Pad effects on material-removal rate in chemical-mechanical planarization

The role of a porous pad in controlling material-removal rate (MRR) during the chemical-mechanical planarization (CMP) process has been studied numerically. The numerical results are used to develop a phenomenological model that correlates the forces on each individual abrasive particle to the applied nominal pressure. The model provides a physical explanation for the experimentally observed domains of pressure-dependent MRR, where the pad deformation controls the load sharing between active-abrasive particles and direct pad-wafer contact. The predicted correlations between MRR and slurry characteristics, i.e., particle size and concentration, are in agreement with experimentally measured trends reported by Ouma¹ and Izumitani.²     

Photostability of polyetherurethaneureas

Polyetherurethaneureas (PEUUs) were synthesised from polyethylene-glycols (PEGs) of molecular weight 400, 600 and 1000, 4,4′-diphenylmethanediisocyanate (MDI) and aliphatic diamine chain extenders, 1,3-propanediamine (PDA) and 1,6-hexanediamine (HDA). Polymer films were irradiated with 365 nm light at 293 K and the effects of polyether soft segment length and urea hard segment on photo-oxidative stability were studied by following the variation in weight-average molecular weight (M _w), gel formation and stress-strain properties. Changes in ultraviolet and infrared spectroscopy were monitored on photo-oxidation and hydroperoxide content determined. The soft segment length was increased by increasing the molecular weight of PEG from 400 to 1000 and hard segment structure was changed by variation of diamine. It was noted that the structure of urea and polyether soft segment length plays an important role in photostability of PEUUs. PDA chain extended PEUUs were more stable than HDA chain extended PEUUs.     

Wavelet based Denial-of-Service detection

Network Denial-of-Service (DoS) attacks that disable network services by flooding them with spurious packets are on the rise. Criminals with large networks (botnets) of compromised nodes (zombies) use the threat of DoS attacks to extort legitimate companies. To fight these threats and ensure network reliability, early detection of these attacks is critical. Many methods have been developed with limited success to date. This paper presents an approach that identifies change points in the time series of network packet arrival rates. The proposed process has two stages: (i) statistical analysis that finds the rate of increase of network traffic, and (ii) wavelet analysis of the network statistics that quickly detects the sudden increases in packet arrival rates characteristic of botnet attacks.Most intrusion detections are tested using data sets from special security testing configurations, which leads to unacceptable false positive rates being found when they are used in the real world. We test our approach using data from both network simulations and a large operational network. The true and false positive detection rates are determined for both data sets, and receiver operating curves use these rates to find optimal parameters for our approach. Evaluation using operational data proves the effectiveness of our approach.     

Stepwise-Graded Si3N4–SiC Ceramics with Improved Wear Properties

The processing of stepwise graded Si₃N₄/SiC ceramics by pressureless co-sintering is described. Here, SiC (high elastic modulus, high thermal expansion coefficient) forms the substrate and Si₃N₄ (low elastic modulus, low thermal expansion coefficient) forms the top contact surface, with a stepwise gradient in composition existing between the two over a depth of ∼1.7 mm. The resulting Si₃N₄ contact surface is fine-grained and dense, and it contains only 2 vol% yttrium aluminum garnet (YAG) additive. This graded ceramic shows resistance to cone-crack formation under Hertzian indentation, which is attributed to a combined effect of the elastic-modulus gradient and the compressive thermal-expansion-mismatch residual stress present at the contact surface. The presence of the residual stress is corroborated and quantified using Vickers indentation tests. The graded ceramic also possesses wear properties that are significantly improved compared with dense, monolithic Si₃N₄ containing 2 vol% YAG additive. The improved wear resistance is attributed solely to the large compressive stress present at the contact surface. A modification of the simple wear model by Lawn and co-workers is used to rationalize the wear results. Results from this work clearly show that the introduction of surface compressive residual stresses can significantly improve the wear resistance of polycrystalline ceramics, which may have important implications for the design of contact-damage-resistant ceramics.     

Space and time efficient parallel algorithms and software for EST clustering

Expressed sequence tags, abbreviated as ESTs, are DNA molecules experimentally derived from expressed portions of genes. Clustering of ESTs is essential for gene recognition and for understanding important genetic variations such as those resulting in diseases. We present the algorithmic foundations and implementation of PaCE, a parallel software system we developed for large-scale EST clustering. The novel features of our approach include 1) design of space-efficient algorithms to limit the space required to linear in the size of the input data set, 2) a combination of algorithmic techniques to reduce the total work without sacrificing the quality of EST clustering, and 3) use of parallel processing to reduce runtime and facilitate clustering of large data sets. Using a combination of these techniques, we report the clustering of 327,632 rat ESTs in 47 minutes, and 420,694 Triticum aestivum ESTs in 3 hours and 15 minutes, using a 60-processor IBM xSeries cluster. These problems are well beyond the capabilities of state-of-the-art sequential software. We also present thorough experimental evaluation of our software including quality assessment using benchmark Arabidopsis EST data.     

Studies on lymphocyte subpopulations and the effect of age on immune competence in turkeys

We characterized the lymphocyte subpopulations and investigated the effect of age on cellular and humoral immunity, development of lymphoid organs, and the relative proportions of CD4+ and CD8+ cells in turkeys. The mitogenic responses of peripheral T cells were poorly developed at hatch but developed rapidly after hatch and reached adult levels by 2 weeks-of-age. The average percentage of CD4+ cells was 45, 29.8, and 26.3 in the thymi, peripheral blood, and spleens, respectively, in turkeys. The mean percentage of CD8+ cells in the thymi, peripheral blood, and spleens of turkeys was 53.8, 13.6, and 15.5, respectively. Age did not influence the relative proportions of CD4+ and CD8+ T cells in the spleens and peripheral blood of turkeys. The mean percentages of IgM+ cells in the bursae and spleens were 78.5 and 26.8, respectively. Day-old turkeys did not develop detectable antibodies to either thymus dependent or independent antigens. However, 2 week or older turkeys showed good humoral responses. Inoculation of BSA at hatch induced tolerance, whereas injection of SRBC did not. Analysis of relative organ weights of turkey lymphoid organs showed that spleens and thymi developed rapidly during the first week-of-age.     

Miniaturization and bandwidth enhancement of a cavity backed circular microstrip patch antenna

The resonant frequency of a circular patch antenna with and without circular cavity is measured. The patch miniaturization in the presence of the cavity is proved. Different methods of reducing resonant frequencies and broadening bandwidth without significantly reducing antenna gain are presented. Capacitively loaded patch and slits on the patch stimulate the patch at lower frequencies and multiple resonances, thus help miniaturization. Finally ferrite loading on the feed probe further increases the bandwidth without significantly reducing the antenna gain. The method is much more improved than that for a resistive loaded patch and a deformed patch. © 2007 Wiley Periodicals, Inc. Int J RF and Microwave CAE, 2007.