Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut

We have demonstrated feasibility to form silicon-on-insulator (SOI) substrates using plasma immersion ion implantation (PIII) for both separation by implantation of oxygen and ion-cut. This high throughput technique can substantially lower the high cost of SOI substrates due to the simpler implanter design as well as ease of maintenance. For separation by plasma implantation of oxygen wafers, secondary ion mass spectrometry analysis and cross-sectional transmission electron micrographs show continuous buried oxide formation under a single-crystal silicon overlayer with sharp Si/SiO₂ interfaces after oxygen plasma implantation and high-temperature (1300°C) annealing. Ion-cut SOI wafer fabrication technique is implemented for the first time using PIII. The hydrogen plasma can be optimized so that only one ion species is dominant in concentration and there are minimal effects by other residual ions on the ion-cut process. The physical mechanism of hydrogen induced silicon surface layer cleavage has been investigated. An ideal gas law model of the microcavity internal pressure combined with a two-dimensional finite element fracture mechanics model is used to approximate the fracture driving force which is sufficient to overcome the silicon fracture resistance.     

微机核子秤在大型尿素装置中的应用

介绍了大型尿素装置中微机核子秤的系统构成，测量原理、安装、调校及在调试过程中发现的问题。     

Microstructural Effects of Ion Implantation on Molybdenum

The effects of ion implantation and subsequent annealing on the microstructure of molybdenum have been investigated by transmission electron microscopy. The ions investigated were carbon, nitrogen, and tellurium. The ion-induced damage was found to give rise to grain boundary migration phenomena both during implantation and during subsequent annealing. Precipitation or ordering was found to occur for each ion on annealing.     

特征X射线能谱法测定Fe^＋注入小麦种子的深度

用１１０ｋｅＶ Ｆｅ＾＋离子束垂直注入小麦种胚后，在扫描电子显微镜上沿种子纵沟剖面，在不同深度上测量Ｆｅ元素被激发出的特征Ｘ射线强度分布，结果表明分布呈指数衰减，与晶体中的热扩散分布相类似，并对此进行了讨论。     

硅中硼离子注入校准样品的研制

本文主要介绍了硅中硼离子注入校准样品的制备与研究。分别用三台SIMS仪器对样品进行了深度剖析与比对,并对用作校准目的的样品主要参数进行了定值。     

Ionic Channels as Natural Nanodevices

Ion channels are proteins with a hole down their middle important in a wide range of biological functions yet simple enough to be analyzed as devices in the engineering tradition.     

黄埔发电厂#6发电机转冷水系统改造

黄埔发电厂#6发电机转冷水铜离子含量超标，通过对缺陷原因进行分析，针对二级水封的特性对溢出的转冷水进行回收并利用化学凝结水处理去除溶出的铜离子，通过控制转冷水的pH值最终减缓铜管的腐蚀.     

New concept of surface modification to LiCoO2

As the continuance of our series study on LiCoO₂ surface modification, the complicated traditional surface coating method is replaced with simple addition of amorphous YPO₄ and Al₂O₃ in commercial LiCoO₂ or in commercial electrolyte based on our understanding to the improvement mechanism of surface modification. Comprehensive studies by X-ray photoelectron spectroscopy (XPS), gas chromatography and mass spectroscopy (GC–MS), inductively coupled plasma (ICP) and Fourier transformed infrared (FTIR) indicate that the products of spontaneous reaction between the additive and the LiPF₆ based electrolyte are responsible for the performance improvements.     

Evaluation of the reactivity of titanium with mould materials during casting

A methodology for evaluating the reactivity of titanium with mould materials during casting has been developed. Microhardness profiles and analysis of oxygen contamination have provided an index for evaluation of the reactivity of titanium. Microhardness profile delineates two distinct regions, one of which is characterised by a low value of hardness which is invariant with distance. The reaction products are uniformly distributed in the metal in this region. The second is characterised by a sharp decrease in microhardness with distance from the metal-mould interface. It represents a diffusion zone for solutes that dissolve into titanium from the mould. The qualitative profiles for contaminants determined by scanning electron probe microanalyser and secondary ion mass spectroscopy in the as-cast titanium were found to be similar to that of microhardness, implying that microhardness can be considered as an index of the contamination resulting from metal-mould reaction.