High-performance MIM capacitor using ALD high-k HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectrics

For the first time, we successfully fabricated and demonstrated high performance metal-insulator-metal (MIM) capacitors with HfO/sub 2/-Al/sub 2/O/sub 3/ laminate dielectric using atomic layer deposition (ALD) technique. Our data indicates that the laminate MIM capacitor can provide high capacitance density of 12.8 fF//spl mu/m/sup 2/ from 10 kHz up to 20 GHz, very low leakage current of 3.2 /spl times/ 10/sup -8/ A/cm/sup 2/ at 3.3 V, small linear voltage coefficient of capacitance of 240 ppm/V together with quadratic one of 1830 ppm/V/sup 2/, temperature coefficient of capacitance of 182 ppm//spl deg/C, and high breakdown field of /spl sim/6 MV/cm as well as promising reliability. As a result, the HfO/sub 2/-Al/sub 2/O/sub 3/ laminate is a very promising candidate for next generation MIM capacitor for radio frequency and mixed signal integrated circuit applications.     

Effects of surface roughness of substrates on the c-axis preferred orientation of ZnO films deposited by r.f. magnetron sputtering

The c-axis preferred orientation of ZnO film is the most important factor for its successful application in piezoelectric devices. The effects of surface roughness of the substrate on the c-axis preferred orientation of ZnO thin films, deposited by radio frequency magnetron sputtering, were investigated. During sputtering, the oxygen content in the argon environment used was varied from 0 to 70% at a total sputtering pressure of 10 mTorr. Very smooth Si, smooth evaporated Au/Si, smooth evaporated-Al/Si, and rough sputtered-Al/Si were used as substrates. Their r.m.s. roughnesses, as measured by atomic force microscopy, were 1.27, 17.1, 21.1 and 65-118 Å, respectively. The crystalline structure and the angular spread of the (0 0* 2) plane normal to the ZnO films were determined using X-ray diffraction and X-ray rocking curves, respectively. The crystallinity and the preferred c-axis orientation of the ZnO films were strongly dependent on the surface roughness of the substrates rather than on the oxygen content of the working environment or on the chemical nature of the substrate.     

以3D软件应用为中心的设计管理模式——PDS在配管设计中的应用

由PDS的特点入手,结合工程实践的应用情况,阐明了3D软件可以更广泛的应用于配管的设计中,强调了以3D模型为中心开展设计和管理的新模式.     

SCB火工品的研究与发展

文章评述了半导体桥火工品问世以来的研究成果与发展趋势。主要内容有半导体桥作用机理、半导体桥的结构与封装、半导体桥火工品的特点、半导体桥火工品的应用、半导体桥火工品的研究和发展趋势。     

Development of geometrically exact new shell elements based on general curvilinear co‐ordinates

In the present study first‐order shear deformable shell finite elements based on general curvilinear co‐ordinates are proposed. For the development of the present shell elements, a partial mixed variational functional with independently assumed strains is provided in order to avoid the severe locking troubles known as transverse shear and membrane lockings. Bubble functions are included in the shape function of displacement to improve the performance of the developed element. The proposed assumed strain four‐ and nine‐node elements based on the general tensor shell theory provide an efficient linkage framework for shell surface modelling and finite element analysis. In the several benchmark problems, the present shell elements with exact geometric representations demonstrate their performance compared to previously reported results. Copyright © 2002 John Wiley & Sons, Ltd.     

Development of a recurrent Sigma-Pi neural network rainfall forecasting system in Hong Kong

At the moment, weather forecasting is still an art — the experience and intuition of forecasters play a significant role in determining the quality of forecasting. This paper describes the development of a new approach to rainfall forecasting using neural networks. It deals with the extraction of information from radar images and an evaluation of past rain gauge records to provide shortterm rainfall forecasting. All of the meteorological data were provided by the Royal Observatory of Hong Kong (ROHK). Preprocessing procedures were essential for this neural network rainfall forecasting. The forecast of the rainfall was performed every half an hour so that a storm warning signal can be delivered to the public in advance. The network architecture is based on a recurrent Sigma-Pi network. The results are very promising, and this neural-based rainfall forecasting system is capable of providing a rain storm warning signal to the Hong Kong public one hour ahead.     

A study of CaCO3 fouling with a microscopic imaging technique

The present study introduces a new experimental method to visualize the fouling process of CaCO₃. A mini-channel heat exchanger system with a microscopic imaging technique was developed for real-time visualization of the fouling process. The present study discussed how scale started initially, how scale formed thick layers, and how a small crystal grew into a large one, touching the adjacent one. Detail microscopic images of scale crystals and corresponding fouling resistances were obtained over the entire fouling process. The microscopic observation indicated that the fouling process could be divided into three stages: an induction period, a period of uniform generation of nuclei, and a period of uniform growth of scale. Sudden appearance of numerous small nuclei indicated the end of the induction period, a key event before the rapid increase in the fouling resistance. The present experimental method using microscopic images of the wet fouling process provides a valuable insight on the fouling mechanism.     

纳米α-FeOOH颗粒的形态和结构

以硫酸法钛白的副产物绿矾为原料，采用滴加法制备纳米铁黄（α－FeOOH）颗粒。研究了反应体系的pH值、反应温度、通氧速率、搅拌速率和添加剂等对铁黄颗粒形态结构的影响，采用XRD、TEM等分析手段对颗粒进行表征。结果表明，调节体系pH值能控制铁黄晶型结构和色相；改变通氧速率、搅拌速率、添加剂种类以及反应温度等可以调节纳米α－FeOOH的大小和分散性。     

环保型隧道防火涂料的研究

介绍了国内外公路隧道、铁路隧道及地铁火灾情况 ,研制出一种可在潮湿环境中使用、火灾发生时无有害气体产生的环保型隧道防火涂料。涂层厚度 18～2 0 mm,耐火极限达 3小时。为防止涂料加水拌和后沉淀分层 ,增加涂料的和易性 ,研制出一种分散剂。