Analysis of three-dimensional proximity effect in electron-beam lithography

In most of the proximity effect correction schemes, a two-dimensional model of proximity effect is employed by ignoring or averaging the variation of exposure along the depth dimension in the resist. However, as the feature size continues to decrease, the relative variation becomes significant so that it may need to be taken into account in proximity effect correction. In this study, the three-dimensional (3-D) proximity effect is analyzed in detail through computer simulation as a first step toward developing a 3-D proximity effect correction scheme. Effects of the parameters such as beam energy, resist thickness, feature size, developing threshold, etc., on the 3-D spatial distribution of exposure in the resist, in particular, depth-dependent proximity effect, are considered in the analysis. Results from the extensive simulation are presented in this paper.     

Negative selection based immune optimization

An immune optimization algorithm is proposed in this paper based on the immune negative selection. The algorithm NSIOA is motivated by the negative selection mechanism in biological immune recognition. Different from the existing immune optimization methods, NSIOA constantly removes the worst solutions to get the optimal solution. Considering that removal of poor members of a population might lead to the loss of design information that may actually help identify better solutions in the search space, the proposed NSIOA is designed to keep the diversity of antibodies while removing poor members, therefore the algorithm will converge to global optimal solution with high probability. The convergence property and the complexity of the algorithm have also been analyzed. To illustrate the efficiency of the algorithm is used in solving the travel salesman problem. The theoretical analysis and experimental results show that the algorithm is of a strong potential in solving practical problems.     

Minimum weight design of inhomogeneous rotating discs

There are numerous applications for gas turbine discs in the aerospace industry such as in turbojet engines. These discs normally work under high temperatures while subjected to high angular velocities. Minimizing the weight of such items in aerospace applications results in benefits such as low dead weights and lower costs. High speed of rotation causes large centrifugal forces in a disc and simultaneous application of high temperatures reduces disc material strength. Thus, the latter effects tend to increase deformations of the disc under the applied loads. In order to obtain a reliable disc analysis and arrive at the corresponding correct stress distribution, solutions should consider changes in material properties due to the temperature field throughout the disc. To achieve this goal, an inhomogeneous disc model with variable thickness is considered. Using the variable material properties method, stresses are obtained for the disc under rotation and a steady temperature field. In this paper this is done by modelling the rotating disc as a series of rings of different but constant properties. The optimum disc profile is arrived at by sequentially proportioning the thicknesses of each ring to satisfy the stress requirements. This method vis-à-vis a mathematical programming procedure for optimization shows several advantages. Firstly, it is simple iterative proportioning in each design cycle not requiring involved mathematical operations. Secondly, due to its simplicity it alleviates the necessity of certain simplifications that are common in so-called rigorous mathematical procedures. The results obtained, compared to those published in the literature show agreement and superiority. A further advantage of the proposed method is the independence of the end results from the initially assumed point in the iterative design routine, unlike most methods published so far.     

Design of composite data acquisition gateway based on 5G network

The integrated data collection system hasn't changed much over the years. Their growth is dominated by digital filtering, and they get a new avionics bus. Time division multiplexing is still used to communicate with the system's data collector. These schemes make use of commands and data buses. While this method works, it has many drawbacks. These shortcomings are overwhelming the strict system architecture, system bandwidth limits, and expertise to only obtain an avionics bus, otherwise system bandwidth and one-way flow of data and control. This lead for high-end video recorders. To quietly monitor our actions and valuable information provides important warnings. However, it is usually completed by a device with this small processing power, which tracks the device, stores the data of the user's data, and is limited in processing. Therefore, it is important to store and process user data in the cloud to track 5 G network activity. This article proposes a simple 5G network gateway solution for custom user monitoring equipment. Collects charge data on Network 5G and Charging-aware multi-mode based routing protocol (CMRP). The CMRP routing mechanism is not yet stable, but the changes depend on the state of the energy charge sensor. This cannot be complemented by energy-efficient sensors and routing protocols that consume less energy.     

