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101.
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A. Kussmaul S. Vernon P. C. Colter R. Sudharsanan A. Mastrovito K. J. Linden N. H. Karam N. H. Karam S. C. Warnick M. A. Dahleh 《Journal of Electronic Materials》1997,26(10):1145-1153
We have used spectroscopic ellipsometry to perform real-time monitoring during metalorganic chemical vapor deposition growth
of AlGaAs (on GaAs) and InGaAs (on GaAs and InP). Optical constants for these materials were obtained up to growth temperatures
of 600 to 700°C. This information permits real-time extraction of composition and layer thickness from the raw ellipsometric
data at sample rates on the order of 0.5 Hz. We describe closed-loop control of composition and total layer thickness on AlGaAs-based
structures, including Bragg reflectors. In-situ data obtained on double-heterostructure quantum-well laser structures demonstrate that spectroscopic ellipsometry is an extremely
powerful monitoring and quality-control tool, giving important real-time information on complex structures that would be difficult
and time-consuming to obtain after growth. 相似文献
104.
M. R. Islam R. V. Chelakaea J. G. Neff K. G. Fertitta P. A. Grudowski A. L. Holmes F. J. Ciuba R. D. Dupuis J. E. Fouquet 《Journal of Electronic Materials》1995,24(6):787-792
AlGaAs double heterostructures are grown by low-pressure metalorganic chemical vapor deposition to evaluate the level of oxygen
contamination in different trimethylaluminum sources. Effects of arsine purifiers, misoriented substrates, atmospheric exposure
of the growth chamber, and possible phosphorus contamination are also studied. Extensive characterization is performed on
these films by a variety of methods, including high-resolution x-ray diffraction, photoluminescence (PL), time-resolved photoluminescence,
and secondary-ion mass spectrometry. The PL intensities for structures grown with the low-alkoxide grade are reproducibly
much greater than those grown with the regular-grade TMA1. The use of AsH3 purification improves the PL intensity. 相似文献
105.
扫描电子显微研究表明,化学汽相沉积的金刚石薄膜中晶粒大小比较均匀。但随着沉积时间和薄膜厚度的增加,晶粒逐渐变大,且每一层内,存在少量的大金刚石颗粒,讨论了晶粒尺寸变化和大晶粒形成的原因和机制。 相似文献
106.
M. Saaoudi E. Chassaing M. Cherkaoui M. Ebntouhami 《Journal of Applied Electrochemistry》2002,32(12):1331-1336
Electroless NiP films, with 12 to 16 wt % P, were deposited from a moderately acid solution. Thermogravimetric analysis indicates the presence of occluded hydrogen in the layers, which desorbs upon heating. The amount of incorporated hydrogen decreases when the pH of the solution or the nickel sulfate concentration is increased; by contrast it increases with hypophosphite concentration. Cyclic voltammetry, using an electrochemical quartz crystal microbalance, confirms the existence of parasitic reactions, namely the reduction of protons of the solvent during the cathodic process and oxidation of hydrogen during the dissolution of the layers. This behaviour is in qualitative agreement with the proposed reaction scheme. 相似文献
107.
GaN buffer and main layers were grown by the conventional hydride vapor phase epitaxy technique using GaCl3 consecutively. The deposited buffer layers were investigated by atomic force microscopy and X-ray analysis. To examine the behavior of the buffer layers at main layer growth temperature, heat treatment was conducted at 900°C. Based on the results of the buffer layer study, GaN thick films were grown at 1050°C. Optimum deposition conditions of buffer layer from the buffer and main layer studies generally coincided. On the φ scanning pattern, the GaN films grown on (0001) Al2 O3 were single-crystalline. Band-edge emission dominated photoluminescence was observed at room temperature. 相似文献
108.
Javier M. Grau JosM. Bisang 《Journal of chemical technology and biotechnology (Oxford, Oxfordshire : 1986)》1992,53(1):105-110
This paper describes the parameters that are important in the industrial practice of silver removal from photographic fixers. The experiments were performed under potentiostatic control using synthetic solutions. The current efficiency was analysed as a function of the cathodic potential taking into account the deposit quality. A cathodic potential of ?0.5 V against a saturated calomel electrode is recommended. The conditions to prevent the darkening of the electrodeposit were investigated. The determination of silver concentration in the solution was made by direct potentiometry. The results obtained with synthetic fixers were corroborated by making the silver deposition from commercial fixers in an electrochemical reactor with rotating cylinder electrode intercalated in an electrolytic flow circuit in order to simulate practical conditions. 相似文献
109.
110.