Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

New low-noise output amplifier for high-definition CCD image sensor

A new low-noise charge-coupled-device (CCD) output amplifier, the RJG detector, has been developed. The RJG detector incorporates a JFET which has an electrically floating ring-junction gate (RJG). The operating principle of the amplifier is that signal charges, transferred from the CCD into the RJG, directly modulate the drain current in the detection JFET. The performance of the detector was evaluated by operating test devices under a 37-MHz clock frequency, which is the same frequency as that for the horizontal CCD operation in the recently developed 2-million-pixel high-definition CCD image sensor. It was found that 1/f noise was reduced by introducing the JFET and that reset noise was completely eliminated by achieving complete charge transfer through the reset operation. As a result, input referred noise equivalent electrons within the 18.5-MHz baseband were reduced to 17 (electrons)     

Simulation with an improved plasma model utilized to design a new structure of microwave plasma discharge for chemical vapor deposition of diamond crystals

A new structure of microwave plasma for chemical vapor deposition of diamond crystal is proposed. The structure is designed numerically, for which an improved model given in our previous work [H. Yamada et al., J. Appl. Phys. 101 (2007), art. no. 063302.] is utilized. The experimental observations and numerical predictions agree well with each other. It is demonstrated experimentally that the proposed structure can achieve a growth rate larger than 50 μm/h over an area 1 in. in diameter.     

Rapid determination of the membrane potential of mitochondria in small biopsy specimens of the liver

In liver transplantation, graft viability is ideally to be determined before implantation. Integrity of mitochondria may be a prerequisite to a viable graft. A new method is presented, which allows for the determination of the membrane potential of mitochondria (MPM; mV) in state 4 respiration within 50 min in 40-mg specimens, employing rhodamine 123 as a probe. Normal control showed a MPM of 239.2 mV. Storage in saline at 37 degrees C yielded an impaired MPM of 153.5 mV within 3 h. The cold storage at 1 degree C could preserve MPM at quasi-normal after 3 h but reduced it significantly after 24 h to 222.2 mV in saline (p < 0.005 vs. control) and 231.0 mV in UW solution (p < 0.05 vs. control): the difference between the 24-hour values was significant (p < 0.05).     

Effects of lamotrigine and conventional antiepileptic drugs on amygdala- and hippocampal-kindled seizures in rats

A computer aided monitor-data processing system (CAMP-System) was developed in order to get a consistent and comprehensive database which can very precisely reflect intra-operative haemodynamic courses. The goal of the present study was to introduce a new method to scan and to gauge haemodynamic courses and to demonstrate its superiority over the traditional way of data processing based on a handwritten anaesthesia protocol. METHODS: The computerized system was applied to a study which was designed to investigate the influence of ketanserin (K) vs. urapidil (U) on haemodynamic stability during cardiac operations. Twenty male patients scheduled for myocardial revascularization received either 20 mg K or 30 mg U. Heart rate, central venous, arterial and pulmonary artery pressures were measured and on-line recorded every 20 seconds by the computer record system. In the handwritten protocol these variables were registered at eight pre-defined time points. Computerized data processing (including artifact depletion and data condensation) was compared to the results evaluated from the handwritten protocol. RESULTS: While the only significant differences in the handwritten protocol were slightly higher values of pulmonary artery pressures in group K, the computer analysis revealed a number of further differences. Higher maximum and a less stable time course of HR in group K in the pre-bypass phase and lower mean and standard deviation of MAP during cardiopulmonary bypass. CONCLUSION: Computerized data processing including automatic artifact suppression and data condensation was able to reveal differences in the course of haemodynamic variables that cannot be detected in a conventional handwritten protocol.     

Synthesis of Cubic Boron Nitride from Boron Nitride Synthesized by Pressure Pyrolysis of Borazine

Cubic BN was synthesized under high-temperature and -pressure conditions from BN powder formed by pressure pyrolysis of borazine below 700°C and 100 MPa. The conversion of BN powder to cubic BN was strongly influenced by the residual hydrogen identified by the BH/BN ratio of IR absorption band. The activation energy for cubic BN synthesis from BN powder-20 mol% AIN was 46 kJ/mol, when the starting BN was synthesized at 250°C. A mixture of BN powder and cubic BN particles was converted to cubic BN in a 100% yield by heat treatment at 1800°C and 6.5 GPa without any catalyst. The presence of cubic BN particles does enhance the conversion to cubic BN from BN powder. The energy required for the transformation of starting BN to cubic BN in the presence of cubic BN seed was 355 kJ/mol.     

Self-aligned fabrication of single crystal diamond gated field emitter array

This paper describes a self-aligned fabrication process for diamond gated field emitter array (FEA). Utilizing the non-conformal coverage sputtering conditions of silicon oxide, an interesting “sphere on cone” structure is formed on diamond nano tip array, which is the key point of gate hole opening process. This structure causes shadowing at certain regions of side-wall during Ti / Au gate metal deposition. Removal of “sphere” by wet etching leads to the successful fabrication of a single crystalline diamond gated FEA. Scanning electron microscope observations reveal the fabrication of a uniform emitter array with tip radius of curvature (20 nm) and gate hole (1.4 μm). We also confirmed that no noticeable physical damage exists on tip. In field emission characteristics of the fabricated single crystal diamond gated FEA, gate voltage control of field emission current is realized.     

Rinsing effect of alkaline electrolyzed water on nickel surfaces

The improvement in the surface cleanliness of electroplated nickel by rinsing in alkaline electrolyzed water (AEW) was determined. When the nickel plated sample was rinsed with the AEW, it was found that the amount of residual sulfate ion on the surface of a sample decreased approximately by half compared to one rinsed only with de-ionized pure water. Because nanosize hydrogen bubbles are present in the AEW, and the zeta-potential has a negative value, we then surmised that the mechanism of rinsing was as follows: The sulfate ions are selectively absorbed on the nanosize colloidal hydrogen bubbles, or substituted for anions absorbed on the hydrogen bubbles. The sulfate ions absorbed on the nickel surface then become detached. The detached sulfate ions are absorbed on the surface of the hydrogen bubbles, and negatively charge the hydrogen bubbles. It can be considered that any detached sulfate ions do not re-adhere due to the electrical repulsion force of the negatively charged nickel surface. Thus the sample is efficiently rinsed.