Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application

In this paper, bulk-Si metal–oxide–semiconductor field effect transistors (MOSFETs) are fabricated using the catalytic chemical vapor deposition (Cat-CVD) method as an alternative technology to the conventional high-temperature thermal chemical vapor deposition. Particularly, formation of low-resistivity phosphorus (P)-doped poly-Si films is attempted by using Cat-CVD-deposited amorphous silicon (a-Si) films and successive rapid thermal annealing (RTA) of them. Even after RTA processes, neither peeling nor bubbling are observed, since hydrogen contents in Cat-CVD a-Si films can be as low as 1.1%. Both the crystallization and low resistivity of 0.004 Ω·cm are realized by RTA at 1000 °C for only 5 s. It is also revealed that Cat-CVD SiN_x films prepared at 250 °C show excellent oxidation resistance, when the thickness of films is larger than approximately 10 nm for wet O₂ oxidation at 1100 °C. It is found that the thickness required to stop oxygen penetration is equivalent to that for thermal CVD SiN_x prepared at 750 °C. Finally, complementary MOSFETs (CMOSs) of single-crystalline Si were fabricated by using Cat-CVD poly-Si for gate electrodes and SiN_x films for masks of local oxidation of silicon (LOCOS). At 3.3 V operation, less than 1.0 pA μm⁻¹ of OFF leakage current and ON/OFF ratio of 10⁷–10⁸ are realized, i.e. the devices can operate similarly to conventional thermal CVD process.     

大港油田官109-1断块稠油油藏碱/表面活性剂吞吐采油技术

大港油田官109-1断块稠油油藏的油井由于井筒、近井地带发生原油有机沉积,储层原油流动性差,采用多种方法都不能正常生产。为此研制了一种碱性解堵液,用于油井化学吞吐。该解堵液为复配碱和抗硬剂等添加剂的10%两性木质素表面活性剂溶液,能使玻璃片表面由亲油变强亲水,在石英上的接触角为6°(稀释至1/2和1/4浓度时为11°和12°),与羊大站原油间的界面张力为1.75×10-3~3.18×10-3mN/m。该解堵液与黏度1~50 Pa.s的不同区块稠油按体积比1∶1混合形成的乳状液,60℃、175 s-1黏度为2~6 mPa.s,在配液水矿化度高达6000mg/L以上或钙镁离子浓度高达250 mg/L时,该解堵液仍能保持对稠油的乳化降黏能力。该解堵液从实验岩心中驱出的原油量比地层水多75%,驱出液为乳状液。通过一个井例介绍了化学吞吐工艺:先用一种降黏解堵液对油井进行预处理,清洗油管、炮眼及近井地带,再注入碱性解堵液(该井例中为500 m3),注入时间约15小时,然后开井生产。2000年2月至2002年6月在16口新投产井实施化学吞吐(第一轮次),15口井有效,其中2口井先后转注水,其余13口井到2005年底仍继续产油。图1表6参5。     

Synthesis of nano particle of inorganic oxides by polymer matrix

Ultrafine (⩽ 150 nm) powders of spinels [MFe₂O₄ where M = Ni(II), Co(II) and Zn(II)]; rare-earth orthoferrites [RFeO₃ where R = Sm, Nd and Gd], and rare-earth garnets [R₃Fe₃O₁₂ where R = Sm, Nd and Gd] with good purity and chemical homogeneity were prepared through two new versatile chemical routes. The first route involved the coprecipitation of the desired metal nitrates from their aqueous solution, in presence of a water soluble polymer-polyvinyl alcohol (PVA), by triethyl ammonium carbonate solution. The other process involved complete evaporation of a mixture of optimum amounts of PVA and the desired aqueous metal nitrate solutions, with and without the addition of optimum amounts of urea when the mixture was evaporated to a pasty mass. In addition, detailed study on the reported potassium ferricyanide route was also carried out for the production of the rare-earth orthoferrite powders. The various precursor as well as the heat-treated mixed-oxide powders, prepared through each of the routes, were compared by the physical characterization studies involving thermal gravimetry and differential scanning calorimetry, infrared spectroscopy, X-ray powder diffraction, transmission electron microscopy, and room temperature magnetic measurements.     

水对植物纤维水泥复合板生产的影响

研究了水对植物纤维水泥复合板性能的影响。选择合适的水分可以提高板材静弯曲强度,减小板材变形。     

胶溶法合成 TiO_2超微粒子

用胶溶法合成了 TiO_2超微粒子。研究了反应物浓度、胶溶剂用量、胶溶温度对胶溶过程的影响,以及表面活性剂 DBS 的量与 Ti 萃取率的关系。探讨了合成超微粒子 TiO_2的最佳条件,分析了产品的特性。200℃热处理得到的产品为非晶型圆球状,粒度均匀,平均6.0nm,在许多有机溶剂中具有良好的分散性和透明性。550℃得到晶态锐钛矿型超微粒子 TiO_2,粒度为8.5nm。700℃热处理得到金红石型TiO_2,粒度为33.2nm。     

化学水汽监督存在的问题及建议

水汽监督是化学监督的主要内容。通过提高水汽品质，可以防止和减缓热力设备腐蚀、结垢、积集沉积物，提高设备的安全性，延长设备的使用寿命。针对目前河北南部电网化学水汽监督工作中存在的主要问题进行了分析，提出了改进措施和处理建议。     

Provision of accuracy for quantitative determination of small amounts of components: Principles of resolving the problem and their realization

Versions are suggested for resolving the problem of monitoring the accuracy of determining small amounts of components in samples of substances and materials. __________ Translated from Izmeritel'naya Tekhnika, No. 1, pp. 52–57, January, 2006.     

某供用电综合楼地下基础底板堵漏防水技术

结合工程概况，分析了负二层地下基础底板渗漏的原因，介绍了防水堵漏方案的设计与优选以及主要施工工艺，实践证明，该工程堵漏防水技术可靠，效果良好，保证了工程的顺利进行。     

A Model for Flooding Prediction in Circular Tubes

Flooding phenomenon limits the stability and the flow of a liquid film falling along the walls of a channel in which a gas is flowing upwards.As known, the entrainment effect can completely prevent the liquid to fall from its natural flow. The present work proposes a new mechanistic model for the prediction of the onset of flooding in vertical and inclined pipes in the presence of obstructions, as well as taking into account the viscosity effect. The good performance of the model in the different geometrical conditions and for variable viscosities of the liquid component assesses the validity of the hypothesis that the instability of a wavelike disturbance limits the countercurrent flow in a channel.     

环氧玻璃钢衬里在化工设备中的应用

本文叙述了非标准化工设备的环氧玻璃钢防腐衬里工艺、配方及使用考查结果．