Interfacial modifying layer-driven high-performance organic thin-film transistors and their nitrogen dioxide gas sensors

Organic thin-film transistors (OTFTs) based on bottom-gate bottom-contact configuration were fabricated by inserting two kinds of modifying layers at the interface of source/drain electrode and organic semiconductor, while nitrogen dioxide (NO₂) sensing capability was also evaluated based on the obtained OTFTs. Compared to OTFT without interfacial layer, the field-effect mobility (μ) was enhanced from 0.018 cm²/Vs to 0.15 cm²/Vs by incorporating with MoO_x interfacial layer. Moreover, when exposed to 30 ppm NO₂, the saturation current and μ of OTFT with MoO_x interfacial layer increase 22.7% and 26.7%, respectively, while in original OTFT, the values are only 3.0% and 3.7%, respectively. The mechanism of performance improvement of OTFT sensor was systematically studied by focusing on the interface of source/drain electrode and organic semiconductor. The reduced contact resistance leads to higher μ, meanwhile, pentacene morphology modulation on MoO_x contributes to better diffusion of NO₂ molecules. As a result, higher μ and more diffused gas molecules enhance the gas sensing property of the transistor.     

Fabrication of ZnO nanorod-based hydrogen gas nanosensor

We report a first work on nanofabrication of hydrogen nanosensor from single ZnO branched nanorods (tripod) using in-situ lift-out technique and performed in the chamber of focused ion beam (FIB) system. Self-assembled ZnO branched nanorod has been grown by a cost-effective and fast synthesis route using an aqueous solution method and rapid thermal processing. Their properties were analyzed by X-ray diffraction, scanning electron microscopy, energy dispersion X-ray spectroscopy, transmission electron microscopy, and micro-Raman spectroscopy. These analyses indicate high quality ZnO nanorods. Furthermore, our synthesis technique permits branched nanorods to be easily transferred to other substrates. This flexibility of substrate choice opens the possibility of using FIB system for handling.

The main advantage of the proposed in-situ approach is a controllable lift-out procedure which permitted us to obtain a 90% success rate for building nanodevices. The fabricated nanosensor uses only single self-assembled ZnO branched nanorod (tripod) to gauge the 150 ppm H₂ in the air at room temperature. The hydrogen sensitivity is in the range of 0.6–2% depending on which two branches to use. The nanosensor has selectivity against other gases such as O₂, CH₄, CO and LPG, which shows sensitivity of <0.02%. The single ZnO branched nanorod sensor can operate at low power of <5 μW.     

薄膜电容器的失效分析和试验方法

薄膜电容器失效的主要原因在于其保护层防潮性能不好和实际应用中存在交流电。文中先介绍薄膜电容器的生产工艺和电子镇流器的使用环境,再介绍潮湿对电容器的危害作用,以及电容器的失效分析。作者运用详细的原理解释,结合用不同的潮湿试验条件和施加直流电压或交流电压的方法来评估薄膜电容器的实际承受能力,通过优化选择和数据对比,得出结论"85℃,85%RH,施加交流电压"是最有效的试验方法。总之,增强防潮和抗交流电能力可以保证薄膜电容器以及电子镇流器处于高质量水平。     

Design and optimization of an integrated MEMS gas chamber with high transmissivity

Non-Dispersive InfraRed (NDIR) gas sensor is widely used for gas detection in collieries and the gas chemical industry, etc. The performance of the NDIR gas sensor depends on the volume, optical length and transmittance of the gas chamber. However, the existing gas sensor products have problems of large volume, high cost and incapable of integration, which need to develop towards the miniaturized sensor. This paper first presents the theoretical background of the NDIR gas sensor and the novel structure of a fully integrated infrared gas sensor and its micro-machined gas chamber structure. Then, the light structure and the gas flow of the gas chamber are optimized on Tracepro software and Ansys workbench, respectively, and the technological process for preparing the Micro-Electro-Mechanical System (MEMS) gas chamber is designed. Finally, we produce a gas chamber with a small volume and good transmissivity, which would be the most important part of producing the miniaturized NDIR gas sensor.     

