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991.
992.
W-Mo合金表面超精密加工的CMP技术研究 总被引:2,自引:0,他引:2
阐述了金属化学机械抛光的机理。将半导体制造工艺中的nm级平坦化技术、化学机械抛光技术拓展并应用到W-Mo合金工艺中,在实现精密物理材料表面高平坦度、低粗糙度的前提下,提高W-Mo合金去除速率。采用碱性抛光液进行实验,确定了抛光液的成分;分析了W-Mo合金化学机械抛光中压力、流量、转速、pH值、活性剂等参数对W-Mo合金的影响。实验表明,实现W-Mo合金表面超精密抛光的最佳条件为:压力0.06MPa,流速160mL/min,转速60r/min,pH值10.1~10.3。 相似文献
993.
电迁移可以引发芯片内部互连金属引线(单一元素)中的原子或离子沿电子运动方向移动.但是,在共晶锡铋焊点中,组成的元素为锡和铋而非单一元素.由于铋原子和锡原子在高电流密度下具有不同的迁移速率,因此共晶锡铋钎料具有独特的电迁移特性.实验中采用的电流密度为104A/cm2,同时焦耳热会引发焊点温度从25升高至49℃,富铋相在此温度下会发生明显粗化,除此之外,铋原子会首先到达正极界面处并形成坚硬的阻挡层,使得锡原子的定向运动受到阻碍,最终,富锡相会,凸起,其与负极界面问会有凹谷形成. 相似文献
994.
995.
996.
To improve image processing speed and detection precision of a surface detection system on a strip surface, based on the analysis of the characteristics of image data and image processing in detection system on the strip surface, the design of parallel image processing system and the methods of algorithm implementation have been studied. By using field programmable gate array(FPGA) as hardware platform of implementation and considering the characteristic of detection system on the strip surface, a parallel image processing system implemented by using multi IP kernel is designed. According to different computing tasks and the load balancing capability of parallel processing system, the system could set different calculating numbers of nodes to meet the system's demand and save the hardware cost. 相似文献
997.
998.
Jason H. C. Yang Kungen Teii Chung-Chueh Chang Seiichiro Matsumoto Miriam Rafailovich 《Advanced functional materials》2021,31(4):2005066
Cubic boron nitride (c-BN) has an ultrahardness and a large bandgap energy like diamond. In the last 30 years, most of the attention has been directed towards the mechanical and electronic applications of c-BN, while its biological potential has been overlooked. The authors report in vitro biocompatibility of high-quality c-BN films prepared by plasma-enhanced chemical vapor deposition using the chemistry of fluorine. c-BN films become superhydrophilic when chemical-treated in hydrogen and nitrogen plasmas with or without the impact of low-energy ions due to a marked increase in polar part of the surface free energy by removal of the fluorine atoms terminating c-BN surfaces. Satisfactory proliferation and differentiation of osteoblastic cells comparable with a control sample and a superhydrophilic nanocrystalline diamond film, and the formation of mineral deposits by biomineralization are confirmed on the superhydrophilic c-BN films with negative values of zeta potential. The results demonstrate a high potential of c-BN as a noncytotoxic ultrahard coating material for biological and biomedical applications. 相似文献
999.
N. Clament Sagaya Selvam Lijie Du Bao Yu Xia Pil J. Yoo Bo You 《Advanced functional materials》2021,31(12):2008190
Electroreduction of small molecules such as H2O, CO2, and N2 for producing clean fuels or valuable chemicals provides a sustainable approach to meet the increasing global energy demands and to alleviate the concern on climate change resulting from fossil fuel consumption. On the path to implement this purpose, however, several scientific hurdles remain, one of which is the low energy efficiency due to the sluggish kinetics of the paired oxygen evolution reaction (OER). In response, it is highly desirable to synthesize high-performance and cost-effective OER electrocatalysts. Recent advances have witnessed surface reconstruction engineering as a salient tool to significantly improve the catalytic performance of OER electrocatalysts. In this review, recent progress on the reconstructed OER electrocatalysts and future opportunities are discussed. A brief introduction of the fundamentals of OER and the experimental approaches for generating and characterizing the reconstructed active sites in OER nanocatalysts are given first, followed by an expanded discussion of recent advances on the reconstructed OER electrocatalysts with improved activities, with a particular emphasis on understanding the correlation between surface dynamics and activities. Finally, a prospect for clean future energy communities harnessing surface reconstruction-promoted electrochemical water oxidation will be provided. 相似文献
1000.
Cong Zhang Xin Liang Ruinian Xu Chengna Dai Bin Wu Gangqiang Yu Biaohua Chen Xiaolei Wang Ning Liu 《Advanced functional materials》2021,31(14):2008298
Surface segregation constitutes an efficient approach to enhance the alkaline hydrogen evolution reaction (HER) activity of bimetallic PtxNiy nanoalloys. Herein, a new strategy is proposed by utilizing the small gas molecule of H2 as the structure directing agent (SDA) to in situ induce Pt surface segregations over a series of PtNi5-n samples with extremely low Pt doping (Pt/Ni = 0.2). Impressively, the sample of PtNi5-0.3 synthesized under 0.3 MPa H2 delivers an extremely low overpotential of 26.8 mV (−10 mA cm−2) and Tafel slope of 19.2 mV dec−1, which is superior to most of the previously reported PtxNiy electrocatalysts. This is substantially related to the strong H2 in situ inducing effect to generate Pt-rich@Ni-rich core-shell nanostructure of PtNi5-0.3 with an ultrahigh Pt surface content of 46%. The specific mechanistic effects of H2 during the PtNi5-n synthesis process are well illustrated based on the combined experimental and theoretical studies. The density functional theory mechanism simulations further unravel that the evolved active site of PtNi5-n can efficiently reduce the reaction Gibbs free energies; especially for the scenario of PtNi5-0.3, the downward-shifted d band center of the Pt active site significantly reduces the Pt H bond strength, eventually resulting in the lowest absolute value of ΔGH. 相似文献