用(110)硅面各向异性腐蚀的凸角结构制作微米针管

描述了一种用(110)晶面硅片制造微米针管的新方法。利用硅晶面在各向异性腐蚀中出现的凸角结构形成针管的三维构造,针管内径约10μm,外径约90μm,长度约500μm。整个针管结构平坦,便于与微泵等其他MEMS器件相接合,用于无痛皮下注射器和生化采样等。微米针管的制作工艺相对简单,材料廉价,适合于工业化批量生产。     

DESIGN OF CANTILEVER PROBES FOR ATOMIC FORCE MICROSCOPY (AFM)

A cantilever beam used in an Atomic Force Microscope is optimized with respect to two different objectives. The first goal is to maximize the first eigenfrequency while keeping the stiffness of the probe constant. The second goal is to maximize the tip angle of the first eigenmode while again keeping the stiffness constant. The resulting design of the beam from the latter optimization gives almost the same result as when maximizing the first eigenfrequency. Adding a restriction on the second eigenfrequency result in a significant change of the optimal design. The beam is modelled with 12 DOF beam finite elements and the optimizations are carried through with either SLP (Sequential Linear Programming) or MM A (Method of Moving Asymptotes) and similar results are obtained.     

A micromechanical analogue mixer with dynamic displacement amplification

A new micromechanical device is proposed which is capable of modulation, demodulation and filtering operations. The device uses a patented 3-mass coupled micromechanical resonator which dynamically amplifies the displacement within a frequency range of interest. Modulation can be obtained by exciting different masses of the resonator with the data and the carrier signals. Demodulation can be obtained similarly by exciting the actuator with the input and carrier signals at the same time. With the help of dynamic motion amplification, filtering and signal amplification can be achieved simultaneously. A generic design approach is introduced which can be applied from kHz to MHz regime frequencies of interest. A sample mixer design for an silicon on insulator-based process is provided. A SPICE (Simulation Program with Integrated Circuit Emphasis)-based electro-mechanical co-simulation platform is also developed and the proposed mixer is simulated.     

微光学电子机械系统中的微型反射镜阵列的应用前景

综述利用微加工技术制作微型反射镜阵列；简要叙述其发展历程，着重阐述其主要功能和优点。分类分析微镜阵列的基本工作方式和主要应用领域及其发展方向，并对应用前景进行分析。     

微型传感器在汽车中的应用

本文简要分析了目前微型传感器在汽车中的应用情况,并对下一步的发展趋势进行了预测.     

微型机械材料的残余应力测量

硅类薄膜材料是微机电系统使用的主要结构材料它的力学特性直接关系到微机电系统的可靠性和使用寿命，而残余应力是微型机械设计的一个十分重要的力学特性。概述了国内外微型机械薄膜材料残余应力的测量原理、方法和特点，可供微机电系统的设计和制造者参考。     

微机械往复式无阀泵的振动特性分析

提出了用于研究微机械往复无阀泵动态特性的二自由度振动力学模型,并进行了分析与实验验证.在模型中增加考虑泵腔内气泡因素,并将泵腔内、外液体质量的影响分开考虑;得出振幅随频率、泵腔内外液体质量比变化的曲线;发现其幅频曲线一般呈双峰特性,泵腔内外液体质量比值对曲线特征、谐振频率、振幅均有显著影响.通过实验验证了分析结果.由此得出以提高泵压为目的的微泵优化设计策略适当增大膜片质量、选择合理的泵腔内外液体质量比值.采用硅深刻蚀、硅-玻璃膜片键合等工艺制作出微机械往复无阀泵,其尺寸为20 mm×20 mm×0.65 mm,实现最大泵压为1.52 kPa,对应最大流量为35×10-6 L/min.     

A droplet-based microfluidic system capable of droplet formation and manipulation

Formation of emulsion droplets is crucial for a variety of industrial and scientific applications. This study presents a new droplet-based microfluidic system capable of generating tunable and uniform-sized droplets and subsequently deflecting these droplets at various inclination angles using a combination of flow-focusing and moving-wall structures. A pneumatic air chamber was used to activate the moving-wall structures, located nearby the outlet of the flow-focusing microchannels, such that the sheath flows can be locally accelerated. With this approach, the size of the droplets can be fine-tuned and sorted without adjusting the syringe pumps. Experimental data showed that droplets with diameters ranging from 31.4 to 146.2 μm with a variation of less than 5.39% can be generated. Besides, droplets can be sorted upwards or backwards with an inclination angle ranging from 0° to 53.5°. The development of this emulsion system may be promising for the formation and collection of emulsion products for applications in the pharmaceutical, cosmetics and food industries.     

串并联RF MEMS开关的微波传输特性仿真研究

分别建立了串联悬臂梁、并联电容MEMS开关的结构模型和等效电路模型,利用其模型研究了开关的微波传输性能,在结构、工艺及驱动机制上作了比较。     

Bacterial growth monitoring in a microfluidic device by confocal reflection microscopy

The feasibility of a method to nondestructively measure planktonic bacterial growth in a microfluidic device was addressed. Here, we report that the growth of Pseudomonas aeruginosa in a microfluidic device could be measured by a three-dimensional image analysis technique based on confocal reflection microscopy in a time-course.