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41.
Multi-channel micro neural probe fabricated with SOI 总被引:1,自引:0,他引:1
WeiHua Pei Lin Zhu ShuJing Wang Kai Guo Jun Tang Xu Zhang Lin Lu ShangKai Gao HongDa Chen 《中国科学E辑(英文版)》2009,52(5):1187-1190
Silicon-on-insulator(SOI) substrate is widely used in micro-electro-mechanical systems(MEMS).With the buried oxide layer of SOI acting as an etching stop,silicon based micro neural probe can be fabri-cated with improved uniformity and manufacturability.A seven-record-site neural probe was formed by inductive-coupled plasma(ICP) dry etching of an SOI substrate.The thickness of the probe is 15 μm.The shaft of the probe has dimensions of 3 mm×100 μm×15 μm with typical area of the record site of 78.5 μm2.The im... 相似文献
42.
<正>气液两相流中界面波的存在对传热、传质、阻力特性及稳定性都有很大影响。前人有关界面波的研究大多偏重于两相流中界面波的类型及其转变,而对其特征参数变化规律(如振幅、波长、频率和速度等)的研究则很少。但界面波对气液两相流流动阻力和流动结构影响机理的深入研究必须以了解界面波的各特性参数为前提,同时界面波有关特性参数的深入研究也可为气液两相流的数学理论化提供实验基础。 本文以气、水为工质,系统研究了水平矩形管内气液两相流的界面波特性。根据界面波在时域、幅域内的不同特征区别出了各种类型的波并给出了相应的波形和流型图。着重研究了界面波各特征量随气液两相流量变化的变化规律。 相似文献
43.
Magnetic‐field probes can be used for electromagnetic interference measurement of high‐speed circuits. The main magnetic probe performance includes sensitivity, spatial resolution, electric‐field suppression ratio (EFSR), and measurement accuracy. In this article, a pair of differential magnetic‐field probes is proposed to improve measurement accuracy without reducing sensitivity. The proposed differential probes consist of two asymmetric loop probes, which are designed in the same plane and separated by a row of periodic vias. The proposed differential probes are fabricated under PCB process. High accuracy can be achieved by measuring difference between outputs of the two probes. In addition, EFSR can be improved by size optimization of the differential magnetic‐field probes. Simulation and measurement results show the operating bandwidth is from 100 MHz to 12 GHz, the measurement error is 3.4% and the EFSR is about 40 dB. The proposed probes have higher measurement accuracy and higher EFSR than the conventional single probe, and larger operation bandwidth than the stacked differential probes. 相似文献
44.
利用6-羟基萘-2-醛和碘化N-乙基-2,3,3-三甲基-3H-吲哚啉季铵盐的缩合反应生成的羟基半花菁染料2与氯甲酸烯丙酯的反应合成了荧光比率型钯探针1.研究表明:在含水介质中,探针1对钯(Pd0和Pd2+)显示出很高的敏感性、选择性和抗干扰性,其荧光比率增强大约72倍,对Pd2+的最低检测极限为0.23μmol/L.探针1对钯的作用机理是钯催化碳酸烯丙酯断裂导致比率荧光变化. 相似文献
45.
采用现场举升系统结垢统计、室内铸体薄片,结合SEM和电子探针分析了强碱三元复合驱过程中垢成分的变化和储层结垢类型与形成机理。结果表明,垢的主要类型随着强碱三元复合驱体系注入PV数的增加发生变化,注入初期以碳酸盐垢为主并含有少量硅垢和有机物,注入中期3种垢成分含量相当,注入后期结垢类型转变为与初期相同类型。铸体薄片分析表明,垢形态为白色云雾状和褐色胶结状,部分孔隙阻塞造成孔隙结构发生变化,面孔隙率平均下降6.45%。研究区垢的类型主要为钙垢和硅垢,含有少量的钡/钛垢和铁垢。由于强碱的溶蚀作用,地层和井筒中容易出现结垢现象,建议在能够实现相同提高采收率幅度的前提下可以考虑采用弱碱三元复合驱。 相似文献
46.
