“Multipoint Force Feedback” Leveling of Massively Parallel Tip Arrays in Scanning Probe Lithography

Nanoscale patterning with massively parallel 2D array tips is of significant interest in scanning probe lithography. A challenging task for tip‐based large area nanolithography is maintaining parallel tip arrays at the same contact point with a sample substrate in order to pattern a uniform array. Here, polymer pen lithography is demonstrated with a novel leveling method to account for the magnitude and direction of the total applied force of tip arrays by a multipoint force sensing structure integrated into the tip holder. This high‐precision approach results in a 0.001° slope of feature edge length variation over 1 cm wide tip arrays. The position sensitive leveling operates in a fully automated manner and is applicable to recently developed scanning probe lithography techniques of various kinds which can enable “desktop nanofabrication.”     

Properties and rapid consolidation of nanostructured NiTi by pulsed current activated sintering

Highly dense nanostructured TiNi with a relative density of up to 99 % was obtained within two minutes by pulsed current activated sintering under a pressure of 80 MPa. The advantage of this process is that it allows very quick densification to near theoretical density and prohibits grain growth in nano-structured materials. The microstructural and mechanical properties of the dense TiNi produced by PCAS were investigated.     

Manufacturing and Macroscopic Properties of Cold Sprayed Cu-In Coating Material for Sputtering Target

This study attempted to manufacture a Cu-In coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. To examine the microstructural and property changes made to the Cu-In coating layer and Cu coating layer (comparison material), ICP, XRD, SEM, and other tests were conducted; purity, density, hardness, porosity, and bond-strength were measured. The results showed that coating layers with thickness of 20 mm (Cu) and 810 μm (Cu-In) could be manufactured via cold spraying under optimal process conditions. With the Cu-In coating layer, the pure Cu and intermetallic compounds of Cu₇In₃ and CuIn₄ were found to exist inside the layer regardless of annealing heat treatment. The preannealing inconsistent microstructure of the layer, whose phases were difficult to distinguish was found to have transformed into one with clearer phase distinction and fine, consistent grains following thermal treatment via a progress of recovery, recrystallization, and grain growth. The porosity and hardness values of the coating layers were 1.4% and 133.9 HV, respectively, for Cu and 3.54% and 476.6 HV, respectively, for Cu-In. The values of the Cu-In layer were higher than those of the Cu layer in terms of porosity and hardness, which declined drastically after annealing. With the porosity of the Cu-In coating layer in particular, the higher value found during the preannealing stage dropped to 0.36% after heat treatment of 773 K/1 h as the level on a par with pure Cu (0.44%), thus indicating the improved quality of the Cu-In layer. Moreover, the results of the bond-strength measurement performed on the Cu-In coating layer and annealing treated materials revealed the strength to be relatively high for heat treated coating layers. Based on the findings of this study and on the comparison and discussion of the properties that are typically required of the target material, the Cu-In coating layer manufactured via cold spray process and annealing heat treatment can be said to be applicable as sputtering target in the future.     

Hydrogen production by steam reforming of liquefied natural gas over a nickel catalyst supported on mesoporous alumina xerogel

Mesoporous alumina xerogel (A-SG) is prepared by a sol–gel method for use as a support for a nickel catalyst. The Ni/A-SG catalyst is then prepared by an impregnation method, and is applied to hydrogen production by steam reforming of liquefied natural gas (LNG). The effect of the mesoporous alumina xerogel support on the catalytic performance of Ni/A-SG catalyst is investigated. For the purpose of comparison, a nickel catalyst supported on commercial alumina (A-C) is also prepared by an impregnation method (Ni/A-C). Both the hydroxyl-rich surface and the electron-deficient sites of the A-SG support enhance the dispersion of the nickel species on the support during the calcination step. The formation of the surface nickel aluminate phase in the Ni/A-SG catalyst remarkably increases the reducibility and stability of the catalyst. Furthermore, the high-surface area and the well-developed mesoporosity of the Ni/A-SG catalyst enhance the gasification of surface hydrocarbons that are adsorbed in the reaction. In the steam reforming of LNG, the Ni/A-SG catalyst exhibits a better catalytic performance than the Ni/A-C catalyst in terms of LNG conversion and hydrogen production. Moreover, the Ni/A-SG catalyst shows strong resistance toward catalyst deactivation.     

New parallel driving strategy based on modified converters and peak current mode control for photovoltaic power generation systems

This paper proposes a modified converter for use in photovoltaic system. In the modified converter, the voltage ratio of output to input is equal to that of the general boost converter. The difference between the two converters is the configuration of output terminal. Therefore, the working voltage of an output capacitor and the value of its capacitance can be lower than those of the general boost converter. This paper also presents an efficient parallel driving scheme to increase output power and to reduce the output voltage ripple. The parallel driving method using the modified converter and current mode control gives a good solution for alleviating the current sharing unbalance problem. It reduces the output voltage ripple by increasing the equivalent switching frequency of the modified converter. The performance of the proposed converter system is verified through computer-aided simulations and experimental results.     

