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使用光强标定的发射光谱(AOES)测量了CHF3/C6H6混合气体的微波电子回旋共振(ECR)放电等离子体中基团的分布状态。实验发现随着CHF3流量的增加,成膜基团CF、CF2、CH等的相对密度增大,而刻蚀基团F的密度也会增加,从而使得a—C:F薄膜的沉积速率降低。同时红外吸收谱(IR)分析表明,在高CHF3流量下沉积的a—C:F薄膜中含有更高的C—F键成分。可见在a—C:F薄膜的制备中CHF3/(CHF3 C6H6)流量比是重要的控制参量。 相似文献
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该工艺技术是在原三联作(TCP+MFE+JET)基础上,根据大港油田勘探试油(测试)的需要,研制开发出的又一新技术,与原三联作相比,一趟管柱不但完成求产、测压、泵排工作,而且还能进行酸化等措施,提高了资料品质,减少了作业成本。经过6井次现场应用,全部达到了设计要求,取得了工艺、资料、成本、速度的较大进步,具有较高推广应用价值。 相似文献
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S. David Graber 《Canadian Metallurgical Quarterly》2004,130(1):67-80
Numerous types of pipes and channels with spatially increasing flows in environmental engineering applications are identified by type and function and referred to as collection conduits. An overview of methods for designing and analyzing collection conduits is provided. Full conduits with nonuniform and uniform inflow are first considered. Dimensional analysis is then employed to demonstrate the relationship between variables for open channels; that leads to the identification of possibilities for generalized numerical solutions. Prior collection conduit applications are discussed within the framework of the dimensional analysis (which also pertains to some constant-flow applications). A previously unpublished generalized numerical solution for rectangular collection conduits is presented. Subsurface drains are addressed with particular emphasis, including the use of numerical methods to develop a new generalized chart and relation to other design methods. Among the important conclusions for subsurface drains is that the somewhat common practice of using Manning’s equation alone for such problems is not generally adequate. Examples and practical design suggestions are included, and the use of computer-based numerical methods is discussed more generally. 相似文献
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用溶胶-凝胶技术在Bi(100)衬底上制备了单层和渐变型多层的BaxSr(1-X)TiO3薄膜,其膜层组分分别为:Ba0.7Sr0.3TiO3,Ba0.8Sr0.2TiO,Ba0.9Sr0.1TiO3,BaTiO3,对生长制备出的多层BaxSr(1-X)TiO3薄膜进行了变角度椭偏光谱测量,通过椭偏光谱解谱分析研究,首次得到了BaxSr(1-X)TiO3多层膜结构不同膜层的膜厚和光学常数,其结果显示:椭偏光谱分析得到的不同膜层的膜厚与卢瑟福背向散射测量得到的结果基本相符;渐变型多层膜中BaTiO3薄膜的折射率比单层BaTiO3薄膜折射率大许多,与体BaTiO3的折射率相接近,这说明渐变型多层膜中BaTiO3薄膜的光学性质与体材料的光学性质接近。 相似文献
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A three-dimensional model was developed to investigate the influence of various hot filaments parameters on substrate temperature fields that significantly affect the nucleation and growth of diamond films over large area by hot-filament chemical vapordeposition (HFCVD). Numerical simulated results indicated that substrate temperature varies as a function of hot filamentsnumber, radius, temperature, emissivity, the distance between filaments, and the distance between substrate and filamentsarrangement plane. When these filaments parameters were maintained at the optimal values, the homogeneous substrate temperature region of 76 mm×76 mm with the temperature fluctuation no more than 5% could be obtained by a 80 mm×80 mmhot filaments arrangement plane. Furthermore, the homogeneous region could be enlarged to 100 mm×100 mm under thecondition of supplementary hot filaments with appropriate parameters. All of these calculations provided the basis for speciallyoptimizing the hot filaments parameters to dep 相似文献
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Investigation into polishing process of CVD diamond films 总被引:1,自引:0,他引:1
A new technique used for polishing chemical vapor deposition (CVD) diamond films has been investigated, by which rough polishing of the CVD diamond films can be achieved efficiently. A CVD diamond film is coated with a thin layer of electrically conductive material in advance, and then electro-discharge machining (EDM) is used to machine the coated surface. As a result, peaks on the surface of the diamond film are removed rapidly. During machining, graphitization of diamond enables the EDM process to continue. The single pulse discharge shows that the material of the coated layer evidently affects removal behavior of the CVD diamond films. Compared with the machining of ordinary metal materials, the process of EDM CVD diamond films possesses a quite different characteristic. The removal mechanism of the CVD diamond films is discussed. 相似文献