同步辐射x射线光刻制作深亚微米T形栅

x射线光刻非常适合用于深亚微米T形栅的制作,这是因为它的高分辨率、大的曝光视场和高的生产效率足以满足MMIC制造工艺的要求。本文中我们首先对我们的x射线掩模制造工艺进行介绍,然后论述了一种用于制造深亚微米T形栅的两层胶工艺,介绍了所取得的一些研究结果,最后对国内的深亚微米光刻现状进行了简要分析。     

涡流管类比逆流换热器方法的研究

结合Scheper，Lewins和Bejan的理论模型，对涡流管类比逆流换热器模型进行了深入地分析，得出了冷流分量对温度分离效应的函数关系式，为了解涡流管机理和实验中强化涡流管温度分离效应提供了理论依据。     

硅片和硅器件工艺中的背面损伤吸除技术

本文介绍了硅片背面的三种主要损伤吸除技术：机械损伤、激光辐照和离子注入技术。对这三种吸除技术的机理、工艺条件、应用情况和近来进展，作了详细的评述。     

电解法烟道气二氧化硫在线监测系统的设计

介绍了一种烟道气中SO2在线检测系统，该系统可以实现24h不间断地监测烟道气中SO2的体积分数和质量浓度，同时将信息经网络传送给环保有关部门，具有一定的新颖性、可靠性、准确性。     

Surface designing of polypropylene by critical monitoring of the grafting conditions

The grafting of acrylic acid onto electron beam‐irradiated polypropylene was carried out using preirradiation method. The stability of peroxy radicals was investigated by electron spin resonance. It was found that the decay of peroxy radicals is much faster at 70°C than at 40°C and ambient temperature. The grafting has been observed to be strongly dependent on the monomer dilution in the reaction medium. The grafting was ascertained by attenuated total reflectance (ATR). The distribution of grafts across the samples was monitored by infrared microscopy. It was found that the graft management is considerably influenced by composition of the grafting medium. The grafting involving pure monomer leads to the surface enrichment with the polyacrylic acid chains. The samples grafted in pure monomer led to much lower contact angles as compared to the diluted monomer solution. The swelling of the grafted samples also showed a trend that was governed by the graft management. © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 100: 546–553, 2006     

Solar radiation climate in Malawi

Recently, Diabaté et al. [Diabaté, L., Blanc, Ph., Wald, L., 2004. Solar climate in Africa. Solar Energy 76, 733–744] created a map of solar radiation climate in Africa using clearness index for 62 sites. They established a solar climate class II located in Malawi and Madagascar. However, their analysis did not include any irradiation data from a site in Malawi. In this study, the solar radiation climate of Malawi has been studied using long-term global radiation data from a local site. The mean monthly (K_tm) and seasonal (K_ts) daily clearness indices for the site were computed. It is observed that K_tm has two maxima in a year (K_tm = 0.58 in May and K_tm = 0.64 in September), in close conformity with findings of Diabaté et al. (2004). Other results are presented and discussed.     

Preparation of an anion‐exchange adsorbent by the radiation‐induced grafting of vinylbenzyltrimethylammonium chloride onto cotton cellulose and its application for protein adsorption

Poly(vinylbenzyltrimethylammonium chloride)‐graft‐cotton cellulose, an anion‐exchange matrix, was synthesized by a mutual radiation‐induced grafting technique with a ⁶⁰Co γ‐radiation source. The grafted matrix was characterized by grafting yield estimation, elemental analysis, Fourier transform infrared spectroscopy, and scanning electron microscopy. The grafting yield decreased with the increase in the dose rate. However, the grafting yield and nitrogen content of grafted samples increased almost linearly with an increase in the total irradiation dose. To evaluate the performance of the grafted anion‐exchange matrix, the protein adsorption and elution behavior were investigated in a continuous column process under various experimental conditions, with bovine serum albumin used as a model protein. The binding and elution behavior of the anion‐exchange matrix depended on different experimental parameters, such as the grafting yield, ionic strength, pH of the medium, and amount of protein loaded. From a breakthrough curve, the equilibrium binding capacity and elution percentage of the grafted anion‐exchange matrix were estimated to be 40 mg/g and 94%, respectively. © 2006 Wiley Periodicals, Inc. J Appl Polym Sci 102: 5512–5521, 2006     

Non‐reflecting artificial boundaries for transient scalar wave propagation in a two‐dimensional infinite homogeneous layer

This paper presents an exact non‐reflecting boundary condition for dealing with transient scalar wave propagation problems in a two‐dimensional infinite homogeneous layer. In order to model the complicated geometry and material properties in the near field, two vertical artificial boundaries are considered in the infinite layer so as to truncate the infinite domain into a finite domain. This treatment requires the appropriate boundary conditions, which are often referred to as the artificial boundary conditions, to be applied on the truncated boundaries. Since the infinite extension direction is different for these two truncated vertical boundaries, namely one extends toward x →∞ and another extends toward x→‐ ∞, the non‐reflecting boundary condition needs to be derived on these two boundaries. Applying the variable separation method to the wave equation results in a reduction in spatial variables by one. The reduced wave equation, which is a time‐dependent partial differential equation with only one spatial variable, can be further changed into a linear first‐order ordinary differential equation by using both the operator splitting method and the modal radiation function concept simultaneously. As a result, the non‐reflecting artificial boundary condition can be obtained by solving the ordinary differential equation whose stability is ensured. Some numerical examples have demonstrated that the non‐reflecting boundary condition is of high accuracy in dealing with scalar wave propagation problems in infinite and semi‐infinite media. Copyright © 2003 John Wiley & Sons, Ltd.     

Influence of a Jump in the Power of Laser Radiation on Its Measurement

Simulation and investigation of the effect of an isolated jump on realization of the unit of power of laser radiation and dissemination of the size of the unit are considered. Results are obtained by means of a newly developed algorithm that characterizes the behavior of the mean value of a signal and the standard deviation of a system as functions of the parameters of a jump in the power of laser radiation and the length and amplitude of the jump. If information concerning the time when a jump occurs is available, the proposed algorithm makes it possible to take into account how a jump affects the ultimate result of a measurement.     

同步辐射光刻技术

同步辐射光刻有希望代替传统光刻技术,用于0.25μm以下图形的超精细加工。本文叙述了它的原理、相关技术的开发现状和工艺应用。