Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

Effect of Additives on Magnetic Properties of High Frequency MnZn Power Ferrite

In keeping with the advance of more compact and more power-saving electronic equipment, the demand is increasing for smaller and more efficient switching power supply. Therefore, it is necessary to provide the adequate magnetic power ferrite materials to satisfy the demand. Such ferrite materials have to meet the following main requirement: 1) high initial permeability (μ i ); 2) high saturation magnetic induction (Bs); 3) high Curie temperature (Tc); 4) high electrical resistivity (ρ ); 5)…     

Predicting plant yields using soil testing for phosphorus: Effects of error in the estimation of the maximum yield on interseasonal comparisons of yield prediction

Results from long-term field experiments in south-western Australia are presented in the form of relationships between yield, expressed as a percentage of the maximum yield, and soil test for phosphorus (P) values. Maximum yields were not always indicated by well defined yield plateaux. Different methods have been used to estimate the maximum yield value which is used to calculate yield as a percentage of the maximum yield so as to remove interseasonal variation. For all of these methods and for the same site, the same P fertilizer (superphosphate), and the same plant species, the relationship between yield and soil test P differed for different years. Consequently fertilizer recommendations based on the assumption that this relationship is constant are likely to be incorrect. We therefore question the validity of the common practice in soil testing programmes of using percentage yield values to remove interseasonal variation.     

渭河流域水利水保措施减水减沙效益初步分析

截止1989年底,渭河流域共有水库361座,塘坝2666座,引水有效灌溉面积40.4万公顷,治理总面积8136km~2,治理度17.1％。以1970年为效益计算起始年,并将全流域划分为18个片,分别采用水文法和水保法计算1970～1989年间各项水利水保措施减水减沙量及综合减水减沙效益。水文法算得的综合减水效益为24.1％,减沙效益为30.6％;水保法算得的结果相应为29.9％和30.8％,两者相近。     

长江中上游地区土壤人渗速率的空间分异研究

利用双套环法对长江中上游水土流失严重区的50个县（市）进行原他测试，对其典型土壤的稳渗速率及其影响因素进行了分析研究。结果表明：土壤稳渗速率在长江中上游地区呈现规律性的地域分异，四川盆地以及毕节地区是稳渗速率高值区，陕南和陇南地区、三峡库区以及丹江口库区足稳渗速率一般区，金沙江下游地区以及湘东赣南红壤丘陵区是稳渗速率低值区；上壤稳渗速率随土类发生有规律变化，黄壤系列土类最大，然后是石灰土、紫色土，红壤系列土类稳渗速率最小；土壤稳渗速率与质量密度呈负相关关系，与孔隙度、大于0．25mm风干土水稳性团粒含量、有机质含量以及粉／粘呈正相关关系。     

水电站施工期水土流失预测

水电站建设的水土流失问题主要体现在施工期和运行期，并以施工期的影响较为突出．如不采取必要的减免措施，将会对周围生态环境造成无法挽回的损失。本文阐述了水电站建设水土流失的几种常用的预测方法，对水土流失量进行预测，并结合具体工程实例对水电站建设过程中新增水土流失量进行了预测。     

L520型智能中子仪测定农田土壤含水量的标定研究

通过对L520型智能中子仪测定农田土壤含水量的标定研究，在试验区草甸土类型的土壤中，在0～100cm的土层中得到了一条标定土壤含水量的回归直线，用此法测定土壤含水量较重量法快捷方便且误差小。     

PTC预应力管桩在软土地基处理中的施工工艺

结合PTC预应力管桩在沪宁高速公路扩建工程中的应用，从路基底板的施工、PTC预应力管桩的施工方面对其施工工艺进行了介绍，总结了PTC预应力管桩在软土地基处理中的应用优点。     

Procedure for the evaluation of the accumulation of defects in metallic structural materials under complex elastoplastic loading

Within framework of the continual fracture mechanics, we describe the engineering approach to the assessment of scattered microdamage accumulation kinetics in metallic materials under elastoplastic loading conditions in case of plane stressed state. Automatized experimental stand and the respective investigation technique are discussed. The stand has been developed based on modification of the UMé-10T electromechanic test machine. State-of-the-art computer technologies and microprocessing hardware are incorporated in the stand automation. We present the technique of experimental assessment of damage accumulation kinetics in metallic structural materials under complex elastoplastic loading conditions with account of two different fracture (cleavage and shear) processes, which technique is based on measuring the specific electric resistance of the specimen. __________ Translated from Problemy Prochnosti, No. 1, pp. 128–137, January–February, 2006.     

Experimental investigation of the normal spectral emissivity and other thermophysical properties of pulse-heated Ni-Ti and Au-Ni alloys into the liquid phase

1. Introduction Metal working industry needs accurate thermo- physical properties of liquid metals and alloys as input data for different simulation routines to im- prove the performance of their products. Within this paper we continue the systematic investigation of the dependence of emissivity of binary alloys on the relative concentration of the constituent elements (for a previous paper see [1]). 2. Experimental method A fast ohmic pulse heating technique is applied to heat metallic wire-s…