碱性Cu抛光液中非离子表面活性剂和氧化剂作用的研究

化学机械抛光是集成电路制造工艺中十分精密的技术。在本文中,为了改善抛光效果,分表讨论了非离子表面活性剂和氧化剂在CMP过程中作用。我们主要分析了非离子表面活性剂对片内非均匀性和表面粗糙度的影响。同时,我们从静态腐蚀速率、电化学曲线和剩余高低差的角度,讨论了在不加BTA条件下,不同氧化剂浓度的抛光液的钝化特性。实验结果明显地表明：加入了非离子表面活性剂的抛光液,更有利于改善抛光后的片内非均匀性和表面粗糙度,并确定2vol%体积分数是比较合适的浓度。当抛光液中氧化剂浓度超过3vol%,抛光液拥有较好的钝化能力,能够有效减小高低差,并有助于获得平整和光滑的表面。根据这些实验结果,非离子表面活性剂和氧化剂的作用进一步被了解,将有助于抛光液性能的改善。     

Engineering Transition Metal Layers for Long Lasting Anionic Redox in Layered Sodium Manganese Oxide

Oxygen-redox-based-layered cathode materials are of great importance in realizing high-energy-density sodium-ion batteries (SIBs) that can satisfy the demands of next-generation energy storage technologies. However, Mn-based-layered materials (P2-type Na-poor Na_y[A_xMn_1−x]O₂, where A = alkali ions) still suffer from poor reversibility during oxygen-redox reactions and low conductivity. In this work, the dual Li and Co replacement is investigated in P2-type-layered Na_xMnO₂. Experimentally and theoretically, it is demonstrated that the efficacy of the dual Li and Co replacement in Na_0.6[Li_0.15Co_0.15Mn_0.7]O₂ is that it improves the structural and cycling stability despite the reversible Li migration from the transition metal layer during de-/sodiation. Operando X-ray diffraction and ex situ neutron diffraction analysis prove that the material maintains a P2-type structure during the entire range of Na⁺ extraction and insertion with a small volume change of ≈4.3%. In Na_0.6[Li_0.15Co_0.15Mn_0.7]O₂, the reversible electrochemical activity of Co³⁺/Co⁴⁺, Mn³⁺/Mn⁴⁺, and O^2-/(O₂)^n- redox is identified as a reliable mechanism for the remarkable stable electrochemical performance. From a broader perspective, this study highlights a possible design roadmap for developing cathode materials with optimized cationic and anionic activities and excellent structural stabilities for SIBs.     

W-Mo合金表面超精密加工的CMP技术研究

阐述了金属化学机械抛光的机理。将半导体制造工艺中的nm级平坦化技术、化学机械抛光技术拓展并应用到W-Mo合金工艺中,在实现精密物理材料表面高平坦度、低粗糙度的前提下,提高W-Mo合金去除速率。采用碱性抛光液进行实验,确定了抛光液的成分;分析了W-Mo合金化学机械抛光中压力、流量、转速、pH值、活性剂等参数对W-Mo合金的影响。实验表明,实现W-Mo合金表面超精密抛光的最佳条件为:压力0.06MPa,流速160mL/min,转速60r/min,pH值10.1~10.3。     

[4]Helicene–Squalene Fluorescent Nanoassemblies for Specific Targeting of Mitochondria in Live‐Cell Imaging

Ester, amide, and directly linked composites of squalene and cationic diaza [4]helicenes 1 are readily prepared. These lipid‐dye constructs 2 , 3 , and 4 give in aqueous media monodispersed spherical nanoassemblies around 100–130 nm in diameter with excellent stability for several months. Racemic and enantiopure nanoassemblies of compound 2 are fully characterized, including by transmission electron microscope and cryogenic transmission electron microscope imaging that did not reveal higher order supramolecular structures. Investigations of their (chir)optical properties show red absorption maxima ≈600 nm and red fluorescence spanning up to the near‐infrared region, with average Stokes shifts of 1350–1550 cm^?1. Live‐cell imaging by confocal microscopy reveals rapid internalization on the minute time scale and organelle‐specific accumulation. Colocalization with MitoTracker in several cancer cell lines demonstrates a specific staining of mitochondria by the [4]helicene–squalene nanoassemblies. To our knowledge, it is the first report of a subcellular targeting by squalene‐based nanoassemblies.     

Reduction‐Sensitive Dextran Nanogels Aimed for Intracellular Delivery of Antigens

Targeting of antigens to dendritic cells (DCs) to induce strong cellular immune response can be established by loading in a nano‐sized carrier and keeping the antigen associated with the particles until they are internalized by DCs. In the present study, a model antigen (ovalbumin, OVA) is immobilized in cationic dextran nanogels via disulfide bonds. These bonds are stable in the extracellular environment but are reduced in the cytosol of DCs due to the presence of glutathione. Reversible immobilization of OVA in the nanogels is demonstrated by the fact that hardly any release of the protein occurred at pH 7 in the absence of glutathione, whereas rapid release of OVA occurs once the nanogels are incubated in buffer with glutathione. Furthermore, these OVA conjugated nanogels show intracellular release of the antigen in DCs and boost the MHC class I antigen presentation, demonstrating the feasibility of this concept for the aimed intracellular antigen delivery.     

漂白麦草浆细杂组份对阳离子淀粉吸附的影响

本文研究了漂白麦草浆中细杂组份(通过100目,其中大部分是杂细胞,如薄壁细胞,表皮细胞)对阳离子淀粉吸附的影响。 实验表明,漂白麦草浆中细杂组份的比表面积明显大于纤维组份(保留在100目以上)的比表面积。阳离子淀粉优先吸附在比表面积大的细杂组份上。纤维组份的吸附能力受化学环境的影响较细杂组份更为敏感。     

表面活性剂乳化能力差异对低渗油藏提高采收率的影响

表面活性剂驱是低渗透油藏提高采收率的重要技术手段之一,以往筛选活性剂基本以其降低油水界面张力的性能作为评价重点,而表面活性剂的油水乳化性能并未得到足够的重视。为研究油水乳化性能对低渗油藏提高采收率的影响,结合长庆低渗透油藏条件,选用具备相同超低界面张力但乳化能力有所差异的2种活性剂,利用均质、非均质岩心开展驱油实验。实验结果表明:同时具备超低界面张力和强乳化能力的活性剂BA,可在岩心入口段降低渗流阻力,同时实现岩心中部乳化封堵的效果,岩心中部残余阻力系数为2.08;而界面张力超低乳化能力较弱的活性剂TS,无法建立流动阻力,仅起到降压增注的作用。在非均质岩心驱油实验中,水驱后注入BA段塞0.6PV,建立了较高的驱替压力,扩大了波及系数,提高采收率11.46%,而活性剂TS提高采收率幅度为5.88%。     

阳离子Gemini对固体表面润湿性的影响

研究了阳离子双子表面活性剂对固体表面润湿性的影响,并从机理上进行了探讨,结果表明,与普通表面活性剂相比,阳离子双子表面活性剂在很低浓度时就能将油湿的固体表面转化为强水湿表面,并且不会改变水湿表面的润湿性;另外,对联接基长度相同但是疏水烷基链长度不同的双子表面活性剂对固体表面的润湿性影响进行了考察,结果发现疏水烷基链短的双子表面活性剂较疏水烷基链长度长的双子表面活性剂更能显著影响固体表面的润湿性。     

阳离子淀粉的合成

本文阐述了CS—3淀粉的反应机理,并结合工业生产指出阳离子淀粉的合成中重要的技术问题;另外还利用重复取样的方差分析方法确定了CS—3淀粉的工艺操作条件及主要影响因素。