory electromyographic (EMG) signals in the study of respiratory control requires the detection of burst activity from background (signal segmentation), and focuses upon the determination of onset and cessation points of the burst activity (boundary estimation). The authors describe a new automated multiresolution technique for signal segmentation and boundary estimation. During signal segmentation, a new transitional segment is defined which contains the boundary between background a burst activity. Boundary estimation is then performed within this transitional segment. Boundary candidates are selected and a probability is attributed to each candidate, using an artificial neural network. The final boundary for a given transitional segment is the boundary estimate with the maximum a posteriori probability. This new method has proved accurate when compared to boundaries chosen by two investigators 相似文献
147.
Jin Hai-sheng Zhang Shu-nong Institute of Environmental Water Science Hohai University Nanjing P.R.China 《水动力学研究与进展(B辑)》1992,(2)
Density stratified flow with both the vertical temperature gradient and the verti-cal salinity gradient is simulated numerically, in which turbulent terms are calculated by a sim-plified turbulence stress/flux algebraic model. The feature of stratification and turbulence is de-scribed correctly by the model. The computational results agree well with the experimental data.However, the k-e turbulence model is not so successful. 相似文献
148.
149.
Normally a complicated three-dimensional (3-D) approach is needed to study the field pattern of induction machines with skewed rotor bars. In this paper, a time-stepping two-dimensional (2-D) eddy-current finite element method, based on multislice technique, is described to study the steady-state operation and the starting process of skewed rotor induction machines. The fields of the multislices are being solved en bloc simultaneously, and thus, the effects of the eddy current and saturation can be taken into account directly. New forms of the governing equations for the multislice model are derived, which allow the meshes of multislices to be taken as one 2-D mesh so that the algorithm is very similar to that of general 2-D problems. Special techniques required for the mesh generation in the multislice model and the salient structures of the software are also described. The results obtained by using the program being developed have very good correlation with test data 相似文献
150.
The flexural strength and fracture toughness of 30 vol% SiC whisker-reinforced Si3N4 material were determined as a function of temperature from 25 to 1400°C in an air environment. It was found that both strength and toughness of the composite material were almost the same as those of the monolithic counterpart. The room-temperature strength was retained up to 1100°C; however, appreciable strength degradation started at 1200°C and reached a maximum at 1400°C due to stable crack growth. In contrast, the fracture toughness of the two materials was independent of temperature with an average value of 5.66 MPam1/2. It was also observed that the composite material exhibited no rising R-curve behaviour at room temperature, as was the case for the monolithic material. These results indicate that SiC whisker addition to the Si3N4 matrix did not provide any favourable effects on strength, toughness and R-curve behaviour. 相似文献