Development of an end-point detector for parylene deposition process

Parylene is an emerging material for MEMS. It is an organic material that is grown by using the chemical vapor deposition method at room temperature. The deposition thickness is commonly controlled by the amount of solid-phase dimer loaded in a sublimation chamber. In a conventional deposition machine, the end point of the process is designated by the moment the dimer is exhausted. However, this end-of-process criterion does not offer precise, repeatable control of film thickness. We present the results of the development of an in situ end-point detector for a Parylene chemical vapor deposition process. The detector is based on the thermal transfer principle and can be implemented on commercial parylene deposition systems with minimal system modification. Such a sensor enables a user to stop the deposition when a targeted thickness is reached. The end point detector is very simple to implement on existing parylene deposition systems. A series of such sensors with different target deposition thickness would allow extraction of the actual deposition rate within a deposition run.     

兖矿集团公司驻地配电网自动化的初步实现

本文介绍了配电自动化系统，提出了在兖矿集团驻地6kV配电系统实现自动化的意义，并提出了该系统的实现方案及功能特点。     

Study on Preparation and Application of Ti／Si Complex Zeolite

A Ti/Si complex zeolite has been prepared. X-ray diffraction and infrared spectrometry study has shown that two structures, namely the ZSM-5 and MCM-41, exist in the sample. BET tests have revealed that the complex zeolite contains regular mesopores of 2.6 nm. Ultraviolet spectrometry analysis has shown that the Ti species exist in the zeolite skeleton in the form of tetra-coordinate valence. The Ti/Si complex zeolite (TS-1/Ti-MCM-41) has apparently improved catalytic activity with respect to the macromolecular organic compound oxidation as compared to individual components of either Ti or Si containing zeolites (TS-1 and Ti-MCM-41).     

Applications and exploitation of Virtual Instruments based on Delphi6

This paper introduces hardware connections between computer and intellectualized instrument based on 89c51 sin-glechip .It gives the techniques to compile internet applications of Virtual Instruments with Delphi6.     

聚丙烯增韧改性研究进展

综述了国内增韧改性聚丙烯的研究动向 ,介绍了近年来茂金属聚烯烃弹性体和有机/无机纳米粒子增韧聚丙烯的新技术     

Modeling Multiterminal Spintronic Devices

We are encountering tremendous opportunities and challenges in combining emerging nanotechnology for developing nanoelectronic devices. Researchers are designing nanoelectronic circuits based on newly discovered nanoscale building blocks, such as spintronic devices. In this paper, we calculate conductance in spintronic gates using the nonequilibrium Green's function and show useful operations for "multiterminal" logic gates. These spintronic devices can be used to design complicated spin circuits     

曲流河沉积亚相的地震识别方法

本文提出利用三维地震资料相干数据分析研究曲流河沉积相的方法，其优点是在地质分析的基础上，对沉积体系有较为明显的识别特征，且在钻井较少的地区尤为实用。该方法在济阳拗陷东北部上第三系应用中取得了较为明显的效果。     

单线年产30万吨水煤浆生产线的设计

介绍了山东枣庄矿业(集团)公司八一燎原水煤浆公司单线30万t水谋浆生产线设计的原则及其关键技术的研制开发情况。     

石油套管的壁厚公差对承载能力的影响

石油套管的强度计算是按API标准进行的，它未能反映高强度套管和尺寸公差对抗压溃能力的影响。利用弹塑性力学理论建立理想的石油套管的抗压溃能力计算公式，并考虑套管的壁厚公差对计算公式进行修正。用该方法对受均匀载荷及非均匀载荷作用的套管进行分析，并同有限元计算结果相比，两者十分吻合，说明该方法的有效性。