Chemical mechanical polishing of polymer films

Strategies to reduce capacitance effects associated with shrinking integrated circuit (IC) design rules include incorporating low resistivity metals and insulators with low dielectric values, or “low-κ” materials. Using such materials in current IC fabrication schemes necessitates the development of reliable chemical mechanical polishing (CMP) processes and process consumables tailored for them. Here we present results of CMP experiments performed on FLARE™ 2.0 using a specialized zirconium oxide (ZrO₂) polishing slurry. FLARE™ 2.0 is a poly(arylene) ether from AlliedSignal, Inc. with a nominal dielectric constant of 2.8. In addition, we provide insight into possible removal mechanisms during the CMP of organic polymers by examining the performance of numerous abrasive slurries. Although specific to a limited number of polymers, the authors suggest that the information presented in this paper is relevant to the CMP performance of many polymer dielectric materials.     

Coliphage prevalence in high school septic effluent and associated ground water

At the present time, somatic and male-specific coliphage and human enterovirus groups are being considered as indicators of possible pathogenic human enteric virus contamination from fecal contamination. A primary attribute for any indicator of fecal contamination is its prevalence at the source and in associated ground water. It must be consistently found in the source material at concentrations that are measurable with available techniques. Over a period of ten months, male-specific and somatic coliphage ranged from 7000 to 4,000,000 PFU/L in the effluent from a multi-user septic-tank. Unlike the values determined for septic-tank effluent, coliphage concentrations measured in ground water over this same period only varied by five-fold. Coliphage concentration in ground water under the down-gradient edge of the drainfield contained 1000 PFU/L. This concentration decreased at −1 log₁₀/5 m during 17.4 m of ground-water transport. From these data, coliphage concentrations in septic-tank effluent seem sufficient to allow their use as indicators of fecal contamination in ground water.     

城市加油站的防火与消防管理

介绍汽车加油站在防火设计与消防管理方面需注意的问题，主要包括站址选择、总平面布置、油罐设置、管线布置、卸油方式等方面，同时对加油站的日常操作与防火消防管理提出了要求。     

Reliability and performance analysis of time – space – time switching networks with multiple separated space switches

Since electronic switching systems usually require very strict reliability requirements as well as good performance objectives, we need to jointly analyse the performance and reliability of switching systems. In this paper, we compare conventional time–space–time switches with single space switches with those with multiple separated space switches, from the viewpoints of reliability and performance. We consider time–space–time switching networks which consist of N incoming time switches, i.e. one NxN space switch, two (N/2)x(N/2) space switches, and four (N/4)x(N/4) space switches. We introduce a Markov reliability model to study the effect of failures and analyse the reliability and performance of three different types of switching networks in terms of average blocking probability and the mean time to unreliable operation, as we vary the offered traffic. As a result, T–S–T switching networks with multiple separated space switches exhibit better performance and reliability than those with single space switches.     

基于空间矩的灰度边缘亚像元度量精度分析

灰度图像中边缘定位受采样密度限制，亚像元精度度量方法在需要高精度的应用中受到重视，要想知识到底需要多高的分辨率才能达到定精度指标，就有必要分析特征定位方法的最坏情况的精度，文中用分析和实验的方法给出了基于空间矩的边缘定位方法，对于边缘点，边缘直线以及直边缘区域的最坏情况定位精度分析。分析和讨论的结果不但可以用来确定已知形状位置估计的最大误差，而且还可用于对准的形状几何参数，以获得较高的精度。     

用层次分析法(AHP)确定QFD中客户需求权重

客户需求权重的确定是质量功能配置(QFD)实现过程中的重要一环，然而传统的确定权重的方法都有各自的缺陷。本文采用层次分析法(AHP)来确定客户需求的权重，首先建立了评价模型，并构造出比较判断矩阵，然后通过层次排序和一致性检验，最终获得了接近实际的客户需求权重结果。文章最后以某企业所生产的车床的客户需求为例，验证了用AHP法来确定QFD中客户需求权重的可行性。     

粘土矿物对低渗透储层性质的影响——以鄂尔多斯盆地三叠系低渗透储层为例

粘土矿物是低渗砂岩储层的主要胶结物，对储层物性及开发过程中储层物性变化趋势有着重要的影响和控制作用。另外，粘土矿物也蕴含着大量沉积环境介质的物理化学信息，认识其自然规律，可以有效地指导预测有利储层，认识和改造油层。以鄂尔多斯盆地砂岩储层中的粘土矿物为研究对象，探讨分析粘土矿物对低渗储层性质的影响，该研究对含油气盆地低渗储层有效开发具有一定的参考价值。     

蒸汽凝结水除油试验研究

介绍了利用类萃取技术进行蒸汽凝结水除油的过程。利用具有亲油功能的HOL-100树脂,经过试验和工业应用证明,萃取除油可以达到1．0mg/L以下,可满足炼油化工装置锅炉用水对含油量的要求。HOL-100树脂具有在高温状态下(120℃)除油的特点。通过标定考核,萃取除油技术是一项节能、节水、环保措施,可在中石油和中石化企业推广应用。     

专用超大规模集成电路在LED显示系统中的应用

自1976年蒙特利尔奥运会采用了第一块黑白视频显示屏以来，各种大屏幕特别是LED显示屏得到了迅猛发展，在现代信息社会中更是随处可见。在这些显示系统中，应用了大量的不同种类的集成电路作为驱动芯片。本文叙述了运用于LED显示系统中的超大规模集成电路的强大功能。     

知识驱动的UG中的产品开发

重点论述了UG中的KBE即KF模块的知识驱动产品开发设计过程及其关键技术，介绍了知识驱动自动化过程，实例剖析了UG中的KF在产品开发设计过程中的应用。