Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes

Scanning electron microscopy is still the technique of choice for imaging and for in-line measurement of critical dimensions and overlay accuracy in most of the core technology processes. In particular, critical dimension microscopy provides information about design template matching and edge placement errors through links with design having proven beneficial effects on process yield and product reliability. In this paper, the use of high performance computing is demonstrated to simulate linescans and 2D secondary electron images to be used in optical proximity error correction strategies for nanometer scale technologies.     

Reduced-Complexity Near-Maximum-Likelihood Detection for Decision Feedback Assisted Space-Time Equalization

A novel decision-feedback (DF) aided reduced complexity maximum likelihood (ML) space-time equalizer (STE) designed for a single-carrier system is introduced. Two different methods of incorporating DF into the recursive tree search based receiver structure are proposed for allowing detection at a moderate computational cost. Additionally, a further complexity reduction scheme is proposed, which exploits the specific characteristics of both the wide-band channel and the proposed DF-STE. In comparison to the DF-STE not benefiting from this complexity reduction, the proposed detector is capable of reducing the complexity by several orders of magnitude. More quantitatively, for the specific rank-deficient system considered, which detected the signal transmitted from four transmit antennas with the aid of two receive antennas, the complexity might be reduced by a factor of 100 at low Signal-to-noise ratios (SNRs) without noticeable performance degradation. By contrast, at higher SNRs a complexity reduction of a factor of 10 might be achieved, depending on the tolerable performance degradation.     

UNICORE 6 — Recent and Future Advancements

UNICORE is a European Grid Technology with more than 10 years of history. Originating from the Supercomputing domain, the latest version UNICORE 6 has turned into a general-purpose Grid technology that follows established standards and offers a rich set of features to its users. The paper starts with an architectural insight into UNICORE 6, highlighting the workflow features, standards and the different clients. Next, the current state of advancement is presented by describing recent developments. The paper closes with an outlook on future planned developments.     

A fully automated calibration method for an optical see-through head-mounted operating microscope with variable zoom and focus

Ever since the development of the first applications in image-guided therapy (IGT), the use of head-mounted displays (HMDs) was considered an important extension of existing IGT technologies. Several approaches to utilizing HMDs and modified medical devices for augmented reality (AR) visualization were implemented. These approaches include video-see through systems, semitransparent mirrors, modified endoscopes, and modified operating microscopes. Common to all these devices is the fact that a precise calibration between the display and three-dimensional coordinates in the patient's frame of reference is compulsory. In optical see-through devices based on complex optical systems such as operating microscopes or operating binoculars-as in the case of the system presented in this paper-this procedure can become increasingly difficult since precise camera calibration for every focus and zoom position is required. We present a method for fully automatic calibration of the operating binocular Varioscope M5 AR for the full range of zoom and focus settings available. Our method uses a special calibration pattern, a linear guide driven by a stepping motor, and special calibration software. The overlay error in the calibration plane was found to be 0.14-0.91 mm, which is less than 1% of the field of view. Using the motorized calibration rig as presented in the paper, we were also able to assess the dynamic latency when viewing augmentation graphics on a mobile target; spatial displacement due to latency was found to be in the range of 1.1-2.8 mm maximum, the disparity between the true object and its computed overlay represented latency of 0.1 s. We conclude that the automatic calibration method presented in this paper is sufficient in terms of accuracy and time requirements for standard uses of optical see-through systems in a clinical environment.     

Untersuchung des Passivierungsmechanismus von Eisen in Phosphatelektrolyten an erosiv beanspruchten Oberflächen

Investigation into the passivation mechanism of iron in phosphate electrolytes on surfaces exposed to erosive attack On iron electrodes in neutral phosphate electrolytes by continuous solid particle impingement a reaction layer is formed within the transition potential region under anodic polarization. XPS and AES investigations show that the reaction layer formed under impingement will be replaced by an oxide layer during the transition into the passive state under simultaneous decrease of the layer thickness. The active/passive transition in phosphate electrolytes may be attached to the equilibrium potential of the reaction . According to this thermodynamic interpretation of both the active/passive transition and the passive/active transition, respectively on iron in presence of phosphate ions may be described as the Fe(II)/Fe(III)-redox reaction with two solid phases, the iron(II)-phosphate phase and the iron(III)-oxide phase. The increase of the interfacial dynamic processes at the solid/liquid interface causes in consequence of the solid particle impingement that thermodynamic laws govern the course of reactions.     

Graphene Oxide‐Cyclic R10 Peptide Nuclear Translocation Nanoplatforms for the Surmounting of Multiple‐Drug Resistance

Multidrug resistance resulting from a variety of defensive pathways in cancer has become a global concern with a considerable impact on the mortality associated with the failure of traditional chemotherapy. Therefore, further research and new therapies are required to overcome this challenge. In this work, a cyclic R10 peptide (cR₁₀) is conjugated to polyglycerol‐covered nanographene oxide to engineer a nanoplatform for the surmounting of multidrug resistance. The nuclear translocation of the nanoplatform, facilitated by cR₁₀ peptide, and subsequently, a laser‐triggered release of the loaded doxorubicin result in efficient anticancer activity confirmed by both in vitro and in vivo experiments. The synthesized nanoplatform with a combination of different features, including active nucleus‐targeting, high‐loading capacity, controlled release of cargo, and photothermal property, provides a new strategy for circumventing multidrug resistant cancers.     

Hierarchical B-picture mode decision in H.264/SVC

To enable robust video transmission over heterogeneous networks, the hierarchical B-picture prediction structure is employed in the state-of-the-art video coding standard H.264/SVC, aiming to produce scalable bitstreams with various frame rates. However, the exhaustive mode decision process with the hierarchical B-picture structure increases the computational complexity of H.264/SVC encoding dramatically. In this paper, a fast mode decision algorithm is proposed to speed up H.264/SVC encoding with the hierarchical B-picture structure, which is achieved by utilizing macroblock (MB) features, correlation of temporal–spatial neighboring MBs, and the discrepant characteristics of hierarchical layers. Extensive experimental results demonstrate that the proposed algorithm is able to reduce the encoding time of H.264/SVC significantly for video sequences with a wide range of resolutions, and meanwhile the video quality and compression ratio are well preserved.     

Do ESD fails in systems correlate with IC ESD robustness?

Integrated circuits (ICs) are qualified for their electrostatic discharge (ESD) robustness according to the well-known IC ESD standards Human Body Model, Machine Model, and Charged Device Model in order to guarantee safe handling in ESD protected areas. For electronic systems like mobile phones which are in direct use by consumers, certain robustness against system level ESD is demanded, too. As the ESD test methods of device and system level stress are completely different (waveforms, stress application, operating condition of the DUT, etc.), correlations between models of both worlds are difficult to establish. Therefore, the system vendors more and more demand a specified ESD robustness for devices (ICs) according to an ESD system level standard. Testing ICs to a system level ESD standard requires careful considerations; first ideas are summarized in the new Standard Practice “Human Metal Model” of the ESDA/ANSI. However, the approach of deriving system ESD robustness from IC robustness is currently too much simplified and bears severe potential risks. Nevertheless, there are methodologies and approaches to use IC ESD characterization for defining ESD protection concepts for systems. Appropriate high-current characterization of ICs can be the cornerstone for a successfully optimized system ESD protection.