A nickel micromirror array was designed and successfully fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating. It was composed of two address electrodes, two support posts and a nickel mirror plate. The mirror plate, which is supported by two nickel posts, is overhung about 10 μm from the silicon substrate. The nickel mirror plate is actuated by an electrostatic force generated by electrostatic potential difference applied between the mirror plate and the address electrode. Optimized fabrication processes have been developed to reduce residual stress in mirror plate and prevent contact between the mirror plate and the substrate, which ensure a reasonable flat and smooth micromirror for operation at low actuation voltage.
A gas-jet micro pump with novel cross-junction channel has been designed and fabricated using a Si micromachining process.
The valveless micro pump is composed of a piezoelectric lead zirconate titanate (PZT) diaphragm actuator and fluidic network.
The design of the valveless pump focuses on a cross-junction formed by the neck of the pump chamber and one outlet and two
opposite inlet channels. The structure of cross-junction allows differences in fluidic resistance and fluidic momentum inside
the channels during each PZT diaphragm vibration cycle, which leads to the gas flow being rectified without valves. The flow
channels were easily fabricated by using silicon etching process. To investigate the effects of the structure of the cross-junction
on the gas flow rate, two types of pump with different cross-junction were studied. The design and simulation were done using
ANSYS-Fluent software. The simulations and experimental data revealed that the step-nozzle structure is much more advantageous
than the planar structure. A flow rate of 5.2 ml/min was obtained for the pump with step structure when the pump was driven
at its resonant frequency of 7.9 kHz by a sinusoidal voltage of 50 Vp–p. 相似文献
This paper presents a general method to formulate monotonically convergent algorithms for identifying optimal control fields to manipulate quantum dynamics phenomena beyond the linear dipole interaction. The method, facilitated by a field-dependent dipole moment operator, is based on an integral equation of the first kind arising from the Heisenberg equation of motion for tracking a time-dependent, dynamical invariant observable associated with a reference control field. 相似文献
The pole-sensitivity approach is employed to investigate the stability issue of the discrete-time control system, where a digital controller implemented with finite word length (FWL), is used. A stability related measure is derived, which is more accurate in estimating the closed-loop stability robustness of an FWL implemented controller than some existing measures for the pole-sensitivity analysis. This improved stability measure thus provides a better criterion to find the optimal realizations for a generic controller structure that includes output-feedback and observer-based controllers. A numerical example is used to verify the theoretical analysis and to illustrate the design procedure 相似文献
For the problem of classifying an element (e.g., an unknown pattern) into one of two given categories where the associated observables are distributed according to one of two known multivariate normal populations having a common covariance matrix, it is shown that the minimum Bayes risk is a strict monotonic function of certain separability or statistical distance measures regardless of the a priori probabilities and the assigned loss function. However, for the associated conditional expected losses, strict monotonicity holds, if and only if a certain condition dependent on these probabilities and the given loss function is satisfied. These results remain valid for classification problems in which the observable can be transformed by a one-to-one differentiable mapping to normality. 相似文献
This paper develops a new quantitative model to find the optimal number of new employees with a Newsvendor model in a pull
production system. This model allows learning, forgetting and variable wage. This paper also provides numerical results on
sensitivity analysis, and compares the numerical results in three different situations: the situation with both learning and
forgetting effect, that with learning effect but without forgetting effect and the situation with neither learning nor forgetting
effect. The conclusions drawn from the comparison may offer theoretical insight for human resource managers to make appropriate
employment decisions. 相似文献
High-pressure study has been made both resistively and magnetically on Eu1.2Mo6(S1–xSex)8. Superconductivity was detected at a lower pressure in samples forx0 than forx=0 in spite of the larger unit cell volume of the former. The superconductivity observed remains non-bulk up to 20 kbar. The maximum onset temperature of the superconductivity transition decreases withx.On leave from the Physics Institute, Chinese Academy of Sciences, Peking, China. 相似文献