150 nm亚波长铝光栅的近红外偏振特性

采用纳米压印、反应离子辅助刻蚀及物理溅射技术制作了周期为150 nm的铝光栅,用分光光度计测量了样品的透过率随入射光偏振方向变化的关系以及在可见、近红外波段TE,TM波的透射光谱。利用严格耦合波理论对光栅的上述性能进行了数值模拟和理论分析。考察了斜入射情况下样品的性能及损耗随入射角的变化关系。理论和实验结果表明,光栅的透过率对入射光的偏振态十分敏感:在近红外范围内(1000~2000 nm)对TE波完全反射,对TM波具有90%的透过率,并且在斜入射时因入射角的增大而轻微加强。此外,还比较了不同金属材料光栅的TM波近红外透射特性,探讨了改善其性能的途径。     

Fabrication and characterization of CdTe nano pattern on flexible substrates by nano imprinting and electrodeposition

Nano imprinting technology and the electrodeposition method were applied to make CdTe nano patterns on flexible substrates. An ammonia based aqueous solution was prepared at pH 10.7 and indium tin oxide (ITO)/polyethylene naphthalate (PEN) film with template was used as the working electrode. ITO thin film which was coated on PEN film had good electrical conductivity and optical transmittance. The template was manufactured by nano imprinting technology on ITO/PEN film. It was made from benzyl methacrylate and had nano rod arrays. It was used as the working electrode and for making CdTe nano pattern. CdTe nano pattern were analyzed by X-ray diffractometer, dual beam (DB)-focused ion beam (FIB)-scanning electron microscopy (SEM), Raman spectroscopy, and ultraviolet (UV)-visible (VIS) spectroscopy. The structure and optical properties of CdTe nano pattern on flexible substrates was analyzed. The crystalline size of nano pattern had 8.26 nm. The Te particles that were precipitated on CdTe surface seems to be exist. The absence of annealing process influenced to have low absorption coefficient and narrow band gap compared to bulk CdTe. However, nano pattern increased reflectance.     

电子束曝光机激光工件台系统研制

介绍了nm级电子束曝光机激光定位精密工件台系统的结构组成、各部分技术措施及总体性能指标。该工件台采用HP5527激光干涉测量系统,测量分辨率达0.6nm,结构上成功将导向与承载分离,对承片台、机械手等进行重大创新。无论是整机性能还是关键技术单元均处于国内领先水平,是一台性能优良、高精度的电子束曝光机工件台。     

Enhanced Osteoblast Adhesion to Epoxide‐Functionalized Surfaces

As an alternative to expensive extracellular matrix (ECM) proteins generally applied as coatings in Petri dishes used for cell binding, an innovative system based on epoxide‐functionalized monolayers capable of protein binding is proposed. Since cells bind to material surfaces through proteins, protein‐binding surfaces should also promote cell binding. Here we investigate how the cell‐binding properties of an epoxide‐functionalized surface compares with ECM protein gel coated surfaces and tissue culture polystyrene control surfaces. Glass surfaces are functionalized with glycidoxypropyltriethoxysilane (GOPS), which results in an epoxide‐functionalized surface capable of binding proteins through an epoxide–amine reaction. Advancing contact angle measurements and atomic force microscopy measurements confirm the formation of a homogeneous GOPS monolayer. This monolayer is micropatterned with fluorescein‐labeled ECM protein gel by microcontact printing (µCP). Confocal laser scanning microscopy (CLSM) shows accurately transferred ECM protein gel micropatterns. Osteoblasts that are seeded on these micropatterned substrates show a clear preference for adhering to the epoxide‐functionalized areas. The morphology of these cultured osteoblasts is needle‐like with high aspect ratios. As controls, osteoblasts are cultured on GOPS‐functionalized surfaces, unstructured ECM protein gel surfaces, and tissue culture polystyrene (TCPS). The GOPS surfaces demonstrate a drastic increase in cell adhesion after 2 h, whilst the other tests show no adverse effects of this surface on the osteoblasts as compared to ECM and TCPS. CLSM shows healthy cell morphologies on each surface. It is demonstrated for the first time that epoxide groups outperform ECM protein gel in cell adhesion, thereby providing new routes for cost‐effective coatings that improve biocompatibility as well as exciting, new methodologies to control and direct cell adhesion.     

