Impact of “terminal effect” on Cu electrochemical deposition: Filling capability for different metallization options

The 300 mm wafer copper electrochemical deposition (ECD) process for dual damascene metallization of semiconductor advanced interconnects is critically reviewed and the breakthroughs that enable further scaling of this process are examined. Special emphasis is placed on analyzing the critical issues, such as barrier/seed options, terminal effect and future plating prospects for this technology. The smallest plateable feature size values are estimated for different metallization integration schemes, such as conventional Physical Vapor Deposited (PVD) TaN/Ta/Cu, hybrid RuTa/Cu, CuMn (8%) self-forming barrier/seed, and Plasma-Enhanced Atomic Layer Deposition (PEALD) Ru, limiting the allowed maximum sheet resistance to 14 Ohms/sq for the Cu-based seeds and the effective maximum filling aspect ratio to 5-6.     

On‐Demand Wrinkling Patterns in Thin Metal Films Generated from Self‐Assembling Liquid Crystals

In this work, a new, universal method is described that uses the photopatterning of liquid crystals, which is accurately translated into a controlled, intricately wrinkled metal surface. Remarkably, the patterns have an oscillation in amplitude of the wrinkles. This rapid method allows generation of intricate multidomain patterns and continuous circular structures, including azimuthal, radial, and even higher complexity arrangements as examples. These wrinkled gold surfaces are also strikingly visual, which is interesting for applications ranging from diffractive elements to fine jewelry.     

Fully Electrical Modeling of Thermoelectric Generators with Contact Thermal Resistance Under Different Operating Conditions

The Seebeck effect is used in thermoelectric generators (TEGs) to supply electronic circuits by converting the waste thermal into electrical energy. This generated electrical power is directly proportional to the temperature difference between the TEG module’s hot and cold sides. Depending on the applications, TEGs can be used either under constant temperature gradient between heat reservoirs or constant heat flow conditions. Moreover, the generated electrical power of a TEG depends not only on these operating conditions, but also on the contact thermal resistance. The influence of the contact thermal resistance on the generated electrical power have already been extensively reported in the literature. However, as reported in Park et al. (Energy Convers Manag 86:233, 2014) and Montecucco and Knox (IEEE Trans Power Electron 30:828, 2015), while designing TEG-powered circuit and systems, a TEG module is mostly modeled with a Thévenin equivalent circuit whose resistance is constant and voltage proportional to the temperature gradient applied to the TEG’s terminals. This widely used simplified electrical TEG model is inaccurate and not suitable under constant heat flow conditions or when the contact thermal resistance is considered. Moreover, it does not provide realistic behaviour corresponding to the physical phenomena taking place in a TEG. Therefore, from the circuit designer’s point of view, faithful and fully electrical TEG models under different operating conditions are needed. Such models are mainly necessary to design and evaluate the power conditioning electronic stages and the maximum power point tracking algorithms of a TEG power supply. In this study, these fully electrical models with the contact thermal resistance taken into account are presented and the analytical expressions of the Thévenin equivalent circuit parameters are provided.     

Subsampling models and anti-alias filters for 3-D automultiscopic displays.

A new type of three-dimensional (3-D) display recently introduced on the market holds great promise for the future of 3-D visualization, communication, and entertainment. This so-called automultiscopic display can deliver multiple views without glasses, thus allowing a limited "look-around" (correct motion-parallax). Central to this technology is the process of multiplexing several views into a single viewable image. This multiplexing is a complex process involving irregular subsampling of the original views. If not preceded by low-pass filtering, it results in aliasing that leads to texture as well as depth distortions. In order to eliminate this aliasing, we propose to model the multiplexing process with lattices, find their parameters and then design optimal anti-alias filters. To this effect, we use multidimensional sampling theory and basic optimization tools. We derive optimal anti-alias filters for a specific automultiscopic monitor using three models: the orthogonal lattice, the nonorthogonal lattice, and the union of shifted lattices. In the first case, the resulting separable low-pass filter offers significant aliasing reduction that is further improved by hexagonal-passband low-pass filter for the nonorthogonal lattice model. A more accurate model is obtained using union of shifted lattices, but due to the complex nature of repeated spectra, practical filters designed in this case offer no additional improvement. We also describe a practical method to design finite-precision, low-complexity filters that can be implemented using modern graphics cards.     

3-D discrete analytical ridgelet transform.

In this paper, we propose an implementation of the 3-D Ridgelet transform: the 3-D discrete analytical Ridgelet transform (3-D DART). This transform uses the Fourier strategy for the computation of the associated 3-D discrete Radon transform. The innovative step is the definition of a discrete 3-D transform with the discrete analytical geometry theory by the construction of 3-D discrete analytical lines in the Fourier domain. We propose two types of 3-D discrete lines: 3-D discrete radial lines going through the origin defined from their orthogonal projections and 3-D planes covered with 2-D discrete line segments. These discrete analytical lines have a parameter called arithmetical thickness, allowing us to define a 3-D DART adapted to a specific application. Indeed, the 3-D DART representation is not orthogonal, It is associated with a flexible redundancy factor. The 3-D DART has a very simple forward/inverse algorithm that provides an exact reconstruction without any iterative method. In order to illustrate the potentiality of this new discrete transform, we apply the 3-D DART and its extension to the Local-DART (with smooth windowing) to the denoising of 3-D image and color video. These experimental results show that the simple thresholding of the 3-D DART coefficients is efficient.     

