Carbon hard masks for etching sub-90 nm structures

Carbon hard mask structures have been used to etch a variety of materials typically used in sub 90 nm DRAM manufacture. The results indicate that carbon hard masks can be used very effectively to structure oxide, nitride and metal films giving the CD performance required for the technologies being investigated.     

Widely Tunable Morphologies in Block Copolymer Thin Films Through Solvent Vapor Annealing Using Mixtures of Selective Solvents

Thin films of block copolymers are extremely attractive for nanofabrication because of their ability to form uniform and periodic nanoscale structures by microphase separation. One shortcoming of this approach is that to date the design of a desired equilibrium structure requires synthesis of a block copolymer de novo within the corresponding volume ratio of the blocks. In this work, solvent vapor annealing in supported thin films of poly(2‐hydroxyethyl methacrylate)‐block‐poly(methyl methacrylate) [PHEMA‐b‐PMMA] by means of grazing incidence small angle X‐ray scattering (GISAXS) is investigated. A spin‐coated thin film of a lamellar block copolymer is solvent vapor annealed to induce microphase separation and improve the long‐range order of the self‐assembled pattern. Annealing in a mixture of solvent vapors using a controlled volume ratio of solvents, which are chosen to be preferential for each block, enables selective formation of ordered lamellae, gyroid, hexagonal, or spherical morphologies from a single‐block copolymer with a fixed volume fraction. The selected microstructure is then kinetically trapped in the dry film by rapid drying. This paper describes what is thought to be the first reported case where in situ methods are used to study the transition of block copolymer films from one initial disordered morphology to four different ordered morphologies, covering much of the theoretical diblock copolymer phase diagram.     

Intrinsic bonding defects in transition metal elemental oxides

Gate dielectrics comprised of nanocrystalline HfO₂ in gate stacks with thin SiO₂/SiON interfacial transition regions display significant asymmetries with respect to trapping of Si substrate injected holes and electrons. Based on spectroscopic studies, and guided by ab initio theory, electron and hole traps in HfO₂ and other transition metal elemental oxides are assigned to O-atom divacancies, clustered at internal grain boundaries. Three engineering solutions for defect reduction are identified: i) deposition of ultra-thin, <2 nm, HfO₂ dielectric layers, in which grain boundary formation is suppressed by effectively eliminating inter-primitive unit cell π-bonding interactions, ii) chemically phase separated high HfO₂ silicates in which inter-primitive unit cell p-bonding interactions are suppressed by the two nanocrystalline grain size limitations resulting from SiO₂ inclusions, and iii) non-crystalline Zr/Hf Si oxynitrides without grain boundary defects.     

Perceptual-based quality assessment for audio–visual services: A survey

Accurate measurement of the perceived quality of audio–visual services at the end-user is becoming a crucial issue in digital applications due to the growing demand for compression and transmission of audio–visual services over communication networks. Content providers strive to offer the best quality of experience for customers linked to their different quality of service (QoS) solutions. Therefore, developing accurate, perceptual-based quality metrics is a key requirement in multimedia services. In this paper, we survey state-of-the-art signal-driven perceptual audio and video quality assessment methods independently, and investigate relevant issues in developing joint audio–visual quality metrics. Experiments with respect to subjective quality results have been conducted for analyzing and comparing the performance of the quality metrics. We consider emerging trends in audio–visual quality assessment, and propose feasible solutions for future work in perceptual-based audio–visual quality metrics.     

Spontaneous Current Oscillations during Hard Anodization of Aluminum under Potentiostatic Conditions

Nanoporous anodic aluminum oxide is prepared by hard anodization of aluminum under potentiostatic conditions using 0.3 M H₂C₂O₄. Under unstirred electrolyte condition, spontaneous current oscillations are observed. The amplitude and period of these current oscillations are observed to increase with anodization time. As a consequence of the oscillatory behavior, the resulting anodic alumina exhibits modulated pore structures, in which the diameter contrast and the length of pore modulation increase with the amplitude and the period of current oscillations, respectively, and the current peak profile determines the internal geometry of oxide nanopores. The mechanism responsible for the oscillatory behavior is suggested to be a diffusion‐controlled anodic oxidation of aluminum.     

