Material and process challenges in 100 nm interconnects module technology and beyond

In order for ultra-large-integrated (ULSI) circuits manufacturing to minimize the Cost of Ownership (CoO) aspect in the wiring process and realize fabricating semiconductor devices over 100 nm node, several Cu/low-k wiring technologies have been proposed. The evidential criteria in choosing the most probable one are physical or material limitation and requirements from manufacturing. A development of module processes (e.g., processing from low-k dielectrics to metal CMP) with proven equipment and material is an appropriate approach and has a high potential in overcoming those difficulties. In this paper, an advantage of dual Damascene Cu wiring accompanied with low-k (dielectric constant ∼2.7) and prediction of 100 nm Cu wiring module will be discussed.     

Synthesis and characterization of poly(N-tert-alkylmaleimide)s

N-tert-Butylmaleimide (tBMI) polymerized readily in the presence of a radical initiator in spite of its bulky N-substituent to give a high molecular weight and less-flexible poly(substituted methylene). From kinetic investigation for the polymerization of tBMI with 2,2-azobisisobutyronitrile (AIBN) in benzene, it was revealed that the rate of polymerization (R _p) was expressed as R _p=k [AIBN]^0.51[tBMI]^1.4, and the overall activation energy was 99.6 kJ/mol. The high polymerization of tBMI was assumed to result from the decrease in the rate of bimolecular termination between rigid polymer radicals bearing a bulky substituent. The flexibility of the polymer chain was examined by the viscometric and light scattering methods, and the effect on the polymerization reactivity was discussed.     

Liver phosphatidylcholine hydroperoxidation provoked by ethionine-containing choline-deficient diet in mice

It is shown that peroxidation of phosphatidylcholine (PC) is enhanced in liver of mice fed a hepatocarcinogenic choline-deficient diet containing 0.1% w/w ethionine. Mice were divided into 4 groups and fed for 3 weeks one of the following diets: choline-supplemented; choline-supplemented containing ethionine; choline-deficient; and choline-deficient containing ethionine. Phosphatidylcholine hydroperoxide (PCOOH) of liver lipids was measured by high performance liquid chromatography using a chemiluminescence detector. Mice fed a choline-deficient diet containing ethionine showed 6-fold higher PCOOH levels than the choline-supplemented control mice: the PCOOH/PC molar ratios of liver lipids were 32.3×10⁻⁵ and 5.6×10⁻⁵, respectively. In addition to this remarkable degree of lipid peroxidation in liver of mice fed the choline-deficient diet containing ethionine, we also observed a significant liver fatty infiltration, a decrease in plasma and liver α-tocopherol, and an increase in liver injury-indicative enzyme activities. Also, marker enzymes for hepatocarcinogenesis, glucose-6-phosphatase and γ-glutamyl transpeptidase were affected. These data suggest that enhanced hydroperoxidation of phosphatidylcholine may participate in hepatocarcinogenesis provoked by choline deficiency in the presence of ethionine.     

Superconducting Coupling Nature at Grain Boundaries in Bi2Sr2CaCu2Ox Glass-Ceramics

Superconducting coupling nature at grain boundaries in Bi₂Sr₂CaCu₂O _x glass-ceramics consisting mainly of the low- T _c phase was first examined by measuring superconducting properties and temperature or ac field dependence of ac complex susceptibility. It was found from the ac loss peaks that superconducting coupling at grain boundaries was basically characterized by three types of weak links. The weak-link behaviors at grain boundaries depended strongly on cooling conditions after annealing and annealing time and temperature. Particularly, it was found that the weak links at grain boundaries were improved by prolonged annealing at 840°C. The furnace-cooled glass-ceramics obtained by annealing at 820° or 840°C for about 200 h exhibited a critical transport current density (77 K, zero magnetic field) of about 200 A/cm².     

