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61.
FABRICATION OF DIAMOND TUBES IN BIAS-ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION SYSTEM 总被引:1,自引:1,他引:0
CHEN Ming MA Yuping XIANG Daohui SUN Fanghong School of Mechanical Engineering Shanghai Jiaotong University Shanghai China 《机械工程学报(英文版)》2007,20(4):24-26
Deposition of diamond thin films on tungsten wire substrate with the gas mixture of ace- tone and hydrogen by using bias-enhanced hot filament chemical vapor deposition(CVD)with the tantalum wires being optimized arranged is investigated.The self-supported diamond tubes are ob- tained by etching away the tungsten substrates.The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope(SEM)and Raman spectrum.The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD.The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of H_2O_2 and NH_4 OH.There is no residual stress in diamond tube after substrate removal. 相似文献
62.
S.A. Umar M.K. Halimah G.G. Ibrahim I.O. Alade M.N. Azlan R. El-Mallawany A.M. Hamza S.N. Nazrin L.U. Grema M.S. Otto 《Ceramics International》2021,47(15):21668-21678
A system of bio-silica borotellurite glasses was fabricated based on the chemical formula [(TeO2)0.7 (B2O3)0.3]1-x (SiO2)x with x = 0.1, 0.2, 0.3, and 0.4 using the melt-quenching technique using silica (98.548% SiO2, from rice husk), TeO2 (Alfar Aeser, 99.9%) and B2O3 (Alfar Aeser, 99.9%). Measurements and characterizations such as density and molar volume measurements, XRD analysis, FTIR, and UV–Vis spectroscopes were performed on the studied glasses. The objective was to determine the glasses’ applicability in optoelectronics, non-linear optics, and laser technologies through polarizability, linear electric susceptibility, and optical basicity study. Apart from confirming the amorphous nature of the glasses, the XRD analysis identified the presence of a crystalline phase of tellurium oxide (α-TeO2) formed. The FTIR spectral study revealed the presence of TeO3, BO3, and SiO4 structural units in the studied glasses. The refractive index (2.3026 – 2.2651), molar polarizability (8.0696 – 9.4334 Å3), oxide ion polarizability (3.2970 – 3.6202 Å3), electronic polarizability (0.2296 – 0.2335 Å3), dielectric constant (5.1307 – 5.3019), optical basicity (0.6719 – 0.7998), metallization criterion (0.410853 – 0.420714) and electric susceptibility (0.3286 – 0.3422 esu) of the glasses were presented. With the high refractive index and favourable electronic/oxide ion polarizability as well as good electric susceptibility, the glasses have shown great potential for optical fibre and laser applications. Metallization criterion value falls in the range of glasses with great potentials for non-linear optical application. The dielectric value suggests the glasses represent wideband semiconducting glasses believed to be good for application in microelectronic substrates fabrication. 相似文献
63.
Acyl chloride monomers have been serving as the dominant acylation reagent for preparing thin-film composite (TFC) nanofiltration (NF) membranes over the past few decades. Herein, a novel acylation reagent (trimellitic anhydride, TMA) was exploited in conjunction with trimesoyl chloride (TMC) to undergo interfacial polymerization with piperazine (PIP) on the polysulfone substrate membranes. The introduction of TMA enabled the deeper diffusion of PIP monomers into the organic phase, resulting in the creation of novel circular-shaped protuberances on the top surface of the polyamide layer and the significant increase in the effective membrane area. Besides, abundant in-situ carboxylic groups were generated in the polyamide layer, conducive to both the surface hydrophilicity and negative charge density. Consequently, with an addition of 0.03 wt% TMA, pure water flux reached up to 15.3 L m−2 hour−1 bar−1, almost 2.2 times that of the pristine membrane, and high rejection of Na2SO4 (97.3%) was maintained, evincing the superior desalination performance of the TMA-modified membranes. The interaction mechanism between TMA, TMC, and PIP was described in detail. Furthermore, the TMA-modified membranes exhibited a stable separation performance over the long-running process. 相似文献
64.
Pure and ion doped TiO2 thin films were prepared by sol-gel dip coating process on metallic and non-metallic substrates. Test metal ion concentration ranged from 0.000002 to 0.4 at.%. The resulting films were annealed in air and characterized by optical spectroscopy and X-ray diffraction. The photodegradation of methyl orange under UV irradiation by pristine and ion-doped TiO2 films was quantified in a photocatalytic reactor developed in this study. In general, both doped and undoped TiO2 crystals appeared in anatase phase and the photocatalytic activities of the TiO2 thin films varied with substrates, calcination temperature, doping ions and their concentrations. The best calcination temperature for different substrates ranged from 450 to 580 °C. Films prepared on the metallic substrates resulted in higher photocatalytic activities, while ion doping lowered their efficiencies. On the contrary, for non-metallic substrates except ceramic the photocatalytic efficiencies of undoped films were much lower (< 30%), while ion doping was shown to increase the photocatalytic efficiencies remarkably in some cases, e.g., Cr3+ with the tile substrate. Overall, ion doping affected the photocatalytic efficiency of TiO2 films, and an optimal doping concentration of between 0.0002 and 0.002 at.%, close to an estimate by the Debye length equation, resulted in the highest efficiency for most substrates. 相似文献
65.