Topology control for fault-tolerant communication in wireless ad hoc networks

Fault-tolerant communication and energy efficiency are important requirements for future-generation wireless ad hoc networks, which are increasingly being considered also for critical application domains like embedded systems in automotive and aerospace. Topology control, which enables multi-hop communication between any two network nodes via a suitably constructed overlay network, is the primary target for increasing connectivity and saving energy here. In this paper, we present a fault-tolerant distributed topology control algorithm that constructs and continuously maintains a k-regular and k-node-connected overlay for energy-efficient multi-hop communication. As a by-product, it also builds a hierarchy of clusters that reflects the node density in the network, with guaranteed and localized fault-tolerant communication between any pair of cluster members. The construction algorithm automatically adapts to a dynamically changing environment, is guaranteed to converge, and exhibits good performance as well.     

Optical reconstruction of high-speed surface dynamics in an uncontrollable environment

The ability to communicate with our voice can be regarded as the concatenation of the two processes "phonation" and "modulation." These take place in the larynx and palatal and oral region, respectively. During phonation the audible primary voice signal is created by mutual reaction of vocal folds with the exhaled air stream of the lungs. The underlying interactions of masses, fluids and acoustics have yet to be identified and understood. One part of the primary signal's acoustical source are vortex induced vibrations, as e.g., created by the Coand?effect in the air stream. The development of these vorteces is determined by the shape and 3-D movements of the vocal folds in the larynx. Current clinical in vivo research methods for vocal folds do not deliver data of satisfactory quality for fundamental research, e.g., an endoscope is limited to 2-D image information. Based hereupon, a few improved methods have been presented, however delivering only selective 3-D information, either for a single point or a line. This stands in contrast to the 3-D motions of the entire vocal fold surface. More complex imaging methods, such as MRI, do not deliver information in real-time. Thus, it is necessary to develop an easily applicable, more improved examination method, which allows for 3-D data of the vocal folds surfaces to be obtained. We present a method to calibrate a 3-D reconstruction setup including a laser projection system and a high-speed camera. The setup is designed with miniaturization and an in vivo application in mind. The laser projection system generates a divergent grid of 196 laser dots by diffraction gratings. It is calibrated with a planar calibration target through planar homography. In general, the setup allows to reconstruct the topology of a surface at high frame rates (up to 4000 frames per second) and in uncontrollable environments, as e.g., given by the lighting situation (little to no ambient light) and varying texture (e.g., varying grade of reflection) in the human larynx. In particular, this system measures the 3-D vocal fold surface dynamics during phonation. Applied to synthetic data, the calibration is shown to be robust (error approximately 0.5 μm) regarding noise and systematic errors. Experimental data gained with a linear z -stage proved that the system reconstructs the 3-D coordinates of points with an error at approximately 15 μm. The method was applied exemplarily to reconstruct porcine and artificial vocal folds' surfaces during phonation. Local differences such as asymmetry between left and right fold dynamics, as well as global parameters, such as opening and closing speed and maximum displacements, were identified and quantified.     

An integrated 8-12 GHz fractional-N frequency synthesizer in SiGe BiCMOS for satellite communications

We present an integrated fractional-N low-noise frequency synthesizer for satellite applications. By using two integrated VCOs and combining digital and analog tuning techniques, a PLL lock range from 8 to 12 GHz is achieved. Due to a small VCO fine tuning gain and optimized charge pump output biasing, the phase noise is low and almost constant over the tuning range. All 16 sub-bands show a tuning range above 900 MHz each, allowing temperature compensation without sub-band switching. This makes the synthesizer robust against variations of the device parameters with process, supply voltage, temperature and aging. The measured phase noise is ?87 dBc/Hz and ?106 dBc/Hz at 10 kHz and 1 MHz offset, respectively. In integer-N mode, phase noise values down to ?98 dBc/Hz at 10 kHz and ?111 dBc/Hz at 1 MHz offset, respectively, were measured.     

Parametric toeplitz systems

This paper investigates the properties of the two-variable polynomialu (, z) built on the first column of the adjoint matrix ofI -C, whereC is a given Hermitian Toeplitz matrix. In particular, the stability properties ofu (,z) are discussed and are shown to depend essentially on the location of X with respect to the eigenvalues ofC. The eigenvectors ofC, which have recently found some applications in signal processing and estimation theory, are obtained from the polynomialu(,z) when tends to the eigenvalues ofC. This allows one to derive several results concerning the eigenpolynomials, including those for the case of multiple eigenvalues.