Enhanced thermal stability of a sputtered titanium-nitride film as a diffusion barrier for capacitor-bottom electrodes

The effect of a thin RuO_x layer formed on the Ru/TiN/doped poly-Si/Si stack structure was compared with that on the RuO_x/TiN/doped poly-Si/Si stack structure over the post-deposition annealing temperature ranges of 450–600°C. The Ru/TiN/poly-Si/Si contact system exhibited linear behavior at forward bias with a small increase in the total resistance up to 600°C. The RuO_x/TiN/poly-Si/Si contact system exhibited nonlinear characteristics under forward bias at 450°C, which is attributed to no formation of a thin RuO_x layer at the RuO_x surface and porous-amorphous microstructure. In the former case, the addition of oxygen at the surface layer of the Ru film by pre-annealing leads to the formation of a thin RuO_x layer and chemically strong Ru-O bonds. This results from the retardation of oxygen diffusion caused by the discontinuity of diffusion paths. In particular, the RuO_x layer in a nonstoichiometric state is changed to the RuO₂-crystalline phase in a stoichiometric state after post-deposition annealing; this phase can act as an oxygen-capture layer. Therefore, it appears that the electrical properties of the Ru/TiN/poly-Si/Si contact system are better than those of the RuO_x/TiN/poly-Si/Si contact system.     

Fast locking delay-locked loop using initial delay measurement

A delay-locked loop (DLL) architecture capable of incorporating fast locking and low jitter features simultaneously is reported. A test chip was fabricated in a 0.6 μm CMOS process to prove its functionality. The proposed DLL can align the internal clock to the external reference clock within two cycles and maintain its locking state with the aid of feedback operation     

Evaluation of Monkman-Grant parameters for type 316LN and modified 9Cr-Mo stainless steels

The Monkman-Grant (M-G) and its modified parameters were evaluated for type 316LN and modified 9Cr-Mo stainless steels prepared with minor element variations. Several sets of creep data for the two alloy systems were obtained by constant-load creep tests in 550-650°C temperature range. The M-G parameters,m, m’,C, andC’ were proposed and discussed for the two alloy systems. Them value of the M-G relation was 0.90 in type 316LN steel and 0.84 in modified 9Cr-Mo steel. Them’, value of the modified relation was 0.94 in type 316LN steel and 0.89 in 9Cr-Mo steel. Although creep fracture modes and creep properties between type 316LN and modified 9Cr-Mo steels showed a basic difference, the M-G and its modified relations demonstrated linearity quite well. Them’ of modified relation almost overlapped regardless of the creep testing conditions and chemical variations in the two alloy systems, and the parameterm’ was closer to unity than that of the M-G relation.     

Numerical modeling of combustion processes and pollutant formations in direct-injection diesel engines

The Representative Interactive Flamelet (RIF) concept has been applied to numerically simulate the combustion processes and pollutant formation in the direct injection diesel engine. Due to the ability for interactively describing the transient behaviors of local flame structures with CFD solver, the RIF concept has the capabilities to predict the auto-ignition and subsequent flame propagation in the diesel engine combustion chamber as well as to effectively account for the detailed mechanisms of soot formation, NO_X formation including thermal NO path, prompt and nitrous NO_X formation, and reburning process. Special emphasis is given to the turbulent combustion model which properly accounts for vaporization effects on the mixture fraction fluctuations and the pdf model. The results of numerical modeling using the RIF concept are compared with experimental data and with numerical results of the commonly applied procedure which the low-temperature and high-temperature oxidation processes are represented by the Shell ignition model and the eddy dissipation model, respectively. Numerical results indicate that the RIF approach including the vaporization effect on turbulent spray combustion process successfully predicts the ignition delay time and location as well as the pollutant formation.     

Microprocessor-Based Control of an Ion Beam Deposition System

A microprocessor-based system with 32 A/D, 24 D/A, and 16 ac load controllers, has been designed and built to monitor and control an ion beam thin-film deposition system. The A/D and D/A channels have electrical isolation of 7.5 kV between channels and between input and output. The microprocessor system keeps the ion beam deposition parameters stable for extended periods of operation and it is proposed as a means to greatly simplify switching from one deposition species to another to grow thin multilayer or alloy films.     

Smart TDI readout circuit for long-wavelength IR detector

A smart time delay and integration (TDI) readout circuit is suggested which performs background suppression, cell-to-cell non-uniformity compensation, and dead pixel correction. Using the smart TDI readout circuit, the integration capacitor area occupying almost the whole area of a unit-cell can be reduced to one-fifth and transimpedance gain can increase by five times. From measurement results, it is found that the skimming current error for a few hundred nA background current is < 1.25 nA corresponding to LSB/2 of ADC and the non-uniformity introduced by cell-to-cell background current variation is reduced to 1.02 nA     

Nondestructive evaluation of the characteristics of degraded materials using backward radiated ultrasound

The frequency dependency of Rayleigh surface wave is investigated indirectly by measuring the angular dependency of the backward radiation of the incident ultrasonic wave in two kinds of degraded specimens by scuffing or corrosion. Then, the frequency dependency is compared with the residual stress distribution or the corrosion-fatigue characteristics for the scuffed or corroded specimens, respectively. The width of the backward radiation profile increases with the increase of the variation in residual stress distribution for the scuffed specimens. In the corroded specimens, the profile width decreases with the increase of the effective aging layer thickness and is inversely proportional to the exponent, m, in the Paris’ law that can predict the crack size increase due to fatigue. The result observed in this study demonstrates high potential of backward radiated ultrasound as a tool for nondestructive evaluation of subsurface gradient of material degradation generated by scuffing or corrosion.     

A 0.9 V 92 dB Double-Sampled Switched-RC Delta-Sigma Audio ADC

A 0.9 V third-order double-sampled delta-sigma audio ADC is presented. A new method using a combination of a switched-RC technique and a floating switched-capacitor double-sampling configuration enabled low-voltage operation without clock boosting or bootstrapping. A three-level quantizer with simple dynamic element matching was used to improve linearity. The prototype IC implemented in a 0.13 CMOS process achieves 92 dB DR, 91 dB SNR and 89 dB SNDR in a 24 kHz audio signal bandwidth, while consuming 1.5 mW from a 0.9 V supply. The prototype operates from 0.65 V to 1.5 V supply with minimal performance degradation.     

Facile modifications of polyimide via chloromethylation: II. Synthesis and characterization of thermocurable transparent polyimide having methylene acrylate side groups

From chloromethylated polyimide, a useful starting material for modification of aromatic polyimides, a thermocurable transparent polyimide having acrylate side groups was prepared. In the presence of 1,8‐diazabicyclo[5,4,0]undec‐7‐ene, chloromethylated polyimide was esterified with acrylic acid to synthesize poly(imide methylene acrylate). The polymer was soluble in organic solvent, which makes it possible to prepare a planar film by spin coating. The polymer film became insoluble after thermal treatment at 230 °C for 30 min. Optical transparency of the film at 400 nm (for 1 µm thickness) was higher than 98 % and not affected by further heating at 230 °C for 250 min. Adhesion properties measured by the ASTM D3359‐B method ranged from 4B to 5B. Preliminary results of planarization testing showed a high degree of planarization (DOP) value (>0.53). These properties demonstrate that poly(imide methylene acrylate) could be utilized as a thermocurable transparent material in fabricating display devices such as TFT‐LCD. Copyright © 2004 Society of Chemical Industry