TEM characterization of Si nanowires grown by CVD on Si pre-structured by nanosphere lithography

Silicon nanowires (SiNWs) were grown on Si(1 0 0) and Si(1 1 1) substrates by chemical vapour deposition (CVD) via the vapour–liquid–solid (VLS) mechanism with small gold particles used as seeds. In order to control the diameter of nanowires, their density on the substrate and their orientation we controlled the size and the distribution of Au seed particles. This was accomplished using nanosphere lithography (NSL) by which regular arrays of Au nanoparticles can be generated. This allowed us to grow single-crystalline SiNWs perpendicular to the surface of Si(1 1 1) substrates. The SiNWs and their Au caps were studied with respect to their morphology and composition using TEM, HREM and EFTEM methods. Clusters of Au are observed along the surface of SiNWs and the existence of a thin Si film on gold particles capping the SiNWs is demonstrated.     

一种基于空间光调制器的微透镜阵列制备技术

提出了一种基于空间光调制器的并行光刻制备微透镜阵列的技术。采用数字微反射镜器件输入光刻图形,结合热回流技术,制作任意结构和排布的微透镜阵列。无限远校正显微微缩光学系统的长焦深保证了深纹光刻的实现,热回流法提供了良好的表面光滑度。与传统逐层并行光刻和掩模曝光技术相比,提出的技术方案更加便捷灵活,特别适合制作特征尺寸在数微米至百微米的微透镜阵列器件。得到的微透镜阵列模版经过电铸转移为金属模具,利用紫外卷对卷纳米压印技术在柔性基底上制备微透镜阵列器件,在超薄液晶显示、有机发光二极管(OLED)照明等领域有广泛应用。     

基于碳纳米管的微纳机电器件应用研究

综述了近年来碳纳米管在微纳传感器、纳米发电机、纳米执行器、纳米电子器件、纳米收音机与薄膜扬声器等方面取得的瞩目成果及典型应用,介绍了基于碳纳米管的微纳机电器件的制造工艺、器件性能及其研究进展,指出了碳纳米管基微纳机电器件在多元化发展、工艺多样化、材料复合化、产业化工程等方面的发展趋势。     

碳纳米管非对称接触结构制作及电学性能研究

实验研究了多根或单根单壁碳纳米管与非对称金属电极接触结构的制作方法。先用介电泳方法(DEP)将碳纳米管定向排列在Au电极对之间,再用电子束光刻(EBL)在碳纳米管的一端加工Al电极,获得多根碳纳米管与金铝电极的非对称接触结构。先用EBL在Au电极对一端覆盖Al电极,再用DEP排列碳纳米管,实现单根碳管与金铝电极的非对称接触结构。非对称结构器件的电学测试研究表明,器件的I-V曲线不再对称,呈现出整流特性。     

微纳光纤的制备及其光学特性研究

在微纳光纤的制作中,制作方法和相关参数的选择与控制是影响其光学传输特性的重要因素。该文基于单模光纤,理论模拟并实验分析了熔融拉锥法和氢氟酸(HF)腐蚀法在制备微纳光纤（MNF）过程中的相关参数与传输光学特性变化规律。研究表明,在制备MNF过程中,直径从20 μm减小到0时,传输功率损耗达97%,受耦合损耗和环境折射率变化的影响,理论损耗值与实验结果虽存在一定差异,但变化规律保持一致。通过OptiFDTD软件模拟,指出倏逝场深度随着光纤直径的减小而增大,且与损耗存在非线性关系,当输入光波波长与光纤的直径相比拟时,能量几乎全部集中在光纤的表面,此时外界环境变化对光纤内光波导响应灵敏度提高,微纳光纤的这种特性在传感领域具有潜在的应用市场。