New Paradigm of Data-Driven Smart Customisation through Digital Twin

Big data is one of the most important resources for the promotion of smart customisation. With access to data from multiple sources, manufacturers can provide on-demand and customised products. However, existing research of smart customisation has focused on data generated from the physical world, not virtual models. As physical data is constrained by what has already occurred, it is limited in the identification of new areas to improve customer satisfaction. A new technology called digital twin aims to achieve this integration of physical and virtual entities. Incorporation of digital twin into the paradigm of existing data-driven smart customisation will make the process more responsive, adaptable and predictive. This paper presents a new framework of data-driven smart customisation augmented by digital twin. The new framework aims to facilitate improved collaboration of all stakeholders in the customisation process. A case study of the elevator industry illustrates the efficacy of the proposed framework.     

Intelligent tool wear monitoring based on parallel residual and stacked bidirectional long short-term memory network

Effective tool wear monitoring (TWM) is essential for accurately assessing the degree of tool wear and for timely preventive maintenance. Existing data-driven monitoring methods mainly rely on complex feature engineering, which reduces the monitoring efficiency. This paper proposes a novel TWM model based on a parallel residual and stacked bidirectional long short-term memory (PRes–SBiLSTM) network. First, a parallel residual network (PResNet) is used to extract the multi-scale local features of sensor signals adaptively. Subsequently, a stacked bidirectional long short-term memory (SBiLSTM) network is used to obtain the time-series features related to the tool wear characteristics. Finally, the predicted tool wear value is outputted through a fully connected network. A smoothing correction method is applied to improve the prediction accuracy. The proposed model is experimentally verified to have a high prediction accuracy without sacrificing its generalization ability. A TWM system framework based on the PRes–SBiLSTM network is proposed, which has a certain reference value for TWM in actual industrial environments.     

智能力敏传感器的研制

针对传统的差压密度计和压力式液位计分别存在可靠性不高、不适用于介质密度经常变化的场合的问题,设计了一种基于Freescale MC9S08AW60微控制器的智能力敏传感器,详细介绍了该传感器主要电路的设计。该智能传感器实现了数据采集、信号处理、数据通信和电流环输出式数模转换功能。实际应用表明,在-20～+80℃的工作温度范围内,密度测量精度可达±5kg/m3,液位测量不受悬浮液回流和液位波动的影响,很好地满足了工业现场的应用。     

悬臂式掘进机截割臂互换性设计

针对现有掘进机多采用单一的横轴式或者纵轴式整机,对不同岩层掘进工作的适应能力差等问题,提出一种面向不同岩层的掘进机截割臂互换性设计方案。对纵、横轴式2种掘进机的结构特点与性能进行了对比分析;针对2种截割臂工作模式的特点,分别设计了相应的截割减速器。Solidworks仿真结果表明,与单一横轴式或者纵轴式掘进机相比,采用互换式截割臂结构可有效提高掘进机对不同岩层截割工作的适应能力,提高掘进效率,节省设备运输及使用成本。     

基于PLC的单轨吊司控道岔系统设计

针对单轨吊道岔人工就地控制方式可能导致单轨吊频繁启停、影响运输的连贯性等问题,设计了一种基于PLC的单轨吊司控道岔系统。该系统以PLC为控制核心,实现了道岔远程司控、道岔状态指示、故障报警等功能,保障了单轨吊运输的安全性、连续性,提高了煤矿辅助运输系统的自动化程度和工作效率。     

Asymptotic and robust stability of T‐S fuzzy genetic regulatory networks with time‐varying delays

In this paper, we propose and investigate a new general model of fuzzy genetic regulatory networks described by the Takagi–Sugeno (T‐S) fuzzy model with time‐varying delays. By using a Lyapunov functional approach and linear matrix inequality (LMI) techniques, the stability criteria for the delayed fuzzy genetic regulatory networks are expressed as a set of LMIs, which can be solved numerically by LMI toolbox in Matlab. Two fuzzy genetic network example are given to verify the effectiveness and applicability of the proposed approach. Copyright © 2011 John Wiley & Sons, Ltd.