A novel CMOS integrated Micro-Electro-Mechanical capacitive pressure sensor in SiGe MEMS (Silicon Germanium Micro-Electro-Mechanical System) process is designed and analyzed. Excellent mechanical stress–strain behavior of Polycrystalline Silicon Germanium (Poly-SiGe) is utilized effectively in this MEMS design to characterize the structure of the pressure sensor diaphragm element. The edge clamped elliptic structured diaphragm uses semi-major axis clamp springs to yield high sensitivity, wide dynamic range and good linearity. Integrated on-chip signal conditioning circuit in 0.18 μm TSMC CMOS process (forming the host substrate base for the SiGe MEMS) is also implemented to achieve a high overall gain of 102 dB for the MEMS sensor. A high sensitivity of 0.17 mV/hPa (@1.4 V supply), with a non linearity of around 1 % is achieved for the full scale range of applied pressure load. The diaphragm with a wide dynamic range of 100–1,000 hPa stacked on top of the CMOS circuitry, effectively reduces the combined sensor and conditioning implementation area of the intelligent sensor chip. 相似文献
Monitoring Quality of Service (QoS) compliance is an important procedure in web service environment. It determines whether users’ expectations are met, and becomes the vital factor for them to decide whether to continue paying for the service or not. The monitoring is performed by checking the actual services performance against the QoS stated in Service Level Agreement (SLA). In relation to that, the need for monitoring vague QoS specifications in SLA has become more apparent nowadays. This paper reviews the published literature on web services QoS monitoring. A total of 60 selected articles were systematically analyzed. There were 23 of the articles selected through restrictive search criteria while the other 37 were selected based on unrestrictive search criteria. The review shows that little evidence exists on monitoring vague QoS specifications of web services. Providing ability for monitoring QoS that is specified vaguely in SLA could give new insights and implications to web services field. This paper concludes with some recommended future works to construct the theory and perform the empirical research. 相似文献
This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed. 相似文献
In the present work, multi-cation-doped (Sr2+–Mg2+) SiAlON ceramics were investigated. MgO and SrO were used in 100:0 and 50:50 molar ratios. The mixture was sintered at 1800° and 1830°C for 1 h in a gas pressure-sintering furnace. The results showed that sintered samples were composed of mainly α- and β-SiAlON phases and small amounts of some Sr-containing phases and SiAlON polytypes. According to Rietveld analysis of X-ray diffraction patterns, Mg is incorporated into the α-SiAlON structure. However, the incorporation of Sr is limited. 相似文献
Performance data are presented for methane oxidation on alumina-supported Pd, Pt, and Rh catalysts under both fuel-rich and fuel-lean conditions. Catalyst activity was measured in a micro-scale isothermal reactor at temperatures between 300 and 800 °C. Non-isothermal (near adiabatic) temperature and reaction data were obtained in a full-length (non-differential) sub-scale reactor operating at high pressure (0.9 MPa) and constant inlet temperature, simulating actual reactor operation in catalytic combustion applications.
Under fuel-lean conditions, Pd catalyst was the most active, although deactivation occurred above 650 °C, with reactivation upon cooling. Rh catalyst also deactivated above 750 °C, but did not reactivate. Pt catalyst was active above 600 °C. Fuel-lean reaction products were CO2 and H2O for all three catalysts.
The same catalysts tested under fuel-rich conditions demonstrated much higher activity. In addition, a ‘lightoff’ temperature was found (between 450 and 600 °C), where a stepwise increase in reaction rate was observed. Following ‘lightoff’ partial oxidation products (CO, H2) appeared in the mixture, and their concentration increased with increasing temperature. All three catalysts exhibited this behavior.
High-pressure (0.9 MPa) sub-scale reactor and combustor data are shown, demonstrating the benefits of fuel-rich operation over the catalyst for ultra-low emissions combustion. 相似文献
In order to develop and test the integration procedure, in this paper a real time process integration involving the optimization and control of the process is presented, in this case, with the two-layer approach. The used optimization algorithms were Levenberg–Marquardt and SQP that solve a non-linear least square problem subject to bounds on the variables. The two-layer approach is a hierarchical control structure where an optimization layer calculates the set points and manipulated variables to the advanced controller, which is based on the dynamic matrix control with constraints (QDMC). The non-isothermal dynamic model of the three-phase slurry catalytic reactor with appropriate solution procedure was utilized in this work (Vasco de Toledo, E. C., Santana, P. L., Maciel, M. R. W., & Maciel Filho, R. (2001). Dynamic modeling of a three-phase catalytic slurry reactor. Chemical Engineering Science, 56, 6055–6061). The model consists on mass and heat balance equations for the catalyst particles as well as for the bulk phases of gas and liquid. The model was used to describe the dynamic behavior of hydrogenation reaction of o-cresol to obtain 2-methil-cyclohexanol, in the presence of a catalyst Ni/SiO2. 相似文献
Finite element analysis (FEA) has been carried out with the aim of understanding the thermal deformation characteristics of two solar cell configurations. One of the solar cell models is tabbed by lead-free solder, the other model by Conductive film (CF). A high temperature soldering process could weaken the bond and reduce the reliability of the cells because of the residual stress caused by the different thermal expansion coefficients of the materials. Moreover, solar irradiation generates temperature distribution across the surface of the solar cell, and the development of solar cells made of thinner crystalline silicon wafers will lead to the reduction in manufacturing costs. In this study, Finite element analysis (FEA) of the manufacturing process has been carried out using both solder and CF bonding. Three temperature cycles were applied to analyze different environmental operating conditions and understand how thermal cycles affect the residual stress during actual service conditions. This investigation provides a comparison of thermal deformations between solder and CF bonded solar cells in order to understand which offers substantial reliability in the long term. Also this study explores the effects of various thicknesses of the silicon wafer on the residual stress and deformation of the solar cells. 相似文献
The effects of natural disasters, pandemic-induced lockdowns, and other disruptions often cascade across networks. In this work, we use minimum cost of resilience (MCOR) and operation-based resilience metrics to quantify network performance against single-connectivity failures and identify critical connections in interconnected networks. MCOR corresponds to the minimum additional infrastructure investment that is required to achieve a certain level of resilience. To guarantee MCOR, we incorporate the metrics in a multi-scenario mixed-integer linear program (MILP) that accounts for resilience in the design phase of interconnected networks. The goal is to obtain optimal generation and transportation capacities with flexible operation under all single-connectivity disruption scenarios. We demonstrate the applicability of our resilience-aware framework on a water-energy nexus (WEN) example focusing on grass-root design and retrofitting. We further apply the framework to analyze a regional WEN and observe that it is possible to achieve “full” resilience in the expense of additional regional investments. 相似文献
Reusing wastewater from oil-related industries is becoming increasingly important, especially in water-stressed oil-producing countries. Before oily wastewater can be discharged or reused, it must be properly treated, e.g., by membrane-based processes like ultrafiltration. A major issue of the applied membranes is their high fouling propensity. This paper reports on mitigating fouling inside ready-to-use ultrafiltration hollow-fiber modules used in a polishing step in oil/water separation. For this purpose, in-situ polyzwitterionic hydrogel coating was applied. The membrane performance was tested with oil nano-emulsions using a mini-plant system. The main factors influencing fouling were systematically investigated using statistical design of experiments. 相似文献