The influence of the free gas volume around the substrate on the chemical vapor deposition of Al2O3 layers in the AlCl3/H2/CO2 system at different pressures and temperatures has been studied. Through the water gas reaction which occurs homogeneously in the gas phase, the Al2O3 growth rate increases with increasing free gas volume until a certain volume is reached, after which it remains constant. For this ‘critical free gas volume’ a theoretical characteristic dimension Lmax is introduced. It is defined as the normal distance from a substrate surface, at which the water molecules formed from the CO2 + H2 in the gas phase can no longer reach the substrate surface in the time available. The dependencies of Lmax on pressure, temperature and gas flow rate deduced through this theoretical consideration show agreement with the experimental results.
Zusammenfassung
Der Einfluß des die Substrate umgebenden Totvolumens auf die Al2O3-CVD-Abscheidung im System AlCl3/H2/CO2 wurde systematisch bei verschiedenen Drücken und Temperaturen untersucht. Durch die homogen in der Gasphase ablaufende Wassergasreaktion nimmt in allen Fällen die Abscheidungs-geschwindigkeit mit vergrößerten Totvolumen zuerst zu, bleibt aber ab einer bestimmten Totvolumensgröße konstant. Für diese “kritische Totvolumensgröße” wird die theoretische Kenngröße Lmax eingeführt. Diese Größe ist als Normalabstand zur Substratoberfläche definiert, bei dem das in der Gasphase aus CO2 + H2 gebildeten Wasser in der zur Verfügung stehenden Zeit die mit AlCl3 belegte Oberfläche der Substrate nicht mehr erreichen kann. Die aus dieser theoretischen Überlegung abgeleiteten Voraussagen über die Abhängigkeit des Lmax von Druck, Temperatur und Gasströmungsgeschwindigkeit zeigten Übereinstimmung mit den Versuchsergebnissen. 相似文献
A Fe-Ni soft magnetic film was prepared in sulphate solution by electroplating. The influences of the molar ratio of n [Fe2+ ]/ n [Ni2+ ], current density, bath temperature, pH and L-ascorbic acid concentration on magnetic properties of Fe-Ni alloy film were investigated. The results show that the saturated flux density(BS) of the film increases initially and decreases after it reaches the specific value with the increase of n [Fe2+ ]/ n [Ni2+ ] molar ratio, current density, bath temperature and pH. However, the relationship between L-ascorbic acid concentration and B S keeps linear. It is observed that the coercive force( Hc) is enhanced with the increase of n [Fe2+ ]/ n [Ni2+ ] molar ratio, current density and pH. By comparison, when the bath temperature increases, Hc always decreases. With the increase of L-ascorbic acid concentration, the coercive force increases initially and then decreases. 相似文献
Accurate measurement for the drill geometry is essential to drill design and reconditioning. In recent years, a number of non-contact drill measuring instruments, using CCD camera are reported in the literature. But these systems are not suitable in measuring three-dimensional surface, especially the concave ones. As an effectual remedy, a geometry measurement instrument using laser sensor is developed. This paper describes its configuration and calibration. In addition, the measurement method for a drill flute is detailed. Validity of the system and proposed method are demonstrated by an example. The deviations of the data measured from that inspected by using a microscope are no more than 0.0061 mm. 相似文献
Pythagorean fuzzy sets (PFSs), originally proposed by Yager (Yager, Abbasov. Int J Intell Syst 2013;28:436–452), are a new tool to deal with vagueness considering the membership grades are pairs satisfying the condition . As a generalized set, PFSs have close relationship with intuitionistic fuzzy sets (IFSs). PFSs can be reduced to IFSs satisfying the condition . However, the related operations of PFSs do not take different conditions into consideration. To better understand PFSs, we propose two operations: division and subtraction, and discuss their properties in detail. Then, based on Pythagorean fuzzy aggregation operators, their properties such as boundedness, idempotency, and monotonicity are investigated. Later, we develop a Pythagorean fuzzy superiority and inferiority ranking method to solve uncertainty multiple attribute group decision making problem. Finally, an illustrative example for evaluating the Internet stocks performance is given to verify the developed approach and to demonstrate its practicality and effectiveness. 相似文献
The curvelet transform can represent images at both different scales and different directions. Ripplet transform, as a higher dimensional generalization of the curvelet transform, provides a new tight frame with sparse representation for images with discontinuities along C2 curves. However, the ripplet transform is lack of translation invariance, which causes the pseudo-Gibbs phenomenon on the edges of image. In this paper, the cycle spinning method is adopted to suppress the pseudo-Gibbs phenomena in the multifocus image fusion. On the other hand, a modified sum-modified-laplacian rule based on the threshold is proposed to make the decision map to select the ripplet coefficient. Several experiments are executed to compare the presented approach with other methods based on the curvelet, sharp frequency localized contourlet transform and shearlet transform. The experiments demonstrate that the presented fusion algorithm outperforms these image fusion works. 相似文献