氮氧化硅薄膜红外吸收特性的研究

利用等离子体增强化学气相沉积法沉积氮氧化硅(SiOxNy)薄膜,通过X射线光电子能谱仪、傅里叶变换红外光谱仪、椭偏仪等表征技术,研究不同N2O与NH3流量比R条件下薄膜的组分、光学常数及红外吸收特性.研究结果表明:随着流量比R的增加,SiOxNy薄膜中O的相对百分含量提高,N含量降低,而Si含量基本不变;薄膜由于Si-...     

K-M模型下的兔血管对Ar~+激光的散射与吸收特性

本文测量了兔动脉和静脉对 Ar+ 激光的反射和透射传输特性。实验采用两积分球系统及波长为476 .5 nm的 Ar+激光器 ,并根据测量数据采用 Kubelka- Munk模型分析了兔动脉和静脉组织对该波长激光的吸收系数、散射系数及总光强 I(x)及前向散射通量 i(x)和后向散射通量 j(x)随厚度的变化情况。结果表明 ,兔动脉和静脉的漫反射率和透射率有明显差别 ;动脉对激光的吸收系数明显较静脉的要小 ;而动脉对激光的散射系数却明显较静脉的要大 ;在动脉和静脉组织中 I(x)及 i(x)和 j(x)随厚度的变化也有明显的区别     

Inductively coupled plasma etching for large format HgCdTe focal plane array fabrication

Inductively coupled plasma (ICP) using hydrogen-based gas chemistry has been developed to meet requirements for deep HgCdTe mesa etching and shallow CdTe passivation etching in large format HgCdTe infrared focal plane array (FPA) fabrication. Large format 2048×2048, 20-μm unit-cell short wavelength infrared (SWIR) and 2560×512, 25-μm unit-cell midwavelength infrared (MWIR) double-layer heterojunction (DLHJ) p-on-n HgCdTe FPAs fabricated using ICP processing exhibit >99% pixel operability. The HgCdTe FPAs are grown by molecular beam epitaxy (MBE) on Si substrates with suitable buffer layers. Midwavelength infrared detectors fabricated from 4-in. MBE-grown HgCdTe/Si substrates using ICP for mesa delineation and CdTe passivation etching demonstrate measured spectral characteristics, RoA product, and quantum efficiency comparable to detectors fabricated using wet chemical processes. Mechanical samples prepared to examine physical characteristics of ICP reveal plasma with high energy and low ion angle distribution, which is necessary for fine definition, high-aspect ratio mesa etching with accurate replication of photolithographic mask dimensions.     

Smooth and Vertical Facet Formation for AlGaN-Based Deep-UV Laser Diodes

Using a two-step method of plasma and wet chemical etching, we demonstrate smooth, vertical facets for use in Al _x Ga_1−x N-based deep-ultraviolet laser-diode heterostructures where x = 0 to 0.5. Optimization of plasma-etching conditions included increasing both temperature and radiofrequency (RF) power to achieve a facet angle of 5 deg from vertical. Subsequent etching in AZ400K developer was investigated to reduce the facet surface roughness and improve facet verticality. The resulting combined processes produced improved facet sidewalls with an average angle of 0.7 deg from vertical and less than 2-nm root-mean-square (RMS) roughness, yielding an estimated reflectivity greater than 95% of that of a perfectly smooth and vertical facet.     

Biocompatibility and Mechanical Stability of Nanopatterned Titanium Films on Stainless Steel Vascular Stents

Nanoporous ceramic coatings such as titania are promoted to produce drug-free cardiovascular stents with a low risk of in-stent restenosis (ISR) because of their selectivity towards vascular cell proliferation. The brittle coatings applied on stents are prone to cracking because they are subjected to plastic deformation during implantation. This study aims to overcome this problem by using a unique process without refraining from biocompatibility. Accordingly, a titanium film with 1 µm thickness was deposited on 316 LVM stainless-steel sheets using magnetron sputtering. Then, the samples were anodized to produce nanoporous oxide. The nanoporous oxide was removed by ultrasonication, leaving an approximately 500 nm metallic titanium layer with a nanopatterned surface. XPS studies revealed the presence of a 5 nm-thick TiO₂ surface layer with a trace amount of fluorinated titanium on nanopatterned surfaces. Oxygen plasma treatment of the nanopatterned surface produced an additional 5 nm-thick fluoride-free oxide layer. The samples did not exhibit any cracking or spallation during plastic deformation. Cell viability studies showed that nanopatterned surfaces stimulate endothelial cell proliferation while reducing the proliferation of smooth muscle cells. Plasma treatment further accelerated the proliferation of endothelial cells. Activation of blood platelets did not occur on oxygen plasma-treated, fluoride-free nanopatterned surfaces. The presented surface treatment method can also be applied to other stent materials such as CoCr, nitinol, and orthopedic implants.     

