之字型支撑梁硅微谐振器机械性能分析

与相同几何尺寸的其他支撑形式相比,之字型支撑梁降低了硅微谐振器的谐振频率。通过对之字型支撑梁硅微谐振器的力学建模分析,发现其为5次超静定问题,在此基础上得出了谐振频率等重要的性能参数随几何参数的变化关系。分析结果表明,在保证支撑梁垂直长度不变的条件下,对固定的折弯次数n,谐振频率fx 随折弯角度φ的增大而增大;对固定的折弯角度φ,谐振频率fx 随折弯次数n的增大而趋于一个固定值;φ=90°时则等效于双侧直脚型微谐振器。     

新型室温中远波段红外探测器的关键工艺研究

介绍了一种基于MEMS技术的新型室温中远红外波段硅基电容式红外探测器原理和制作工艺过程，并详细介绍了针对单面光刻机而采用的对准孔双面对准和键合对准技术、浓硼扩散FLPW腐蚀停止技术制备超薄敏感硅膜以及薄膜的疏水处理等关键工艺。还对各环节所遇到的问题和其相应的解决方法进行了详细地阐述。     

反射面平动式光栅光调制器的实现及机电特性分析

提出了一种新型的光栅光调制器(GLM),它由可动平板阵列和固定光栅构成,通过可动平板的垂直运动,达到调制光束的目的。为验证该结构实现的可能性,得到器件的机电特性,根据微梁的力学理论进行了电力学理论分析,通过Coventor仿真软件进行了有限元仿真。分析表明,该器件所需驱动电压为16V,无明显的迟滞现象,可动平板的有效衍射面积较大,易于实现面阵结构,提高了光学衍射效率。     

微桥法研究低应力氮化硅力学特性及误差分析

用微机械悬桥法研究低应力氮化硅薄膜的力学性能。对符合弹性验则的微桥进行测试 ,在考虑衬底变形的基础上 ,利用最小二乘法对其载荷—挠度曲线进行拟合 ,得到低应力lowpressurechemicalvapourdeposited (LPCVD)氮化硅的弹性模量为 3 14 .0GPa± 2 9.2GPa ,残余应力为 2 65 .0MPa± 3 4.1MPa。探讨梯形横截面对弯曲强度计算和破坏发生位置的影响 ,得到低应力氮化硅的弯曲强度为 6.9GPa± 1.1GPa。对微桥法测量误差的分析表明 ,衬底变形、微桥长度和厚度的测量精度对最终力学特性的拟合结果影响最大     

微细加工中的快速复型研究

论述了在集成电路和微电子机械微细制造中的光刻技术,为了实现0.1μm甚至更小特征尺寸的光刻而采用的快速复型技术;这种技术吸收了电子束光刻和压印光刻的优点,同时又弥补了它们各自相应的缺点和不足,解决了光刻环节中光刻速度与特征尺寸小的矛盾,实现了大面积、快速、低成本和高精度的微细加工。     

用(110)硅面各向异性腐蚀的凸角结构制作微米针管

描述了一种用(110)晶面硅片制造微米针管的新方法。利用硅晶面在各向异性腐蚀中出现的凸角结构形成针管的三维构造,针管内径约10μm,外径约90μm,长度约500μm。整个针管结构平坦,便于与微泵等其他MEMS器件相接合,用于无痛皮下注射器和生化采样等。微米针管的制作工艺相对简单,材料廉价,适合于工业化批量生产。     

DESIGN OF CANTILEVER PROBES FOR ATOMIC FORCE MICROSCOPY (AFM)

A cantilever beam used in an Atomic Force Microscope is optimized with respect to two different objectives. The first goal is to maximize the first eigenfrequency while keeping the stiffness of the probe constant. The second goal is to maximize the tip angle of the first eigenmode while again keeping the stiffness constant. The resulting design of the beam from the latter optimization gives almost the same result as when maximizing the first eigenfrequency. Adding a restriction on the second eigenfrequency result in a significant change of the optimal design. The beam is modelled with 12 DOF beam finite elements and the optimizations are carried through with either SLP (Sequential Linear Programming) or MM A (Method of Moving Asymptotes) and similar results are obtained.     

A micromechanical analogue mixer with dynamic displacement amplification

A new micromechanical device is proposed which is capable of modulation, demodulation and filtering operations. The device uses a patented 3-mass coupled micromechanical resonator which dynamically amplifies the displacement within a frequency range of interest. Modulation can be obtained by exciting different masses of the resonator with the data and the carrier signals. Demodulation can be obtained similarly by exciting the actuator with the input and carrier signals at the same time. With the help of dynamic motion amplification, filtering and signal amplification can be achieved simultaneously. A generic design approach is introduced which can be applied from kHz to MHz regime frequencies of interest. A sample mixer design for an silicon on insulator-based process is provided. A SPICE (Simulation Program with Integrated Circuit Emphasis)-based electro-mechanical co-simulation platform is also developed and the proposed mixer is simulated.     

微光学电子机械系统中的微型反射镜阵列的应用前景

综述利用微加工技术制作微型反射镜阵列；简要叙述其发展历程，着重阐述其主要功能和优点。分类分析微镜阵列的基本工作方式和主要应用领域及其发展方向，并对应用前景进行分析。     

微型传感器在汽车中的应用

本文简要分析了目前微型传感器在汽车中的应用情况,并对下一步的发展趋势进行了预测.