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41.
The influence of the free gas volume around the substrate on the chemical vapor deposition of Al2O3 layers in the AlCl3/H2/CO2 system at different pressures and temperatures has been studied. Through the water gas reaction which occurs homogeneously in the gas phase, the Al2O3 growth rate increases with increasing free gas volume until a certain volume is reached, after which it remains constant. For this ‘critical free gas volume’ a theoretical characteristic dimension Lmax is introduced. It is defined as the normal distance from a substrate surface, at which the water molecules formed from the CO2 + H2 in the gas phase can no longer reach the substrate surface in the time available. The dependencies of Lmax on pressure, temperature and gas flow rate deduced through this theoretical consideration show agreement with the experimental results.

Zusammenfassung

Der Einfluß des die Substrate umgebenden Totvolumens auf die Al2O3-CVD-Abscheidung im System AlCl3/H2/CO2 wurde systematisch bei verschiedenen Drücken und Temperaturen untersucht. Durch die homogen in der Gasphase ablaufende Wassergasreaktion nimmt in allen Fällen die Abscheidungs-geschwindigkeit mit vergrößerten Totvolumen zuerst zu, bleibt aber ab einer bestimmten Totvolumensgröße konstant. Für diese “kritische Totvolumensgröße” wird die theoretische Kenngröße Lmax eingeführt. Diese Größe ist als Normalabstand zur Substratoberfläche definiert, bei dem das in der Gasphase aus CO2 + H2 gebildeten Wasser in der zur Verfügung stehenden Zeit die mit AlCl3 belegte Oberfläche der Substrate nicht mehr erreichen kann. Die aus dieser theoretischen Überlegung abgeleiteten Voraussagen über die Abhängigkeit des Lmax von Druck, Temperatur und Gasströmungsgeschwindigkeit zeigten Übereinstimmung mit den Versuchsergebnissen.  相似文献   

42.
A Fe-Ni soft magnetic film was prepared in sulphate solution by electroplating. The influences of the molar ratio of n [Fe2+ ]/ n [Ni2+ ], current density, bath temperature, pH and L-ascorbic acid concentration on magnetic properties of Fe-Ni alloy film were investigated. The results show that the saturated flux density(BS) of the film increases initially and decreases after it reaches the specific value with the increase of n [Fe2+ ]/ n [Ni2+ ] molar ratio, current density, bath temperature and pH. However, the relationship between L-ascorbic acid concentration and B S keeps linear. It is observed that the coercive force( Hc) is enhanced with the increase of n [Fe2+ ]/ n [Ni2+ ] molar ratio, current density and pH. By comparison, when the bath temperature increases, Hc always decreases. With the increase of L-ascorbic acid concentration, the coercive force increases initially and then decreases.  相似文献   
43.
Measurement of drill point geometry by using laser sensor   总被引:1,自引:0,他引:1  
Accurate measurement for the drill geometry is essential to drill design and reconditioning. In recent years, a number of non-contact drill measuring instruments, using CCD camera are reported in the literature. But these systems are not suitable in measuring three-dimensional surface, especially the concave ones. As an effectual remedy, a geometry measurement instrument using laser sensor is developed. This paper describes its configuration and calibration. In addition, the measurement method for a drill flute is detailed. Validity of the system and proposed method are demonstrated by an example. The deviations of the data measured from that inspected by using a microscope are no more than 0.0061 mm.  相似文献   
44.
Pythagorean fuzzy sets (PFSs), originally proposed by Yager (Yager, Abbasov. Int J Intell Syst 2013;28:436–452), are a new tool to deal with vagueness considering the membership grades are pairs satisfying the condition . As a generalized set, PFSs have close relationship with intuitionistic fuzzy sets (IFSs). PFSs can be reduced to IFSs satisfying the condition . However, the related operations of PFSs do not take different conditions into consideration. To better understand PFSs, we propose two operations: division and subtraction, and discuss their properties in detail. Then, based on Pythagorean fuzzy aggregation operators, their properties such as boundedness, idempotency, and monotonicity are investigated. Later, we develop a Pythagorean fuzzy superiority and inferiority ranking method to solve uncertainty multiple attribute group decision making problem. Finally, an illustrative example for evaluating the Internet stocks performance is given to verify the developed approach and to demonstrate its practicality and effectiveness.  相似文献   
45.
核反应堆中需要实时精确地计算堆芯和增殖材料的有效共振积分或群截面来实现反应堆的安全控制。整个计算过程因为涉及大量的积分运算和庞大的核素截面数据,采用常规的计算方法,计算时耗相当大。基于统一计算设备架构(CUDA)平台,利用图形处理器(GPU)的计算能力,对整个计算过程进行并行化分解,多线程同时运算,大幅度提升计算速度,降低时耗。实验结果表明,在GPU上并行计算所得结果与原始数据没有明显差异,且加速效果显著。  相似文献   
46.
The curvelet transform can represent images at both different scales and different directions. Ripplet transform, as a higher dimensional generalization of the curvelet transform, provides a new tight frame with sparse representation for images with discontinuities along C2 curves. However, the ripplet transform is lack of translation invariance, which causes the pseudo-Gibbs phenomenon on the edges of image. In this paper, the cycle spinning method is adopted to suppress the pseudo-Gibbs phenomena in the multifocus image fusion. On the other hand, a modified sum-modified-laplacian rule based on the threshold is proposed to make the decision map to select the ripplet coefficient. Several experiments are executed to compare the presented approach with other methods based on the curvelet, sharp frequency localized contourlet transform and shearlet transform. The experiments demonstrate that the presented fusion algorithm outperforms these image fusion works.  相似文献   
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This paper addresses the design of low‐level controllers for leader–follower formations of nonholonomic vehicles in the presence of bounded measurement delays. The concept of input‐to‐state stability is extended to encompass the effect of bounded delays and restrictions on the input. A method is proposed to integrate a Smith predictor in a backstepping design on the basis of nested saturations and nonlinear small‐gain assignment, which allows for time delays in the feedback loop. Robustness analysis under uncertain bounded time delays is provided, and design tradeoffs resulting from the use of bounded controls are discussed. Illustrative simulations are shown to validate the design and robustness analysis in the context of a simple leader–follower trailing control problem. Copyright © 2012 John Wiley & Sons, Ltd.  相似文献   
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