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Lada E.K. Jye-Chyi Lu Wilson J.R. 《Semiconductor Manufacturing, IEEE Transactions on》2002,15(1):79-90
To detect faults in a time-dependent process, we apply a discrete wavelet transform (DWT) to several independently replicated data sets generated by that process. The DWT can capture irregular data patterns such as sharp "jumps" better than the Fourier transform and standard statistical procedures without adding much computational complexity. Our wavelet coefficient selection method effectively balances model parsimony against data reconstruction error. The few selected wavelet coefficients serve as the "reduced-size" data set to facilitate an efficient decision-making method in situations with potentially large-volume data sets. We develop a general procedure to detect process faults based on differences between the reduced-size data sets obtained from the nominal (in-control) process and from a new instance of the target process that must be tested for an out-of-control condition. The distribution of the test statistic is constructed first using normal distribution theory and then with a new resampling procedure called "reversed jackknifing" that does not require any restrictive distributional assumptions. A Monte Carlo study demonstrates the effectiveness of these procedures. Our methods successfully detect process faults for quadrupole mass spectrometry samples collected from a rapid thermal chemical vapor deposition process 相似文献
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Aerodynamic loads on a multi-bladed helicopter rotor in hovering flight were calculated by solving the three-dimensional incompressible Navier-Stokes equations. The rotor wake effects were accounted by the correction of local geometric angle of attack according to a free-wake modeling in addition to an empirical modification for the tip flow effect. The validity and efficiency of the present method were verified by the comparisons between numerical results and experimental data. 相似文献
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The development and test of a PLC control program takes time, increases equipment down-time, and might damage hardware due to program errors. All of these problems can be eliminated if there is a computer simulation system for testing control programs off line. This paper presented a new method, called Direct Sequential Method, for simulating PLCs. This method resolves a ladder logic sequentially by applying a series of logic deductions. This simulation system has been implemented in C and tested successfully. 相似文献
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Recently, Timmermann and Nowak developed algorithms for estimating the means of independent Poisson random variables. The algorithms are based on a multiscale model where certain random variables are assumed to obey a beta-mixture density function. Timmermann and Nowak simplify the density estimation problem by assuming the beta parameters are known and only one mixture parameter is unknown. They use the observed data and the method of moments to estimate the unknown mixture parameter. Taking a different approach, we generate training data from the observed data and compute maximum likelihood estimates of all of the beta-mixture parameters. To assess the improved performance obtained by the proposed modification, we consider a denoising application using Poisson data. 相似文献