Modeling of a slit-scan-type aerial image measurement sensor used for optical lithography

Theoretical modeling of a slit-scan-type aerial image measurement sensor used for optical lithography is presented. Slit transmission properties are fully represented by the slit transfer function in terms of incident and scattering angles of light, which is then incorporated into the scheme of a partially coherent imaging formula to obtain an expression for image profiles measured by slit scanning. As an exemplary case, we analyze the influence of a 100 nm width slit used in an ArF lithography system. To understand the mechanism of image profile changes by slit transmission, we focus on frequency transfer characteristics of sinusoidal patterns.     

Sintering of fibrous barium titanate powder compacts with preferred orientation

The sintering of fibrous BaTiO₃ powder particles was investigated. Special emphasis was given to the role of particle orientation in the compact on densification and microstructure development. Compacts were made by dry-pressing. During the initial stage of sintering, the fibrous particles rearranged and bundles of particles were formed. The volume of pores between bundles of particles decreased on further heating. Grain growth started when the sintered density reached ca. 56% of the theoretical density. Higher temperatures of sintering increased the degree of the crystal axis orientation. Thus, highly orientated sintered bodies with high densities were prepared by heating at 1500 °C.     

Boiling heat transfer from a horizontal flat plate in a pool of liquid hydrogen

Heat transfer from a flat plate facing upward immersed in a liquid hydrogen pool was measured for the pressures from atmospheric to 1.1 MPa. The flat plate heater used was 10 mm in width, 100 mm in length and 0.1 mm in thickness. Critical heat fluxes (CHFs) in saturated boiling increased with the increase in pressure up to around 0.3 MPa and then decreased with further pressure increase. The CHFs under subcooled condition at each pressure increased with the increase in sub-cooling. Discussions were made on the experimental results by comparing with those of the other cryogenic liquids and also the Kutateladze’s equations under saturated and subcooled conditions. The experimental CHFs were much smaller than the Kutateladze’s equation for higher pressure up to critical. The heater surface temperature was found to reach the critical temperature before the occurrence of hydrodynamic instability and jump to the film boiling regime at the lower heat flux in the higher pressure range. It was suggested that the CHFs are determined not by the heat flux but by the temperature in the higher pressure range.     

Dosimeter properties of CaO transparent ceramic prepared by the SPS method

We have studied photoluminescence (PL), scintillation and thermally-stimulated luminescence (TSL) dosimeter properties of CaO transparent ceramic, in comparison with those of MgO transparent ceramic as a reference. Both samples were made by a Spark Plasma Sintering method. In the PL spectra, both samples showed emission peaks due to F and F⁺ centers. Moreover, in addition to these peaks, a scintillation emission peak was detected at 330 nm for both CaO and MgO, which was caused by surface defects. The TSL glow curves showed a main peak around 55 °C for CaO and 140 °C for MgO. The TSL response was confirmed to monotonically increase with irradiation dose over the dose range from 0.1 to 1000 mGy.     

A reduction method of dynamic false contour utilizing the frame‐rate‐control method with suppression of the side effect on PDPs

Abstract— The plasma‐display panel (PDP) is a type of flat‐panel display that can display a high‐quality image. However, when moving images are displayed, annoying disturbances such as false contour noise occurs. This noise is called dynamic false contour (DFC). To achieve a higher‐quality image, DFC has to be reduced. Therefore, a new method to reduce DFC is proposed. To find a way to reduce DFC, a new evaluation value for it has been defined: the evaluation value of dynamic false contour (EVDFC). This value is defined on the basis of a person's subjective evaluation. By applying this value, the cause that generates DFC can be identified. On the basis of these studies, a new method for reducing DFC by applying frame‐rate control (FRC) with suppression of the side effect is proposed. This improved method can be used to provide high‐quality images.     

The dependence of structure and conductivity in three-dimensional phosphate ionic conductors on composition

Two series of solid solutions, Na _x Ca_(1−x)/2Zr₂(PO₄)₃ (NCZP(x), 0⩽x⩽1) and Na _x Nb_1-x Zr_1+x (PO₄)₃(NNZP(x), 0⩽x⩽1), were synthesized. They were examined by powder X-ray diffraction, infra-red (i.r.) absorption and Raman scattering. Ionic conductivities of graphite coated samples were measured. A complete series of solid solutions was formed for NCZP(x), while a second phase was found forx<0.1 for NNZP(x). The i.r. and Raman spectra of their solid solutions consistently showed the formation of PO₄ tetrahedra with different geometries. The composition dependence of conductivity is interpreted on the basis of a structural change around Na⁺.     

An approach to the formal analysis of license interoperability

With recent advances in information and telecommunications technologies, a large range of digital content is distributed over the Internet. Whereas diverse licenses are provided to protect the content legally and have the advantage of offering authors many choices, the obstruction of smooth content distribution may occur if the relationships between licenses are not revealed because of differences between the restrictions imposed by each license. To activate digital content distribution, license interoperability must be revealed. In this paper, we propose a framework for formally examining license interoperability by using many-sorted first-order logic. We formalize five actual licenses and examine their interoperability to prove the effectiveness of our proposed framework. The results show that the framework reveals the relationships between licenses.     

Three-dimensional measurement of ice crystals in frozen beef with a micro-slicer image processing system

A novel technique has been developed for measuring the three-dimensional (3-D) structure and distribution of ice crystals formed in frozen beef by using a micro-slicer image processing system (MSIPS). The system has functions to reconstruct the 3-D image based on the image data of exposed cross-sections obtained by multi-slicing of a frozen sample with the minimum thickness of 1 μm and to display the internal structure as well as an arbitrary cross-section of the sample choosing observation angles. The size and distribution of ice crystals can be determined from the 2-D quantitative information, such as the periphery and area of the crystals. The effects of freezing conditions on the morphology and distribution of the ice crystals were demonstrated quantitatively from the observations of raw beef stained by fluorescent indicator. For the samples frozen at −15 °C, the network structure of ice crystals were observed mainly at intercellular space, having approximately 100 μm in cross-sectional size, while that prepared at −120 °C showed the spherical crystals of 10–20 μm in diameter within the cells. The 3-D image of the sample demonstrated that the growth of ice columns was restricted by the intrinsic structure of muscle fibers. The proposed method provided a new tool to investigate the effects of freezing conditions on the size, morphology and distribution of ice crystals.