IC测试是集成电路生产中的重要工序,探针表面诸如划痕、凹坑等缺陷对性能测试结果影响大.文章研究了IC探针表面质量的机器视觉检测方法,讨论了灰度变换、均值滤波、区域连通、图像分割等缺陷图像处理和形状识别方法,建立了相应的探针表面质量检测系统,并基于机器视觉软件Halcon开发了探针表面质量检测系统软件.实验表明:开发的检测系统可对直径0.3~0.6 mm的IC测试探针表面质量进行快速检测评估,且系统的稳定性好、检测精度高,能有效缩短检测时间和减少检测成本. 相似文献
47.
To better understand the plasma spray coating process, an experimental study of the interaction between a subsonic thermal
plasma jet and injected nickel- aluminum particles was performed. The velocity, temperature, and composition of the argon/helium
gas flow field was mapped using an enthalpy probe/mass spectrometer system. The sprayed particle flow field was examined by
simultaneously measuring the size, velocity, and temperature of individual particles. Particle and gas temperatures were compared
at the nominal substrate stand- off distance and axially along the median particle trajectory. Temperature and velocity differences
between the particle and the gas surrounding it are shown to vary substantially depending on the trajectory of the particles.
On the median trajectory, the average particle is transferring heat and momentum back to the plasma by the time it reaches
the substrate. Because the exchange of heat and momentum is highly dependent on the particle residence time in the core of
the plasma, the condition of particles at the substrate can be optimized by controlling the particle trajectory through the
plasma. 相似文献
48.
Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors 总被引:4,自引:1,他引:4
Hao-Bo Cheng Zhi-Jing Feng Kai Cheng Ying-Wei Wang 《International Journal of Machine Tools and Manufacture》2005,45(9):1085-1094
The paper presents the design of a six-axis machining system and its application in fabricating large off-axis aspherical mirrors with sub-aperture lapping techniques. The new system is based on computer-controlled optical surfacing (CCOS), which combines the faculties of grinding, polishing, and on-machine profile measuring, has the features of conventional loose abrasive machining with the characteristics of a tool having multiple degrees of freedom moving in planar model. And a novel dual touch-trigger probe profiler is designed, which is composed of a probe, model METRO-MT60 made by HEIDENHAIN Co., is integrated into the system for measuring the shape accuracy of the tested aspherical surface, another probe modeled METRO-MT12 is designed as a calibrating device for minimizing the cosine error caused by assembly inaccuracy. The new CNC machining system with two kinds of moving coordinate systems, dual tool activities and on-machine measuring is presently developed based on the new concept. The general material removal function during machining is analyzed on the basis of the Preston hypothesis. Further, an alignment test of the measuring profiler is carried out using a leveling rule as a specimen. The accuracy of the optical surfaces measured by the dual probe profiler is found to be within 1 μm PV after removing cosine error and error compensating, achieves to the resolving power of the profiler is about 0.2–0.5 μm, so the developed system can be applied to the shape accuracy measuring of aspheric fabrication with micro precision during fine grinding process according to the calibrating results. Finally, the manufacturing experiments are carried out by virtue of an off-axis oblate ellipsoid mirror with rectangular aperture as 770 mm×210 mm and centered 127 mm. The accuracy of the aspherical mirror improved from the initial form error of 17.648 μm rms to the final one of 0.728 μm rms after grinding for 200 h. 相似文献
49.
Yang Gao Lian-Tong An Cheng-Qi Sun Zhi-Jun Yan 《Journal of Thermal Spray Technology》2004,13(4):521-525
The effects of the composition of plasma gases (Ar-N2, Ar-H2), arc current, and voltage on the temperature and velocity of a low-power (5 kW) plasma torch in the arc field free region
has been investigated using an enthalpy probe. Coatings of Al2O3-13TiO2 were deposited under different conditions. The results show that in the Ar-N2 plasma, the enthalpy, temperature, and velocity change little with arc current and voltage when regulating the nitrogen proportion
in the plasma gas. The hardness of the resulting coatings is 800 to 900 kg/mm2 HV.300. For Ar-H2 plasma, however, increases in the H2 content in the mixture of the gases remarkably enhanced the velocity and heat transfer ability of the plasma jet, with the
result that the coatings showed high hardness up to 1200 HV. 相似文献
50.