Preparation and microwave dielectric properties of 3ZnO·B2O3 ceramics with low sintering temperature
Yunxiang HuDongmei Wei Qiuyun Fu Jun ZhaoDongxiang Zhou 《Journal of the European Ceramic Society》2012,32(3):521-524
The preparation and dielectric properties of 3ZnO·B2O3 ceramics were investigated. Dense 3ZnO·B2O3 ceramics were obtained as sintered in the temperature range from 950 to 1000 °C for 3 h. The X-ray diffraction showed that the obtained ceramics were of a monoclinic 3ZnO·B2O3 structure. The ceramic specimens fired at 955 °C for 1 h exhibited excellent microwave dielectric properties: ?r ∼ 6.9, Q × f ∼ 20,647 GHz (@6.35 GHz), and τf ∼ −80 ppm/°C. The dependences of relative density, ?r, and Q × f of ceramics sintered at 955 °C on sintering soaking time showed that they all reached their plateaus as the soaking time was up to 60 min. Meanwhile, 3ZnO·B2O3 ceramics had no reaction with silver during cofiring, indicating it is a potential candidate for low-temperature cofired ceramic (LTCC) substrate. 相似文献
66.
The adhesion of sputtered copper thin films was measured with a quantitative indentation technique utilizing refractory superlayers to trigger and promote delamination. Adhesion energies of the indentation-induced delaminations were analyzed in terms of the critical strain energy release rate. Two groups of films were investigated. Group I ranged in thickness from 225 to 1000 nm in both the as-deposited and annealed condition. Adhesion energies ranged from 2 to 15 J/m2, with higher adhesion for the annealed condition. Group II films had nominal thicknesses of 430 and 1100 nm, some with 7–10 nm interlayers of either titanium or chromium. Adhesion energies of these films ranged from 4 to 30 J/m2, increasing by a factor from 1.3 to 7.5, as a function of the interlayer presence and type, with the increase in energy due to a chromium interlayer exceeding that of titanium. Adhesion energies increased with film thickness for all films, with interlayers and annealing producing a larger increase. These quantitative results were compared to previous semi-quantitative and quantitative results, and shown to have comparable magnitudes and trends. 相似文献
67.
Copper sulphide (CuS) thin films were deposited by spray pyrolysis using CuCl2·2H2O and Na2S2O3·5H2O precursors as sources of Cu2+ and S2- respectively, with deionized water as a solvent. Three types of substrates were used for films deposition; glass, tungsten and Si. X-ray measurements of the structural characteristics of the deposited films indicated single phase CuS covellite phase with orientations in the z-axis (001). The presence of oxygen suggested improved pH sensing characteristics. Morphological characterization showed differences in shape and size of CuS crystal structure, which affect the surface-to-volume ratio and surface site density of the substrates. The as-deposited films were used as extended gates of field effect transistor to measure the pH sensitivity for buffer solutions in the set of 2-to-12 step 2; the optimum pH sensitivity was 23.3 mV/pH for CuS/glass membrane. The hysteresis was measured for buffer solutions prepared at pH7-pH4-pH7-pH10-pH7 in order to find its pH response delay; the minimum value was 0.48 mV for glass substrate. Also, the repeatability, stability and reliability of the (CuS) thin films were measured in terms of coefficient of variation (C.V.) with the same setup used for measuring pH sensitivity. Repeatability values of 0.04%, 0.02% and 0.38% were recorded for glass, tungsten and Si, respectively, while stability and reliability values of 0.15%, 0.15% and 0.10% were recorded at pH4, pH7 and pH10, respectively, for glass substrate. 相似文献
68.
为研制具有沟道衬底的单模激光器,讨论了H_2SO_4-H_2O_2-H_2O对GaAs晶片的择优腐蚀。实验证明,使用H_2SO_4∶H_2O_2∶H_2O=1∶8∶8腐蚀液,在GaAs(100)面上沿[011]和[01(?)]方向开槽分别获得燕尾槽和V型槽衬底,满足了器件设计的要求。 相似文献
69.
70.