Optimized ITO-free tri-layer electrode for organic solar cells

The optical properties of ZnO/Ag/ZnO (ZAZ) multilayer structures were numerically modeled and calculated by a FDTD method. Such tri-layers were also manufactured using an ion beam sputtering plant. A good agreement is obtained between modelizations and realizations. The impact of the oxide thicknesses on the optical properties of the ZAZ structures were experimentally and numerically investigated, and allow us to adjust the spectral position of the transmission maximum. The transmission of these structures is optimized up to around 74%, on the whole absorption spectral range of the photoactive P3HT:PCBM bulk heterojunction. The best electrode design is glass/ZnO (30 nm)/Ag (14 nm)/ZnO (30 nm), which presents a sheet resistance of 7 Ω/□. The optimized ZAZ structure was successfully integrated in an organic solar cell as anode. A photovoltaic efficiency of 2.58% is obtained and is compared to an organic solar cell integrating a traditional ITO anode with an efficiency of 2.99%. Numerical calculations of the intrinsic absorption inside each layer of the organic solar cells are performed. Alternative ITO-free electrodes for organic solar cells are demonstrated.     

Geometry modeling in cellular network planning

To design a cellular radio network (GSM, UMTS, WiFi …) it is indispensable today to use a radio planning software. In current commercialized tools, radio network planning is based on a numerical evaluation of a set of radio metrics, directly linked to quality of service notion, such as interference, throughput, coverage, capacity … The network configurations produced by such tools are generally faced with the human expert judgment who attaches great importance to the organizational aspects such as cells size and the topology. In other words, all those concepts related to the visual cells shape and geometry. In this article we emphasize the simplicity and the strength by which the geometrical concepts helps to bring out good network properties which are not taken into account by conventional radio criteria. On one hand, well-formed cells lead to reduce the number of handover calls, and to form transition zones between cells allowing proper completion of the handover procedure. On the other hand, cell geometry optimization produce performing network schemes in which the frequencies reuse (frequencies planning in GSM, WiFi) is simplified. We describe in this paper an original and practical modeling of the cellular geometry criteria granting the integration of this concept into the automatic planning process of mobile radio networks. The relevance of this criterion is assessed on three different levels. On a local level, we first establish the correlation between the geometric criteria and the improvement of point-by-point radio quality indicators. We secondly show geometry impact on radio frequency planning and the improving of the handover zones. Finally we analyze the impact of geometric criterion on improving indoor positioning systems.     

Microstructured air-silica fibres: Recent developments in modelling, manufacturing and experiment

The main modelling methods devoted to microstructured air-silica optical fibres (MOFS) are presented and discussed. Then, the specific propagation properties ofMOFS are studied in detail. Characteristics measured on fibres manufactured in our laboratory or reported in the literature are analysed. A large number of potential and demonstrated applications are presented and the obtained performances are discussed. A particular attention is given to hollow-core photonic bandgap fibres and their applications.     

Network-controlled mobility within radio access networks based onWLAN technologies

This article presents a network-controlled approach of user terminal mobility within anIP based WirelessLAN Access Network. In a first part, this article makes a review of the mobility support, on the subject of emergingWLAN technologies asHIPERLAN/2 andIEEE 802.11, on the one hand, and, regardingIP networks as currently studied withinIETF, on the other hand. Both types ofIP mobility protocols are presented, either global mobility protocols such as MobileIP, or local mobility management protocols (micro mobility). In the next part, the overall principles of our mobility management approach are explained; this approach is based on the implementation of a new network entity dedicated to the control of user terminal mobility. The last part details a practical implementation of this approach. The implementation is carried out on the basis of Hierarchical MobileIPv6 (HMIPv6). The experimental results confirm the importance to carefully plan and control the user terminal mobility within largeIP based Access Networks, as this brings benefit to the user as well as to the operator.     

Ultrathin PECVD epitaxial Si solar cells on glass via low‐temperature transfer process

Fabrication of high‐quality ultrathin monocrystalline silicon layers and their transfer to low‐cost substrates are key steps for flexible electronics and photovoltaics. In this work, we demonstrate a low‐temperature and low‐cost process for ultrathin silicon solar cells. By using standard plasma‐enhanced chemical vapor deposition (PECVD), we grow high‐quality epitaxial silicon layers (epi‐PECVD) from SiH₄/H₂ gas mixtures at 175 °C. Using secondary ion mass spectrometry and transmission electron microscopy, we show that the porosity of the epi‐PECVD/crystalline silicon interface can be tuned by controlling the hydrogen accumulation there. Moreover, we demonstrate that 13–14% porosity is a threshold above which the interface becomes fragile and can easily be cleaved. Taking advantage of the H‐rich interface fragility, we demonstrate the transfer of large areas (∽10 cm²) ultrathin epi‐PECVD layers (0.5–5.5 µm) onto glass substrates by anodic bonding and moderate annealing (275–350 °C). The structural properties of transferred layers are assessed, and the first PECVD epitaxial silicon solar cells transferred on glass are characterized. Copyright © 2016 John Wiley & Sons, Ltd.