Lattice parameter determination of a strained area of an InAs layer on a GaAs substrate using CBED

All the six lattice parameters (a, b, c, alpha, beta and gamma) of a strained area of an InAs layer grown on a GaAs substrate were determined without any assumption of the crystal lattice symmetry from the higher-order Laue zone (HOLZ) lines appearing in one convergent-beam electron diffraction (CBED) pattern. The analysis was performed with three steps. Firstly, the parameters alpha and beta were determined from the deviations of the HOLZ lines from the mirror symmetry perpendicular to the [001] direction. Secondly, the parameter c was determined from the distance between the intersections of the HOLZ lines, which have the same h and k indices but different l indices. Finally, the parameters a, b and gamma were determined simultaneously from several distances between the intersections of the HOLZ lines. The lattice parameters determined for the strained area were a = 0.611(2) nm, b = 0.615(1) nm, c = 0.6119(7) nm, alpha = 89.5(1) degrees, beta = 89.0(2) degrees and gamma = 89.1(2) degrees. This result implies that the cubic lattice of InAs is elongated approximately in the [111] direction and the exact lattice symmetry is triclinic. The same analysis procedure was applied to another two specimen areas. It was found that the areas have orthorhombic distortions with lattice parameters a = 0.607(2) nm, b = 0.604(1) nm and c = 0.6085(7) nm for one area, and with a = 0.607(2) nm, b = 0.605(1) nm and c = 0.6065(7) nm for the other area. It is should be emphasized that the present analysis of lattice distortions is immediately applicable to the other semiconductors, such as Si, SiGe or GaAs layers, without assuming any crystal system.     

Lipid droplets: size matters

The lipid droplet (LD), an organelle that exists ubiquitously in various organisms, from bacteria to mammals, has attracted much attention from both medical and cell biology fields. The LD in white adipocytes is often treated as the prototype LD, but is rather a special example, considering that its size, intracellular localization and molecular composition are vastly different from those of non-adipocyte LDs. These differences confer distinct properties on adipocyte and non-adipocyte LDs. In this article, we address the current understanding of LDs by discussing the differences between adipocyte and non-adipocyte LDs.     

Direct Measurement of Positronium HyperFine Structure: ～ A New Horizon of Precision Spectroscopy Using Gyrotrons ～

Positronium is an ideal system for research on QED, especially in a bound state. A discrepancy (3.9σ) is found recently between measured HFS values and the QED prediction (including up-to O(α ³ log α ^− 1), where α is the fine-structure constant.). It might be due to a contribution of unknown new physics or common systematic problems in all the previous measurements. A new method to measure HFS directly is performed using a high power gyrotron. The transition from ortho-positronium to para-positronium has been observed with 5 σ CL, which is the first observation of M1 transition in (sub)Terahertz region. New technologies of high power gyrotrons are developed for precision spectroscopy.     

Degradation of organophosphorus pesticides in aqueous extracts of young green barley leaves (Hordeum vulgare L)

The degradation of the organophosphorus pesticides malathion, chlorpyrifos, guthion, diazinon, methidathion and parathion in an aqueous extract of young green barley leaves (Hordeum vulgare L) was monitored by gas chromatography. Aqueous solutions of various amounts of freeze‐dried young barley leaves containing 5.75 mg l⁻¹ of malathion were incubated at 37 °C and pH 7.4 over prolonged time periods. Over 95% of the malathion degraded in 4 h in a 3% (30 g l⁻¹) solution of young green barley leaves. When the barley solution was autoclaved at 120 °C for 25 min prior to the addition of malathion, no degradation of malathion was observed. When 10 mg l⁻¹ each of the above six pesticides was incubated in a 15% (150 g l⁻¹) solution of young green barley leaves for 3 h at 37 °C and pH 7.4, malathion and chlorpyrifos degraded 100%, whereas parathion (75%), diazinon (54%), guthion (41%) and methidathion (23%) showed lesser degrees of degradation. © 1999 Society of Chemical Industry     

The Direct Spectroscopy of Positronium Hyperfine Structure Using a Sub-THz Gyrotron

Positronium is an ideal system for research on Quantum Electrodynamics (QED), especially in a bound state. A discrepancy of 3.9 standard deviations has been found between the measured hyperfine structure (Ps-HFS) and the QED predictions. This may be due to the contribution of unknown new physics or common systematic effects in previous measurements, in all of which the Zeeman effect was used. We propose a new method to directly measure the Ps-HFS using a high power gyrotron. We compare two resonators which have been developed to supply sufficient power to drive the direct transition, a Fabry-Pérot resonator and a ring resonator with a diffraction grating. We plan to perform first direct measurement of Ps-HFS within the next six months.