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To synthesize diamond films by microwave plasma enhanced chemical vapor deposition (MPECVD), the methane concentration (CH4/H2)plays a crucial role. It is well-known that there always exists a critical methane concentration (≤0.6%) only below which
a good quality diamond film can be obtained. In this study, however, the phenomena of diamond synthesis resulting from high
carbon concentration conditions were observed. The molten metals, e.g., Ag, Cu, were used as the deposition substrates on
which crystalline diamonds can be achieved from a methane content of CH4/H2≥6% or even from solid carbon sources. These results suggest that there may exist a low methane content boundary layer (<0.6%)
in the proximity of molten metal surface on which suitable species, CH, CH+, Hα and Hβ are composed for the diamond nucleation and growth similar to the condition as in the conventional low methane contents.
The molten metal inclines to dissolve other forms of carbonaceous materials other than diamond, and thus keeps a much higher
steady supply of carbon atoms that enhances the quality as well as the growth rate of the forming diamonds.
Received: 23 June 2001 / Accepted: 23 July 2001 相似文献
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用发射天线式微波等离子体CVD装置沉积大面积金刚石薄膜 总被引:1,自引:0,他引:1
在国内首次研制成功了高气压发射天线式微波等离子体辅助化学气相沉积金刚石薄膜装置,用该装置成功地在3英寸的单晶硅衬底上沉积了Φ70mm的金刚石薄膜。这一成果填补了国内空白,对我国金刚石薄膜研究领域的设备更新换代和开发应用具有重要意义。 相似文献
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在对石油化工改扩建工程施工现场火灾危险因素识别评估的基础上,判定现场火灾危险等级、火灾类别,对灭火级别和保护距离进行验算,提出施工现场灭火器选型和配置方案。 相似文献
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In recent years, ultra-precision micromachining technology has been used in a variety of fields such as optical instruments, electronic devices, medical equipments, etc. At present, it is essential to meet the requirement of producing various shapes, one of which is a structure with a high aspect ratio. Such structures are applied, for example, to a shaft of micro robot, a long part of microactuator and micromachine, a microneedle for syringe, etc. However, due to its fragile nature, it is extremely difficult to fabricate the structure with a high aspect ratio since it is easily damaged during cutting. It is intended to produce micro towers with high aspect ratios by applying the ultra-precision milling technology using a single crystal diamond cutting tool. The method enables accurate creation of a variety of microstructures with high aspect ratios. In addition, the study also proposes a new machining method to create microneedle arrays, avoiding the contact of cutting edge with already machined parts again. As a result, it is concluded that the proposed method has the potential of producing a variety of microstructures with high aspect ratios. 相似文献
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The wide scattering in tool life of natural mono-crystalline diamond tools is considered to depend on intrinsic crystalline defects due to nitrogen impurities in raw diamond. In this paper, the correlation was investigated between the amounts and types of the impurity evaluated by infrared absorption (IRA) and the crater wear and chipping resistances. As a result, diamonds including less total amount of impurity show larger wear resistance and that with larger amount of B2-aggregates show larger chipping resistance. This suggests that the inspection by IRA can be a useful method for screening of raw diamond for highly durable cutting tools. 相似文献