Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

关于应用无功就地补偿技术的探讨

从 8 0年代开始 ,无功就地补偿技术在我国的冶金系统就有了成功的应用 ,90年代这项技术在我国的各种工矿企业得到了推广。但由于某些不尽理想的原因 ,曾有过曲折反复 ,有的企业至今不敢应用 ,这项技术在认识上和应用中也还存在着一些值得探讨的问题。现结合实践经验提供下列粗浅的看法 ,供同行参考。1.应用无功就地补偿技术的节能效果分析应用无功就地补偿的节能效果在相关的刊物上有过许多介绍。由于企业大多没配备便携式能耗测试仪表 ,不少介绍性论文中经常以理论推导的方式来计算节能效果。在实践中 ,有的企业仅仅根据电动机就地安装无功…     

Investigation into polishing process of CVD diamond films

A new technique used for polishing chemical vapor deposition (CVD) diamond films has been investigated, by which rough polishing of the CVD diamond films can be achieved efficiently. A CVD diamond film is coated with a thin layer of electrically conductive material in advance, and then electro-discharge machining (EDM) is used to machine the coated surface. As a result, peaks on the surface of the diamond film are removed rapidly. During machining, graphitization of diamond enables the EDM process to continue. The single pulse discharge shows that the material of the coated layer evidently affects removal behavior of the CVD diamond films. Compared with the machining of ordinary metal materials, the process of EDM CVD diamond films possesses a quite different characteristic. The removal mechanism of the CVD diamond films is discussed.     

转炉溅渣护炉改质剂的开发研究

影响转炉溅渣护炉效果的关键因素是终渣成分的控制,采用改质剂对转炉终渣成分进行调整,降低渣中FeO含量和炉渣温度,提高MgO含量和炉渣熔点及粘度,有利于改善炉渣与炉衬的粘结效果,并提高溅渣层的耐蚀性能,缩短溅渣起孕时间,在一定程度上抑制炉渣中铁的氧化物与炉衬中石墨的反应.     

利用黄河泥沙加固下游大堤

黄河是一条举世闻名的多泥沙河流，善淤、善决、善徒给沿河人民带来对过深重灾难，防洪问题一直是国家的心腹之患。泥沙问题是黄河防洪问题的症结所在。在总结固大堤经验的基础，进行挖河疏浚，淤筑“相对地下河”，已作为黄河治理的一项重大决策付诸实施。     

2-乙基己酸的制备

研究了 2乙基己酸的制备 ,该反应是 2乙基己醇与氢氧化钠在催化剂存在下进行氧化、脱氢 ,生成产物2乙基己酸。通过实验找到了一种新型、高效、廉价的催化剂 ,以及最佳反应条件。通过对 2乙基己酸的分析测试 ,产品完全符合质量标准。     

声光效应拉曼-内斯方程矩阵级数解法及声光调制器优化设计

提出一种求解正常声光相互作用拉曼 内斯 (Raman Nath)方程的矩阵级数解法 ,该解法直观方便且具有普遍性。计算结果表明 ,对Q =4 1π ,Bragg衍射的效率只有 97 5 % ;对非对称入射 ,以往的Raman Nath近似解误差较大 ;指出提高Bragg衍射效率的有效途径在于提高声光频率比并给出计算声光器件最优长度的计算公式。