Network and device-level impacts: performance and reliability of active I/O storage systems

Distributed active storage architectures are designed to offload user-level processing to the peripheral from the host servers. In this paper, we report preliminary investigation on performance and fault recovery designs, as impacted by emerging storage interconnect protocols and state-of-the-art storage devices. Empirical results obtained using validated device-level and interconnect data demonstrate the significance of the said parameters on the overall system performance and reliability.     

微电子机械系统

本文对国外微电子机械系统的研究现况作了评述，介绍了ＭＥＭＳ的主要技术和它的应用情况，对国外的一些主要研究机构的情况进行了分析，最后就我国ＭＥＭＳ的发展提出了一些建议。     

SiGe: An attractive material for post-CMOS processing of MEMS

This work gives an overview of the different developments for silicon germanium (Si_1−xGe_x) from a MEMS post-processing perspective. First, the maximum processing temperature that does not introduce any damage or degradation into the standard characteristics of the CMOS driving electronics is specified. Then, the optimal type of silicon and germanium gas sources and deposition technique that results in an economical process are identified. Next, the selection criteria for a low thermal budget doping method and doping species are discussed. Finally, the advantage and disadvantage for the different approaches implemented for enhancing the physical properties of poly Si_1−xGe_x at a CMOS backend compatible temperature are highlighted. It is shown that the optimal method depends on the application requirements and the CMOS technology used for realizing the driving electronics.     

基于SOI的硅微谐振式压力传感器芯片制作

采用SOI硅片,基于MEMS技术,设计并加工了一种新型三明治结构的硅微谐振式压力传感器,根据传感器敏感单元的结构设计,制定了相应的制备工艺步骤,并且针对湿法深刻蚀过程中谐振子的刻蚀保护等问题,提出了一种基于氮化硅、氧化硅和氮化硅三层薄膜的保护工艺,实验表明,在采用三层薄膜保护工艺下进行湿法刻蚀10 h后,谐振子被完全释放,三层薄膜保护工艺对要求采用湿法刻蚀镂空释放可动结构具有较高的实用价值。最后对加工完成的谐振式压力传感器进行了初步的性能测试,结果表明,在标准大气压力下谐振子的固有频率为9.932 kHz,品质因数为34。     

应用于多旋翼MAVs的姿态测量系统

应用一个三轴加速度计、三个单轴角速率陀螺和一个三轴磁强计等微机械惯性传感器,设计廉价轻量姿态测量系统,研究了姿态角推算算法。在以往的姿态测量系统中,陀螺偏差和动加速度的影响限制其应用。将角速度陀螺的误差作为状态量导入到系统,动加速度作为噪音项导入到观测方程中,然后利用扩展卡尔曼滤波器来构成姿态估计算法来降低误差。实际飞行中对比商用高精度传感器和多次室外飞行测试表明,设计的系统能够应于旋翼MAVs。     

基于微位移定位系统MEMS梳齿位移传感器的研究

MEMS硫齿位移传感器是一种基于MEMS技术电容理论的传感器,具有体积小、重量轻、性能稳定、功耗低和易于集成等特点.首先探讨了梳齿传感器的工作原理,随后介绍了使用梳齿传感器有效检测微动工作台位移的方法,并进行了结构失效和梳齿电极不平行失效的可靠性分析.通过采用这种传感器可以达到提高微位移定位平台系统的集成度、精度、分辨...     

On‐off iterative adaptive controller for low‐power micro‐robotic step regulation

A novel model‐free iterative adaptive controller is presented for low‐power control of piezoelectric actuators. The controller uses simple adaptation rules based on known general behavior of piezoelectric actuators to adjust on‐off switching times to drive piezoelectric actuators through a desired transient step motion. Adaptation rules are based on small numbers of measurements taken during each iteration of the actuator movement. Combined with the use of only on‐off control inputs, controller implementation can be possible at much lower overall power levels than would be needed to implement a conventional control strategy such as through pulse‐width‐modulation (PWM) with real‐time feedback. Such power savings are particularly important for the intended controller application to piezoelectric microactuators driving autonomous terrestrial micro‐robots. A method for predicting convergence of systems with nominally linear dynamics and unknown, bounded nonlinearities is described, and applied to a sample target piezoelectric actuator. The controller is tested in simulation and experimentally on a piezoelectric cantilever actuator, and shows predicted convergence to the desired response. Copyright © 2011 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society     

微型飞行器的研究与发展

微型飞行器是90年代中期出现的新生事物，它正以日新月异的速度蓬勃向前发展。它的出现引起了世界各国的极大关注和高度重视。本文介绍了微型飞行器的概念和应用前景，重点综述国内外研究现状，总结出研究的关键问题，并提出了未来微型飞行器研究发展的趋势。     

在纳米压入仪上进行悬臂梁法测量弹性模量的影响因素分析

对在纳米压入仪上进行悬臂梁法测量弹性模量的主要影响因素进行了综合分析,主要包括加载系统悬置弹簧刚度、压头压入、梁沿截面宽度方向挠曲、梁支座附加挠曲等影响。在考虑这些因素的基础上,得到了悬臂梁的有效挠度,利用有效挠度与载荷之间的关系,评价悬臂梁材料的弹性模量。对单晶硅(100)悬臂梁试样进行了实验,得到其弹性模量为155GPa±9.5%GPa,与参考文献值符合较好。表明在纳米压入仪上进行悬臂梁法测量,只有综合这些影响因素后,才能获得有效、准确的弹性模量测量结果。     

陶瓷材料在微机电系统中的应用

在微机电系统(MEMS)中应用到了许多种材料,其中,使用最多的是陶瓷材料。本文分析了当前国内外在MEMS研究中 的陶瓷材料的应用现状。着重分析了在MEMS中硅作为结构材料的应用以及作为薄膜材料的应用,此外,还介绍了其它 一些在MEMS中常见的陶瓷材料,如碳化硅、氮化硅、PZT压电陶瓷等材料的性能和应用。