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深亚微米光学光刻工艺技术 总被引:1,自引:0,他引:1
谢常青 《电子工业专用设备》2000,29(3):8-12
光学光刻的生命力仍然在不断延续 ,即使在 0 13 μm及 0 13 μm以下集成电路制造水平上 ,光学光刻仍然是一个非常重要的候选者。深亚微米光学光刻工艺技术目前面临着越来越严重的挑战。对深亚微米光学光刻中的一些关键工艺技术如移相光刻、光学邻近效应校正、远紫外光刻胶、套刻对准误差等进行了论述。 相似文献
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表面紫外光接枝润滑改性医用聚氨酯材料 总被引:16,自引:0,他引:16
用紫光直接引发亲水性单体N-乙烯吡咯烷酮、丙烯酰胺在医用聚氨酯表面进行接枝反应,可以提高PU表面的润滑性。研究了影响接枝密度、摩擦系数的因素,测定了单位表面积吸水率、水接触角。扫描电子显微镜观察发现,接枝反应后材料形成了新表面形貌。 相似文献
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P. K. Kuo T. Ahmed L. D. Favro H -J Jin R. L. Thomas 《Journal of Nondestructive Evaluation》1989,8(2):97-106
We describe a system for real-time processing of infrared video images in synchronism with the time-dependence of the target object's temperature. The system can either be used either with periodic or pulsed heating of the target. With periodic heating, the system operates as if it were a collection of lock-in amplifiers, one for each of the quarter of the million pixels of the image. With pulsed heating, it operates as if it consisted of a similar number of box-car averagers. In both cases, the signal-to-noise ratio and temperature sensitivity of the infrared camera are improved. The technique lends itself to a wide spectrum of NDE applications. 相似文献
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The fullerene molecules such as C60 and C70 were incorporated in the commercial positive electron beam resist to investigate the performances for patterning and filling the contact holes at nanometer scale. The sensitivity, process window and contrast of the modified resist were improved, while the toluene dilution degraded the sensitivity. The electron beam dose affected the designed holes dimension, and the adulterated resist could print sub-50 nm holes pattern. We found the small amount (0.01–0.02% w/v) of fullerene molecules very effectively promoted the etch resistance and selectivity under fluoro-containing gases, and minimized the film stress. The etching resistance for C60 and C70 modification could be improved by 65% and 68%, respectively. Together with the fullerene-incorporated resist and the etching processes, the sub-50 nm contact hole could be achieved. In addition, the gap-filling and step coverage capability of titanium nitride into nanometer contact hole with chemical vapor deposition was better than physical vapor deposition. 相似文献
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Ying‐Hung So 《Polymer International》2006,55(2):127-138
Poly(2,4‐dimethyl‐1,4‐phenylene oxide) (PPO), poly(benzo[1,2‐d:5,4‐d′]bisoxazole‐2,6‐diyl‐1,4‐phenylene) (PBO) and poly(benzo[1,2‐d:4,5‐d′]bisthiazole‐2,6‐diyl‐1,4‐phenylene) (PBZT), which are polymers with extended conjugated structures, undergo a self‐sensitized photo‐induced electron‐transfer reaction. A second component is not required. This article presents many similar observations on these polymers when they are exposed to light and evidence to support the proposed photo‐induced electron‐transfer mechanism. Methods to stabilize these polymers against photo‐oxidation are also described. Workers investigating other conjugated polymeric systems may find the experimental methods, observations and polymer stabilization approaches discussed in this review useful. Copyright © 2005 Society of Chemical Industry 相似文献
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Extracted and unextracted black cherry (Prunus serotina), red oak (Quercus rubra), and red pine (Pinus resinosa) wood specimens were exposed to artificial weathering, and their discoloration process was investigated to obtain basic understanding on the role of wood extractives in the weathering of hardwoods and softwoods. Color measurements were made with a spectrometer according to ISO 2470 standards, using the CIELAB system. Results obtained showed that the rate of whiteness was not significantly affected by extractives removed with organic solvents, but were significantly affected when organic solvent extraction was followed by water extraction. The total discoloration rate had the same pattern, and chromaticity coordinates were less affected by wood extractives. These results confirm the hypothesis that some extractives contained in wood act as antioxidants and are able to provide some protection to wood surfaces against weathering degradation. However, more work is needed to understand the chemistry and mechanism of action of these extractives so as to develop any practical use for this property. © 2006 Wiley Periodicals, Inc. Col Res Appl, 31, 425–434, 2006; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/col.20248 相似文献