Balancing the corrosion resistance and through-plane electrical conductivity of Cr coating via oxygen plasma treatment

Developing an electrically conductive and corrosion-resistant coating is essential for metal bipolar plates of polymer electrolyte membrane fuel cells(PEMFCs). Although enhanced corrosion resistance was seen for Cr coated stainless steel(Cr/SS) bipolar plates, they experience a quick decrease of through-plane electrical conductivity due to the formation of a porous and low-conductive corrosion product layer at the plate surface, thus leading to an increase in interfacial contact resistance(ICR). To tackle this issue, the multilayer Cr coatings were deposited using the magnetron sputtering with a remote inductively coupled oxygen plasma(O-ICP) in the present study. After the O-ICP treatment, a Cr oxide layer(Cr O*) is formed on the specimen surface. The Cr O*/Cr/SS has a remarkably lower stable corrosion rate(iss) than that of the native Cr oxides(Cr On/Cr/SS). Compared with Cr On/Cr/SS, the excellent performance of Cr O*/Cr/SS is attributed to a denser and thicker surface layer of Cr O* with Cr being oxidized to its highest valence state,Cr(VI). More importantly, the through-plane electrical conductivity of the specimens treated by the optimized O-ICP decreases much slowly than Cr On/Cr/SS and thus, the increament of ICR of Cr O*/Cr/SS after the potentiostatic polarization test is considerably smaller than that of Cr On/Cr/SS, which is benefited from the reduced issthat mitigates the deposition of corrosion products and hinders further oxidation of Cr coating. Therefore, Cr O*/Cr/SS proves to be a well balanced trade-off between corrosion resistance and through-plane electrical conductivity. The results of this study demonstrate that O-ICP treatment on a conductive metal coating is an effective strategy to improve the corrosion resistance and suppress the increase of ICR over the long-term polarization. The technique reported herein exhibits its promising potential application in preparing corrosion resistant and electrically conductive coatings on metal bipolar plates to be used in PEMFCs.     

真空测试计量技术及其航天应用

真空测试计量技术是确保载人航天、探月工程、北斗导航等重大航天工程顺利实施的重要基础。围绕计量发展和航天发展建设对真空测试计量提出的新任务、新要求,真空测试计量发展在深度、广度及维度上表现出强劲的态势。近年来,围绕国家重大战略需求,瞄准真空测试计量技术核心科学问题,开展了面向航天应用的真空测试计量原始创新研究,实现了由真空中性气体测试计量向空间电推进真空等离子体测试、卫星充放电真空模拟测试、真空环境下空间计量等交叉领域的拓展,并在月球样品采样、飞船交会对接、空间守时原子钟研制、卫星平台升级换代、卫星安全防护等应用中发挥了至关重要的作用。     

螺旋波等离子体研究进展

螺旋波等离子体为目前能产生最高等离子体密度的低温等离子体源之一,在低温等离子体应用领域中备受关注。螺旋波等离子体源具有电离效率高、电子密度高、约束磁场低、结构相对简单、可在极低气压下放电等优点,使其在集成电路工艺、薄膜沉积、刻蚀、表面改性和等离子体宇航推进等领域有着广泛的应用前景。本文综述了近年来螺旋波等离子体的主要研究进展,包括螺旋波等离子体的基本原理、耦合机制、低场峰现象、双电层结构等放电特性以及推进机制的研究进展,在此基础上展望了螺旋波等离子体未来的发展方向。     

放电等离子反应液相烧结制备CeB6阴极与性能研究

以氢直流电弧法制备CeH_x纳米粉末, 再采用放电等离子（SPS）反应液相烧结纳米CeH_x和微米B的混合粉末, 制备了高性能CeB₆多晶块体热阴极材料. 研究了SPS制备CeB₆的烧结反应式及反应液相烧结机制, 确定SPS烧结CeB₆的最佳工艺为： 压力50MPa, 烧结温度1500℃, 保温时间5min. 实验结果表明, SPS制备得到了高纯单相CeB6多晶块体, 纯度达到99.89％, 相对密度达到99.61％, 维氏硬度达到2051kg/mm², 抗弯强度达到254.2MPa. 样品在1600℃温度下拐点发射电流密度达到20.38A/cm², 功函数为2.42eV. 与传统制备法相比, SPS制备显著降低了CeB₆的烧结温度, 缩短了烧结时间, 提高了力学和发射性能.     

氮,氮,氮′,氮′-四辛基-3-氧戊二酰胺色谱柱分离-电感耦合等离子体质谱法测定混合稀土氧化物中重稀土

电感耦合等离子体质谱法(ICP-MS)测定稀土元素时,轻稀土元素Ce、Nd、Sm的氧化物等复合离子严重干扰重稀土元素Tb、Dy、Ho、Er的测定,因此对混合稀土中重稀土元素进行测定前一般需要先对其分离富集。实验在样品溶解后,将N,N,N′,N′-四辛基-3-氧戊二酰胺(TODGA)用硅藻土吸附后装柱,以0.1 mol/L HNO₃为样品溶液介质上柱,通过控制洗脱液的种类、酸度以及洗脱液流速,实现了轻稀土元素La、Ce、Pr、Nd与重稀土元素Tb、Dy、Ho、Er、Tm、Yb、Lu的分离和富集,建立了ICP-MS测定混合稀土氧化物中重稀土元素的方法。实验表明:控制洗脱流速为2.0 mL/min,用pH 2.0的HNO₃淋洗至淋洗体积约为500 mL,继续收集洗脱液,并用ICP-MS检测其中Nd₂O₃含量,直至洗脱液中Nd₂O₃的质量浓度小于200 ng/mL,可将轻稀土元素La、Ce、Pr、Nd及少量Y、Sm、Gd洗脱;再改用350 mL 1 mol/L HCl洗脱重稀土元素,可实现重稀土元素与La、Ce、Pr、Nd及部分Y、Sm、Gd的分离;通过选择¹⁵⁹Tb、¹⁶³Dy、¹⁶⁵Ho、¹⁶⁷Er、¹⁶⁹Tm、¹⁷²Yb、¹⁷⁵Lu为测定同位素可消除质谱干扰。将实验方法应用于混合稀土氧化物中重稀土元素的测定,加标回收率在93%～110%之间,相对标准偏差(RSD,n=8)在1.1%～10%之间。