PZT capacitor with Ir/IrO2/Ir electrode fabricated by RTA

Abstract

PZT capacitor with direct contact between Si substrate and bottom electrode of the capacitor was obtained with Ir/IrO₂/Ir/Ti electrode, by crystallizing sol-gel PZT thin film using RTA (650°CC 30 sec.). Contact resistance for hole diameter of 0.72 μm was 19 Ω. It was observed by cross-sectional TEM that Ti silicide was formed at the interface, but there was not oxygen diffusion from PZT thin film. Fatigue property of the PZT thin film was improved by RTA compared with furnace annealed film (600°CC 60 min.). The absolute value of the remnant polarization was 13 μC/cm² for both films, but it did not degrade until 10⁸ cycles of switching for the film by RTA, while it degraded before 10⁵ cycles for furnace annealed film.     

Pyrolysis Products of Lignin in Open and Sealed Vessels Studied by Py-GC-MS

The pyrolysis products of lignin in open and sealed vessels were studied by pyrolysis—gas chromatography—mass spectrometry (Py-GC-MS). Several kinds of phenolic derivatives were observed in the pyrolysates in both treatments, while phenolic compounds with alkenyl or acetyl groups had higher relative contents in the open vessel than those in the sealed vessel. Phenol and its alkyl or mono-methoxy substituted derivatives become the main pyrolysis products in the sealed vessel. Most of the lignin pyrolysis products in the open vessel could be detected by Py-GC-MS, but some active products would go through further reaction in the sealed vessel.     

A manufacturing XML schema definition and its application to a data management system on the shop floor

Digitization for sharing knowledge on the shop floor in the machinery industry has been given much attention recently. To help engineers use digitization practically and efficiently, this paper proposes a method based on manufacturing case data that has a direct relation to manufacturing operations. The data are represented in XML schema, as it can be easily applied to Web-based systems on the shop floor. The definitions were made for eight manufacturing methods including machining and welding. The derived definitions consist of four divisions of metadata, work-piece, process and evaluation. Three divisions except for the “process” division are common to the manufacturing methods. The average number of elements for a manufacturing method is about 200. The represented schema is also used to convey knowledge such as operation standards and manufacturing troubleshooting on the shop floor. Using the definitions, a data management system is developed. It is a Web-based Q&A system, in which the engineers specify the manufacturing case data mainly by selecting from the candidates. Then, the system fills in the blank portions and/or shows messages to help complete the case data. The proposed method is evaluated through practical scenarios of arc welding and machining.     

Characterization of natural resin shellac by reactive pyrolysis-gas chromatography in the presence of organic alkali

A method to determine chemical composition of natural resin shellac was developed on the basis of reactive pyrolysis-gas chromatography (Py-GC) in the presence of an organic alkali, tetramethylammonium hydroxide ((CH(3))(4)NOH, TMAH). Py-GC using 25% TMAH aqueous solution enabled the highly sensitive determination of terpenic acids, aleuritic acid, several minor fatty acids, and the wax components of shellac as their methyl derivatives on the resulting pyrograms with less than 2.0% relative standard deviations without using any cumbersome pretreatment. The observed average distributions of each resin acid component determined by reactive Py-GC for shellac samples from India and Thailand showed that the average ratios among terpenic acids, aleuritic acid, and the other fatty acids were about 53:34:14 for Indian shellac and 51:35:14 for Thailand shellac, respectively, suggesting a slightly significant difference. However, clearer discrimination of the shellac samples from the two different growing places was attainable by applying principal component analysis for the mole percent distributions of all the acidic components determined by reactive Py-GC.     

Thermodynamic evaluation of the phase equilibria and glass-forming ability of the Fe–Si–B system

A thermodynamic study has been carried out on the Fe–Si–B ternary system, which is important in the development of transformer core materials and Ni-based filler metals. A regular solution approximation based on the sublattice model was adopted to describe the Gibbs energy for the individual phases in the binary and ternary systems. Thermodynamic parameters for each phase were evaluated by combining the experimental results from differential scanning calorimetry with literature data. The evaluated parameters enabled us to obtain reproducible calculations of the isothermal and vertical section diagrams. Furthermore, the glass-forming ability of this ternary alloy was evaluated by introducing thermodynamic quantities obtained from the phase diagram calculations into Davies–Uhlmann kinetic formulations. In this evaluation, the time–temperature-transformation (TTT) curves were obtained, which are a measure of the time required to transform to the minimum detectable mass of crystal as a function of temperature. The critical cooling rates calculated on the basis of the TTT curves enabled us to evaluate the glass-forming ability of this ternary alloy. The results show good agreement with the experimental data in the compositional amorphization range.     

