Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut

We have demonstrated feasibility to form silicon-on-insulator (SOI) substrates using plasma immersion ion implantation (PIII) for both separation by implantation of oxygen and ion-cut. This high throughput technique can substantially lower the high cost of SOI substrates due to the simpler implanter design as well as ease of maintenance. For separation by plasma implantation of oxygen wafers, secondary ion mass spectrometry analysis and cross-sectional transmission electron micrographs show continuous buried oxide formation under a single-crystal silicon overlayer with sharp Si/SiO₂ interfaces after oxygen plasma implantation and high-temperature (1300°C) annealing. Ion-cut SOI wafer fabrication technique is implemented for the first time using PIII. The hydrogen plasma can be optimized so that only one ion species is dominant in concentration and there are minimal effects by other residual ions on the ion-cut process. The physical mechanism of hydrogen induced silicon surface layer cleavage has been investigated. An ideal gas law model of the microcavity internal pressure combined with a two-dimensional finite element fracture mechanics model is used to approximate the fracture driving force which is sufficient to overcome the silicon fracture resistance.     

红外光控器在蜜丸包装机上的应用

中药大蜜丸及所用包装材料软、粘、轻、小、光,较难实现机械化自动包装。通常的监控方法不适合蜜丸的自动包装。采用红外线光电控制器,解决了自动包装蜜丸时出现的瞬间无纸、无丸等自动控制。     

复合脱氧剂对纯净钢生产的影响

论述复合脱氧剂的一般化学特性，并以碳化硅和硅铝铁两种复合脱氧剂为例，讨论其对改善钢的质量，进行纯净钢生产的影响。     

含钒废水净化回收技术研究

本文讨论了五氧化二钒生产过程中所排出废水的处理方法。认为采用焦亚硫酸钠及硫酸亚铁联合还原中和法为最佳,其技术关键为联合还原剂投料比、pH值、时间及含钒污泥提钒。年处理18万吨废水,可消除80余吨Cr~(+6)、V、Cu等重金属离子污染黄浦江上游水源,能回收粗红钒和含钒污泥提钒,使金属回收率提高4％。     

用基团贡献法预测纯物质蒸气压

对应状态原理与基团贡献法结合，提出一个新的蒸气压估算方程（ＲＬＹＭ）。通过对烷烃、烯烃、炔烃、环烷烃、环烯烃、醇、环醇、酮、醚、芳烃、酚、萘在内的１７４种有机物质蒸气压实验数据的关联，获得了３０种基团的贡献参数值。新模型的预测精度优于现有的对应状态法，并且对高碳分子仍有较好的估算精度。总的关联误差小于１．１７％。     

西安绿色康居小区规划设计剖析

通过对西安绿色康居小区规划设计的实例分析，阐明了小康型住宅区的标准和要求，在旧城住宅区改造中的落实和运用，试图探索下一世纪旧城住宅区的改造之路．     

可燃性粉尘环境用电气设备标准介绍

章着重对可燃性粉尘环境用电气设备新标准（GB12476．1－2000和GB12476．2－2XXX）的主要内容进行了介绍，并对粉尘的爆炸机理，国内外粉尘标准体系等进行了阐述。     

Photo-reversible Reaction in Polymer Langmuir-Blodgett Films

Preparation of photoreactive Langmuir-Blodgett (LB) films was carried out using polymers/oligomers prepared from long-chain dialkyl esters of di-and tetra-olefins and having cyclobutane rings in the main chain. These polymers/oligomers formed stable monolayers on a water surface when mixed with arachidic acid. These monolayers could be deposited onto a substrate successfully forming Y-type films. The oligomer LB films were polymerized on irradiation. The polymer LB films showed a photo-reversible process between polymers and oligomers, depending on wavelength of the irradiating light. On the basis of spectral data and molecular weight change, this behaviour was found to be caused by cleavage and formation of cyclobutane rings.     

高效液相色谱法测定头孢拉定制剂方法的改进

目的:改进头孢拉定制剂含量测定方法。方法:高效液相色谱条件:以Shim—Pack CLC—ODS(250mm×4.6mm)为色谱柱;柱温为35℃;流动相为水—甲醇—3.86％醋酸钠溶液-4％醋酸溶液(1364:500:30:6);流速为0.8mL·min~(-1);检测波长为254nm。结果:头孢拉定峰形良好,分离度和柱效满足药典要求,保留时间由原来的21.32min缩短至8.06min,提高了分析速度,含量测定结果与中国药典无显著差异。结论:该方法快速、准确、能更好地适用于常规检验工作和大批量生产时的质量控制。     

姚河坝水电站工程的重大地质变化及处理措施

介绍姚河坝水电站由于前期的地质勘探工作深度不够，在厂房后边坡、调压井和引水隧洞下段的施工过程中地质条件所发生的重大变化及具体处理措施，通过分析对工程投资和工期的影响，总结了其中的经验和教训。