浸没式光刻的优势和可行性

浸没式光刻通过高折射率的液体充入透镜底部和片子之间的空间使光学系统的数值孔径具有显著的优势。在193nm曝光系统中,水(折射率为1.44)被选作最佳的浸入液体。通过成像模拟,现已证明ArF穴193nm雪浸没式光刻(NA=1.05～1.23)与F2穴157nm雪干法穴NA=0.85～0.93雪光刻具有几乎相同的成像性能。结合流体力学和热模拟结果,讨论了ArF浸没式曝光设备的优势和可行性。     

LIGA工艺的发展及应用

介绍了LIGA(lithographie,galvanoformungandabformung)技术以及在此基础上开发出来的准LIGA(like－LIGA)技术、SLIGA(sacrificialLIGA)、M2LIGA(movingmaskLIGA)技术和抗蚀剂回流LIGA(PRLIGA———photoresistreflowLIGA)技术等。利用这一系列LIGA技术,可以生成具有高深宽比的复杂微结构,如微尖阵列、球形曲面、活动部件等,能较好地满足MEMS发展的需要。最后指出了目前这些方法存在的缺陷。     

高效可靠柱塞套珩磨夹具

一种用于珩磨设备上，加工柱塞套中孔的新型夹具，该夹具既保证了装夹的可靠性，又提高了装夹速度，值得推广应用。     

埋地换热器放热工况的现场运行实验研究

结合一地源热泵示范工程，建立了垂直竖井与地基桩单U型管埋地换热器联合使用的地源热泵系统的综合性能实验装置。通过对一个夏季长期间歇运行测试数据的分析，发现地下各个测点的温度上升幅度各不相同；桩埋管的热作用半径至少为2．5m，井埋管的热作用半径至少为2m；在相同的工况条件下，桩埋管的放热率大于井埋管。     

Comparative Performance of Different Sector Arrangement in a Desiccant Wheel Using a Mathematical Model

A one‐dimensional mathematical model has been used for a three‐sector desiccant wheel (two sectors with purge) with different flow arrangements. The model considers both gas and solid side resistance and shows a good agreement with experimental results. This model has been used to conduct a comparative performance analysis in both the effective adsorption and effective regeneration sector of a desiccant wheel. It was found that an effective regeneration sector gives better results for the performance parameters (rotation of wheel, regeneration temperature, velocity, and ambient moisture) as compared to an effective adsorption sector. © 2013 Wiley Periodicals, Inc. Heat Trans Asian Res; Published online in Wiley Online Library ( wileyonlinelibrary.com/journal/htj ). DOI 10.1002/htj.21103     

海洋雨团的全极化SAR回波信号仿真研究

在海洋的合成孔径雷达图像中,降雨（雨团）通常能引起依赖于雷达频率和极化的形状不规则的亮暗斑状图案,影响着合成孔径雷达图像的正确解译。基于C.Melsheimer的双极化仿真方法,首次对海洋雨团C、X波段全极化合成孔径雷达归一化雷达后向散射截面积进行仿真。仿真结果补充了双极化仿真的不足,更加全面地揭示了海洋雨团合成孔径雷达回波在不同波段不同极化下的特点,有助于合成孔径雷达图像的正确解译和降雨定量化研究。     

Overlay mark optimization for thick-film resist overlay metrology

For thick resist implant layers, such as a high voltage P well and a deep N well, systematic and uncorrectable overlay residues brought about by the tapered resist profiles were found. It was found that the tapered profile is closely related to the pattern density. Potential solutions of the manufacturing problem include hardening the film solidness or balancing the exposure density. In this paper, instead of focusing on the process change methodology,we intend to solve the issue of the overlay metrology error from the perspective of the overlay mark design. Based on the comparison of the overlay performances between the proposed overlay mark and the original design, it is shown that the optimized overlay mark target achieves better performance in terms of profiles, dynamic precision,tool induced shift (TIS), and residues. Furthermore, five types of overlay marks with dummy bars are studied, and a recommendation for the overlay marks is given.     

On modeling the digital gate delay under process variation

To achieve a characterization method for the gate delay library used in block based statistical static timing analysis with neither unacceptably poor accuracy nor forbiddingly high cost,we found that general-purpose gate delay models are useful as intermediaries between the circuit simulation data and the gate delay models in required forms.In this work,two gate delay models for process variation considering different driving and loading conditions are proposed.From the testing results,these two models,especially the one that combines effective dimension reduction(EDR) from statistics society with comprehensive gate delay models,offer good accuracy with low characterization cost,and they are thus competent for use in statistical timing analysis(SSTA).In addition, these two models have their own value in other SSTA techniques.     

束流测量中的工频陷波器

提出了一种应用于电子束曝光机束流测量中的自动跟踪工频陷波器，给出电路结构，基于对其工作原理的分析，介绍了提高陷波器跟踪精度的设计要点及调试方法。     

压电晶体-固体-液体结构中IDT的体声波激励

对压电晶体－固体（层）－液体结构中叉指换能器的体声波激励效应进行了深入探讨，通过引入压电晶体－固体层界面的界面有效介电常数，研究了叉指换能器的体声波激励效应与晶体切向、电边界条件及固体层归一化厚度之间的关系。数值分析表明，电边界条件对叉指换能器体声波激励效应的影响可忽略；体声波激励效应与压电晶体切向和固体层归一化厚度密切相关；通过选择恰当的晶体切向、固体层归一化厚度和慢度，叉指换能器仅向液体中激励体声波，且可确定出最强体声波激励时的结构参数。文中所得结果，为有关液体声传感器结构的优化设计奠定了基础。