Use of a neural network to link AFM etch patterns to plasma parameters

Plasmas play a critical role in depositing thin films or etching fine patterns while manufacturing integrated circuits. A new model for plasma diagnosis is presented. This was accomplished by linking atomic force microscopy (AFM) to plasma parameters using a neural network. Experimental AFM data were collected during the etching of silicon oxynitride films in C₂F₆ inductively coupled plasma. Surface roughness of etched patterns was characterized by means of discrete wavelet transformation. This led to the construction of three vertical (type I), diagonal (type II), and horizontal (type III) wavelet coefficient-based models. The performance of diagnosis models was evaluated in terms of the prediction and recognition accuracies. Both accuracies were optimized as a function of the number of hidden neurons. Comparisons revealed that the type I model yielded the largest recognition and the smallest prediction error. This was demonstrated even under stricter monitoring conditions. More improved diagnosis is expected by enhancing AFM resolution.     

《钢结构工程施工质量验收规范》修订简介

简要介绍《钢结构工程施工质量验收规范》(GB 5 0 2 0 5 - 2 0 0 1)的修订原则、方法以及对原规范进行修订中新增加的内容及要求 ,并进行了详细解释 ,以便于对新规范的理解     

炼油化工装置技术改造的决策与实施

针对炼油和石化工业装置技术改造的特点，系统地总结了技术改造的类型和改造方案的制定、决策及实施的原则、程序和方法，指出对炼化装置实施技术改造是一项极其复杂、极具难度的系统工程，必须结合实际情况，以投资回报最大化为原则，通过深入细致地研究和反复比选优化改造方案，并结合现场情况制定切实、可靠、安全的实施方案。     

水热合成纳米氧化锡粉体工艺因素研究

以SnCl4·5H2O和氨水为原料,通过正交实验并借助于XRD、TEM等手段,研究了前驱物浓度、反应温度、保温时间和氨水滴加速率等工艺因素对水热合成纳米SnO2粉体的影响。     

关于询价招标订购文件的名称

根据Requisition的词义和询价、招标、订购文件的意义，建议将不能准确表达意思的中文译词“请购”改成“询购”。     

加固改造中的结构承重体系转换

从加固改造工程的实践出发 ,探讨了混合结构向框架结构体系转换的方法和构造措施 ,为实际工程提供了新的技术思路     

汽车发动机电机铁芯用钢(ADW2)的研制开发

鞍钢研制开发的汽车发动机启动电机用钢是针对汽车电机铁芯用钢（定、转子）而开发的电机钢类产品。介绍了该产品的研制过程及规格、特点。通过批量试制及装机试验，产品巳满足用户的使用要求。     

Further evidence of responsibility of impurities in MgO for variability in its basicity and catalytic performance in oxidative coupling of methane

Further evidence was delivered that certain impurities, which could be contained in MgO samples, might be responsible for observed variability in MgO basicity and catalytic performance in oxidative coupling of methane. The surface basicity/base strength distribution of a series of MgO samples containing or not containing Ca and Na impurities was determined by a temperature-programmed desorption of CO₂. It was revealed that samples containing Ca and Na impurities have much more medium, strong and very strong basic sites. The surface basicity of MgO samples containing added alkali or alkaline earth compounds or water was characterized by a test reaction of transformation of 2-butanol. It was confirmed that the introduction of these compounds to a pure MgO enhanced both its basicity and activity in oxidative coupling of methane.     

气象图数据的提取与转换

对气象图中等值线数据的提取与转化问题进行了研究 ,其中包括图像的二值化、细化、矢量化以及提取数据的转换和还原。它为从已有的气象图像资料中获得数据资料提供了一条有效的途径     

激光冲击诱发相变的实验研究

本对激光冲击是否可以诱发相变进行了试验研究。用功率密度为１．０６×１０＾８Ｗ／ｃｍ＾２的激光器冲击Ｔ８钢表面。实验结果表明激光冲击处理使Ｔ８钢的表面显微硬度有所提高并可以发生马氏体相变。冲击处理后材料表面硬度提高了两倍，认为相变是Ｔ８钢表面硬度提高的原因之一。