Examination of the pulsing phenomena in pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) of Cr-Al-N thin films

Pulsed DC magnetron sputtering was developed initially as a means of suppressing the arcing at the target during reactive sputtering. More recently, pulsing the magnetrons has also been shown to modify the intrinsic plasma parameters to bring higher ion energy and ion flux to the growing film at the substrate, which, in turn may have a strong influence on film structure and properties. This paper examines the effect of pulsing the unbalanced magnetrons in a two-cathode closed field configuration on the plasma properties, in particular, the ion energy distributions (IEDs) and ion flux, as determined using a Hiden electrostatic quadrupole plasma mass spectrometer (EQP). Chromium and aluminum targets were reactively sputtered in an Ar-N₂ atmosphere in this two-cathode pulsed-closed field unbalanced magnetron sputtering (P-CFUBMS) system. The pulsing parameters examined included: pulsed power (400 W to 1400 W), working pressure (0.13 Pa/1.0 mTorr to 0.53 Pa/4 mTorr), nitrogen to argon flow ratio, substrate to target distance (127 mm/5 in. and 203 mm/8 in.), duty cycle (40 kHz to 350 kHz frequency, 0.4 μs to 5 μs reverse time), operated under synchronized (voltage-time wave forms of the two magnetrons were in phase) and asynchronized (voltage-time wave forms of the two magnetrons were out of phase) conditions. The effect of the pulsing regimes on the ion energy and ion flux was determined for reactive sputtering of Cr-Al-N thin films. It was shown that pulsing both magnetrons in this P-CFUBMS configuration had a large effect on both the ion energies and ion fluxes generated within the plasma. The positive voltage overshoot and the positive pulse voltage developed on each target during the reverse voltage (positive) period increased the plasma potential and thereby increased the overall extended ion energy range. Three main ion energy regions in the IEDs were identified and related to different positive voltage values during the reverse pulse period. In addition, the extent of synchronization of the voltage waveforms of the two magnetrons also substantially influenced both the IEDs and the ion fluxes, while varying the pulsing frequencies and reverse times (duty cycle) in either synchronized or asynchronized modes also resulted in different ion energies and ion fluxes within the plasma. It was also found that the ion flux increased on increasing the EQP orifice to the chamber wall distance from 127 mm to 203 mm, and the ion energy range decreased as the working pressure increased from 0.13 Pa to 0.53 Pa. The ion energies and fluxes are shown to be strongly dependent on pulsing frequency, duty cycle and waveform.     

使用KEMA测试工具开展IEC 61850一致性测试

IEC 61850标准体系的一致性测试是保证互操作的基础,需要强制性的开展。在研究IEC 61850一致性测试标准的基础上,介绍一致性测试的内容,分析其测试过程和架构。为了开展测试工作,引入KEMA公司的测试工具套件,阐述各软件部分的作用,并搭建实验室测试环境用于IEC 61850一致性测试。     

智能变电站电容型设备介质损耗在线监测IED设计

为了及时有效地对设备绝缘特性进行在线监测从而保障电网安全运行,笔者提出了一种基于ARM+DSP双CPU结构的智能变电站电容型设备介质损耗在线监测系统IED设计方案,遵循IEC 61850协议给出具体软硬件设计。运行结果表明:该系统可以精确的测得泄漏电流、介质损耗、等值电容等设备运行状态信息,并可通过IEC 61850协议将数据传输至在线监测数据中心。     

基于IEC61850的变电站新型IED的研究

从与我国现有变电站自动化系统间隔层设备比较的角度出发,研究了变电站新型通信网络和系统协议IEC61850中的智能电子设备IED的模型,分析了IED在IEC61850体系结构中的作用与逻辑模型、数据对象模型、通信网络的性能和通信模式等工作机制,围绕变压器差动保护IED进行了功能模型、信息流、类等方面的设计,说明了新型IED的先进性和可行性。     

数字化变电站IED采样数据同步插值的设计

针对数字化变电站二次智能电子设备（IED）采样数据源的多样性导致采样数据不同步及采样频率不一致的问题,从智能设备数据处理角度,对二次设备采样时序、数据同步插值等因素进行分析,提出解决二次IED数据采样不同步及采样频率不一致的方法,该方法增强了不同采样模式下智能设备整体采样数据的有效性。     

Strong tracking filter based adaptive generic model control

Generic Model Control (GMC) is a control algorithm capable of using nonlinear process model directly. Parameters in GMC controllers are easily tuned, and measurable disturbances can be compensated effectively. However, the existence of large modeling errors and unmeasurable disturbances will make the performance of GMC deteriorate. In this paper, based on the theory of Strong Tracking Filter (STF), a new approach to Adaptive Generic Model Control (AGMC) is proposed. Two AGMC schemes are developed. The first is a parameter-estimation-based AGMC. After introducing a new concept of Input Equivalent Disturbance (IED), another AGMC scheme called IED-estimation-based AGMC is further proposed. The unmeasurable disturbance and structural process/model mismatches can be effectively overcome by the second AGMC scheme. The laboratory experimental results on a three-tank-system demonstrate the effectiveness of the proposed AGMC approach.     

IEC61850到MMS映射分析及实现

在分析和理解IEC61850标准及MMS服务定义的基础上,归纳了MMS的应用途径及其优点。根据SCSM方法,给出了两者间主要模型及服务的映射原理和映射内容,重点介绍了其实现方法。针对典型IED,具体给出了服务器类、关联类、逻辑设备类等主要模型的映射实例,并对部分特殊处理的例子作了较详细的讨论和分析。     

数字化变电站技术与应用

基于变电站自动化技术的发展及其在电力系统中的广泛应用,数字化变电站技术得到迅速发展。文章阐述了数字化变电站的主要技术特征、体系结构、关键技术、IEC 61850系列标准、国内外研发与应用实践及展望。可以预期,一个系统分布化、结构紧凑化、模型标准化、通信网络化、信息集成化、检修状态化、操作智能化的完全数字化变电站将作为未来“数字化电网“的功能和信息节点展示在人们面前。     

IEC 61850标准下的对象模型的研究及其在电能质量监测IED中的应用

采用IEC 61850标准的面向对象的建模技术IED（智能电子设备）进行建模，可以实现IED之间的互操作性。本文首先描述了基于IEC 61850标准的对象建模方法，然后以电能质量监测IED为例，对测量功能的对象模型进行了具体构建，其中包括逻辑设备、逻辑节点和数据对象以及通信服务的模型构建；并对该模型进行了必要的优化和改进。     

数字化变电站IED采样数据同步插值的设计

针对数字化变电站二次智能电子设备（IED）采样数据源的多样性导致采样数据不同步及采样频率不一致的问题,从智能设备数据处理角度,对二次设备采样时序、数据同步插值等因素进行分析,提出解决二次IED数据采样不同步及采样频率不一致的方法,该方法增强了不同采样模式下智能设备整体采样数据的有效性。