Response time and mechanism of Pd modified TiO2 gas sensor

In this work, gas response properties of Pd modified TiO₂ sensing films are discussed when exposed to H₂ and O₂. TiO₂ films are surface modified in PdCl₂-containing solution by the dipping method and treated for different treatment times to get different surface states. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and Kröger–Vink defect theory are used to characterize the sensing films. The gas response properties indicate that the sensor response time which related to the rate of change of sensor resistance is affected by the activation energy (E). In particular, the sensor treated at 900 °C for 2 h exhibits a response time of about 20–240 ms when exposed to H₂ and 40–130 ms when exposed to O₂ at 500–800 °C.     

CO2 detection with CNx thin films deposited on porous silicon

In recent years, porous silicon (PSi) has attracted a great deal of attention for sensing applications. However, the high reactivity of PSi surfaces causes serious problems of stability. In this work, we developed new thin films that can serve as stabilizer of PSi for CO₂ gas sensors development. PSi surface was coated with carbon nitride (CN_x) film which is one of the most important interfering to stabilize the PSi layer. CN_x film was deposited by pulsed laser ablation. The effect of CO₂ gas on the sensor response was investigated for different polarization voltages. The electrical properties of (Al/CN_x/PSi/Si) structure were modified in the presence of the gas. The device shows a high sensitivity against CO₂ gas. Furthermore, the current variation of the sensor as a function of time has been investigated. The results show that the Al/CN_x/PSi/Si structure becomes stable after the first two weeks.     

半导体厂超净供气系统

介绍了集成电路制造用的电子气体中粒子控制规范,供气系统用的材料及其处理技术,供气管路和配件技术,粒子过滤及计数技术。     

The highly promotive sensing performance of a single cerium doped SnO2 nanobelt sensor to ethanol

Pure SnO₂ nanobelts and Ce-doped SnO₂ nanobelts were successfully synthesized and their morphology, microstructure, and elemental composition have been characterized by a series of techniques. The results reveal that Ce ions have incorporated into the lattice of SnO₂. The corresponding devices based on single nanobelt are fabricated and their sensitive properties are investigated systemically. The Ce-SnO₂ sensor possesses a great response (8.2) to 100 ppm of ethanol at optimum temperature (230 °C). At the same time, its calculated theoretical detection limit is 78 ppb. The response and recovery time is quite short and air humidity has little effect on the performance of the sensor. In addition, the gas sensing mechanism of Ce-doped SnO₂ is discussed.     

微波加热高碳铬铁粉气-固相流化脱碳热力学研究

微波加热高碳铬铁粉流态化脱碳是一种简捷的无渣脱碳法,既能获得中低碳铬铁粉,又可避免有害铬渣的排放。高碳铬铁粉气-固相流化脱碳,气体脱碳剂的选择、气-固相流化脱碳热力学条件以及铬氧化热力学就成为试验研究的基础问题。热力学计算研究表明,微波加热温度分别高于298,1380和1435K时,气体脱碳剂O2、CO2、H2O（g）开始和高碳铬铁粉颗粒发生气-固相流化脱碳反应。由于脱碳生成的铬铁素体易被气体脱碳剂所氧化,使得脱碳反应由高碳铬铁粉颗粒表面的气-固相脱碳反应转变为颗粒内部的铬铁碳化物与铬铁氧化物之间的固一固相反应,从而可在一定的微波加热温度、流化时间下实现高碳铬铁粉的深度脱碳。     

火炸药多组分气体现场测量装置动态校准技术研究

利用自研的火炸药专用自动配气系统和实验室校准装置,通过混合气体校准以及"预估-校准-逼近"的方法,对火炸药气体现场测量装置进行了动态校准。结果表明,多组分气体动态校准技术实现了火炸药配方燃烧爆轰过程产生气体的准确测量。混合气体校准相对标准偏差RSD≤0.3%,保证了动态测量数值的有效统一和量值传递。