Temperature dependence of Rresistivities of SnO2-based gas sensors exposed to Co,H2, and C3H8 gases

The temperature dependence of resistivities of gas sensors made of SnO₂, Pd-doped SnO₂, and ThO₂-doped SnO₂ with Pd has been investigated in air containing reducing gases such as CO, H₂, and C₃H₈. The curves for ThO₂-doped sensors were significantly influenced by the reducing gases as compared to the sensors without ThO₂. From these results, it is found that in Pd-doped SnO₂ sensors the dopant plays an important role in oxidizing the surface of SnO₂ above 170°C, and that the addition of ThO₂ to Pd-doped SnO₂ enhances the effects of Pd by removing the adsorbed hydroxyl on SnO₂. It is also apparent that the interactions between reducing gases in air and SnO₂-based sensors depend upon the oxidizing rates of the surface of SnO₂, as well as the amounts of the adsorbed hydroxyl on SnO₂.     

Diffusion of aluminum into silicon nitride films

Aluminum diffusion into silicon nitride films at temperatures in the range 450–530°C was studied by Auger electron spectroscopy in conjunction with depth profiling. The activation energy for the diffusion of aluminum and the diffusion coefficient were found to be 2.0±0.3 eV and (7.3±3.5) x 10^-3 cm² s^-1, respectively. The chemical effects in the KLL aluminum Auger spectra together with the compositional depth profiles suggest that the migration of aluminum is dominated by volume diffusion which involves the reaction of aluminum with oxygen.     

Strain rate effects on viscoelastic crack bifurcation

The effects of applied strain rate on the viscoelastic crack bifurcation phenomenon in Polymethyl Methacrylate (PMMA) were investigated. It was still verified that the product $\text{σ}{}_{\mathrm{f}}\text{C}{}_{\mathrm{b}}{}^{\mathrm{<mtext>1</mtext><mtext>2</mtext>}}$ was constant, as was already observed by Congleton and Petch, and Anthony, Chubb and Congleton, for brittle elastic materials, for any strain rate, where σ_f = the gross fracture stress and C_b= the main crack length until the bifurcation starts. However, it was found that the higher strain rate increases the main crack length C_b resulting in the decrease in the gross fracture stress σ_f and vice versa. This might be interpreted that the higher stress concentration at the initiation crack tip, which is realized by becoming more brittle due to the higher strain rate owing to the predominance of the elastic element in the viscoelastic material, decreases the gross fracture stress leading to the longer main crack length.     

Local disturbances preceding a running crack front in a viscoelastic solid

The local disturbances ahead of a running crack front in a viscoelastic solid were measured through noncontact electro-optical tools. It was observed that the very high local strain rate up to 200/sec exists even in the present quasistatic loading case. It may be concluded that the running crack propagation velocities, not the conventional average strain rates ranging from about 10^?4/sec to 10^?2/sec, govern the local disturbances, as the crack propagation velocities always exceed 200m/sec for both average strain rates, while the local strain rates observed do not show much differences between both average strain rate cases.     

Low levels of apoptosis and proliferative activity in colorectal villous tumors: comparison with tubular tumors

In order to clarify the cell kinetics of colorectal villous tumors (VT), 21 villous adenomatous areas and 12 carcinomatous areas within villous adenomas were investigated for proliferative activity and apoptosis and compared with a series of 41 tubular tumors (TT), demonstrating elements of intramucosal carcinomas as well as tubular adenomas (so-called carcinoma in tubular adenoma). Proliferation was estimated in terms of Ki-67 labeling indices and mitotic indices, and apoptosis was assessed by DNA nick-end labeling to give apoptotic indices. Apoptotic indices of villous adenomatous and carcinomatous regions were significantly lower than the values for their tubular counterparts. Ki-67 labeling indices were also significantly lower for adenoma components. Apoptotic indices, Ki-67 labeling indices and mitotic indices increased with atypia raised in tubular adenoma components. Correlations of mitotic indices with apoptotic indices, Ki-67 labeling indices with apoptotic indices and mitotic indices with Ki-67 labeling indices were found for each villous tumor group and tubular tumor group, and the apoptosis and proliferation ratios for villous tumors were relatively low, suggesting a tendency for greater growth due to less cell deletion. Although this is only one of the biological features of villous tumor groups, it might play a major role in generation of malignancy.