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介绍如何实现光学和电子束曝光系统之间的匹配和混合光刻的技术,包括:(1)光学曝光系统与电子束曝光系统的匹配技术;(2)投影光刻和JBX-5000LS混合曝光技术;(3)接触式光刻机和JBX-5000LS混合曝光技术;(4)大小束流混合曝光技术或大小光阑混合曝光技术;(5)电子束与光学曝光系统混合光刻对准标记制作技术. 该技术已成功地应用于纳米器件和集成电路的研制工作,实现了20nm线条曝光,研制成功了27nm CMOS器件;进行了50nm单电子器件的演试;并广泛地用于100nm化合物器件和其他微/纳米结构的制造. 相似文献
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对基于Top-Down加工技术的纳米电子器件如:单电子器件、共振器件、分子电子器件等的研究现状、面临的主要挑战等进行了讨论. 采用CMOS兼容的工艺成功地研制出单电子器件,观察到明显的库仑阻塞效应;在半绝缘GaAs衬底上制作了AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs双势垒共振隧穿二极管,采用环型集电极和薄势垒结构研制的共振隧穿器件,在室温下测得其峰谷电流比高达13.98,峰电流密度大于89kA/cm2;概述了交叉阵列的分子存储器的研究进展. 相似文献
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Jinman Kim Weidong Cai Dagan Feng Hao Wu 《IEEE transactions on information technology in biomedicine》2006,10(3):598-607
The advances in digital medical imaging and storage in integrated databases are resulting in growing demands for efficient image retrieval and management. Content-based image retrieval (CBIR) refers to the retrieval of images from a database, using the visual features derived from the information in the image, and has become an attractive approach to managing large medical image archives. In conventional CBIR systems for medical images, images are often segmented into regions which are used to derive two-dimensional visual features for region-based queries. Although such approach has the advantage of including only relevant regions in the formulation of a query, medical images that are inherently multidimensional can potentially benefit from the multidimensional feature extraction which could open up new opportunities in visual feature extraction and retrieval. In this study, we present a volume of interest (VOI) based content-based retrieval of four-dimensional (three spatial and one temporal) dynamic PET images. By segmenting the images into VOIs consisting of functionally similar voxels (e.g., a tumor structure), multidimensional visual and functional features were extracted and used as region-based query features. A prototype VOI-based functional image retrieval system (VOI-FIRS) has been designed to demonstrate the proposed multidimensional feature extraction and retrieval. Experimental results show that the proposed system allows for the retrieval of related images that constitute similar visual and functional VOI features, and can find potential applications in medical data management, such as to aid in education, diagnosis, and statistical analysis. 相似文献
998.
Craniofacial landmark localization and anatomical structure tracing on cephalograms are two important ways to obtain the cephalometric analysis. In order to computerize them in parallel, a model-based approach is proposed to locate 262 craniofacial feature points, including 90 landmarks and 172 auxiliary points. In model training, 12 landmarks are selected as reference points and used to divide every training shape to 10 regions according to the anatomical knowledge; principle components analysis is employed to characterize the region shape variations and the statistical grey profile of every feature point. Locating feature points on an input image is a two-stage procedure. First, we identify the reference landmarks by image processing and pattern matching techniques, so that the shape partition is performed on the input image. Then, for each region, its feature points are located by a modified active shape model. All craniofacial anatomical structures can be traced out by connecting the located points with subdivision curves according to the prior knowledge. Users are permitted to modify the results interactively in many different ways. Experimental results show the advantage and reliability of the proposed method. 相似文献
999.
Layered Wyner-Ziv video coding. 总被引:2,自引:0,他引:2
Following recent theoretical works on successive Wyner-Ziv coding (WZC), we propose a practical layered Wyner-Ziv video coder using the DCT, nested scalar quantization, and irregular LDPC code based Slepian-Wolf coding (or lossless source coding with side information at the decoder). Our main novelty is to use the base layer of a standard scalable video coder (e.g., MPEG-4/H.26L FGS or H.263+) as the decoder side information and perform layered WZC for quality enhancement. Similar to FGS coding, there is no performance difference between layered and monolithic WZC when the enhancement bitstream is generated in our proposed coder. Using an H.26L coded version as the base layer, experiments indicate that WZC gives slightly worse performance than FGS coding when the channel (for both the base and enhancement layers) is noiseless. However, when the channel is noisy, extensive simulations of video transmission over wireless networks conforming to the CDMA2000 1X standard show that H.26L base layer coding plus Wyner-Ziv enhancement layer coding are more robust against channel errors than H.26L FGS coding. These results demonstrate that layered Wyner-Ziv video coding is a promising new technique for video streaming over wireless networks. 相似文献
1000.
CMOS有源像素传感器特性分析与优化设计 总被引:1,自引:3,他引:1
设计了一个三管有源像素和其用开关电容放大器实现的双采样读出电路.该电路被嵌入一64×64像素阵列CMOS图像传感器,在Chartered公司0.35μm工艺线上成功流片.在8μm×8μm像素尺寸下实现了57%的填充因子.测得可见光响应灵敏度为0.8V/(lux·s),动态范围为50dB.理论分析和实验结果表明随着工艺尺寸缩小,像素尺寸减小会使光响应灵敏度降低.在深亚微米工艺条件下,较深的n阱/p衬底结光电二极管可以提供合理的填充因子和光响应灵敏度. 相似文献