Numerical analysis of geometry effects for target re-deposition during low pressure hollow cathode magnetron sputtering

During low pressure ionized metal physical vapor deposition (PVD) of Cu seed layer for microprocessor interconnects, the re-deposited Cu film on the hollow cathode magnetron (HCM) target may fall off and damage the Cu film on the wafer. An analytical view factor model based on the analogy between metal sputtering and diffuse thermal radiation was used to obtain re-deposition profiles for HCM targets in low pressure (below 0.1 Pa) Cu ionized PVD. The model predictions indicate that there is an inherent non-uniformity in the re-deposition profile even for uniform sputtering over the entire HCM target. The predicted re-deposition profile agrees with experimental observations. Subsequent target redesign studies found that the non-uniformity in the re-deposition profile could be mitigated by using a conical sidewall between the top disk and the cylindrical sidewall or reducing the length of the cylindrical sidewall.     

A study on the plasma polymer thin film surface modification for DNA alignment by using high energy electron beam irradiation

The plasma polymer thin films were deposited on Si(100) substrate by PECVD (plasma enhanced chemical vapor deposition) method. Liquid cyclohexene was used as single organic precursor. It was heated up to 60 °C and bubbled up by hydrogen gas, which flow rate was 50 sccm (standard cubic centimeters per min). Deposition temperature was room temperature. Plasma was ignited by a radio frequency (RF; 13.56 MHz) of 10 W.As-deposited plasma polymer thin films were treated by e-beam of 300 keV with various adsorption radiation doses. The plasma polymer films, which were treated by high energy e-beam (HEEB), were investigated by FT-IR (Fourier Transform Infrared), XPS (X-ray Photoelectron Spectroscopy), AFM (Atomic Force Microscopy), and the water contact angles.From IR spectra, the intensity of OH functional group is increased by increasing electron dose rate. XPS results also show that the intensity of O_1s peak is increased by increasing electron dose rate. C_1s peak shows that oxygen bonded at carbon site. The water contact angles are decreased by increasing electron dose rate. From the AFM analysis, we observed the formation of λ-DNA (deoxyribonucleic acid) array on plasma polymer film, which was treated by HEEB with 14 kGy of adsorption radiation dose.     

SnO2–Au nanocomposite synthesized by successive ionic layer deposition method: Characterization and application in gas sensors

A possibility of synthesizing the SnO₂–Au nanocomposite by the successive ionic layer deposition (SILD) method is demonstrated in this article. It is shown that as a result of successive treatments in solutions of Sn(OH)_xF_yCl_z and HAuCl₄ the SnO₂–Au nanocomposite with a Sn/Au ratio varying from 1:1 to 6:1 can be formed on the surface of substrates. It is found that the value of this ratio depends on the concentration of F ions in solution. The gold in the indicated composite is in the metallic state. The growth of the SnO₂–Au composite takes place through the formation of 3-D precipitates, which form a continuous film after 13 deposition cycles. As a result, a layer with averaged thickness of up to 20 nm is formed on the surface. Nanocomposite films, even after treatment at an annealing temperature T_an ∼ 600 °C, have finely dispersed structure. The size of the Au clusters incorporated in the SnO₂ matrix is in the range from 3 to 15 nm. Gas sensing characteristics of SnO₂ films modified by SnO₂–Au nanocomposites are discussed as well. It is shown that surface modification by SnO₂–Au nanocomposites can be used for improving operating characteristics of conductometric SnO₂-based gas sensors.     

The development of a robust design methodology for time‐oriented dynamic quality characteristics with a target profile

Innovative engineering techniques are often sought within the manufacturing environment to improve product quality and promote more cost‐effective strategies. Robust design methods are frequently used to serve this purpose, with the objective of minimizing the variability inherent within a particular process or system. A review of the literature suggests that most robust design research involves the study of static quality characteristics, given a pre‐defined specification interval or region and target value. In addition to proposing a methodology for working with dynamic quality characteristics where the specifications and target value may change over time, this paper offers two other distinct contributions. First, those researchers who have examined dynamic systems traditionally consider the effects of a signal factor on a response variable on the identification of optimal factor settings. In contrast, this paper will consider the effects of a quality characteristic changing over time, thus removing the need to confine the problem to signal–response systems. Furthermore, most researchers consider the optimization of the process mean according to the costs of non‐conforming to an established specification interval or region. This paper, however, utilizes a methodology involving the simultaneous optimization of the process mean and variance while expanding the problem to consider a loss in quality attributed to deviation from a target value over time. Copyright © 2010 John Wiley & Sons, Ltd.