Cu材料激光表面强化研究

采用激光技术对Cu基材进行表面强化处理。使用扫描电镜(SEM)、电子能谱计(EDS)和X射线衍射仪(XRD)对强化表面进行显微组织和物相分析,并测试了样品的显微硬度、耐磨性能和导电性能。结果表明,激光强化层无裂纹,组织细小均匀、呈快速凝固特征,强化层具有较高的硬度(平均硬度为625HV0.1)和良好的耐磨性,其磨损失重仅为纯Cu基材的1/5,而激光表面强化使导电性略微降低。激光表面强化层硬度和耐磨性的提高可归因于颗粒强化、细晶强化和固溶强化的共同作用,而导电性的降低程度主要受稀释率的影响。     

300mm铜膜低压低磨料CMP表面粗糙度的研究

随着集成电路特征尺寸的减小、低k介质的引入及晶圆尺寸的增加,如何保证在低压无磨料条件下完成大尺寸铜互连线平坦化已经成为集成电路制造工艺发展的关键。采用法国Alpsitec公司的E460E抛光机在低压低磨料的条件下,研究了12英寸(1英寸=25.4 mm)无图形(blanket)铜膜CMP工艺和抛光液配比对抛光表面质量的影响。实验结果表明,在压力为0.65 psi(1 psi=6.89×103 Pa),抛光液主要成分为体积分数分别为5%的螯合剂、2%的氧化剂和3%的表面活性剂。抛光后表面无划伤,表面非均匀性为0.085,抛光速率为400 nm.min-1,表面粗糙度为0.223 nm,各参数均满足工业化生产的需要。     

Material and process challenges in 100 nm interconnects module technology and beyond

In order for ultra-large-integrated (ULSI) circuits manufacturing to minimize the Cost of Ownership (CoO) aspect in the wiring process and realize fabricating semiconductor devices over 100 nm node, several Cu/low-k wiring technologies have been proposed. The evidential criteria in choosing the most probable one are physical or material limitation and requirements from manufacturing. A development of module processes (e.g., processing from low-k dielectrics to metal CMP) with proven equipment and material is an appropriate approach and has a high potential in overcoming those difficulties. In this paper, an advantage of dual Damascene Cu wiring accompanied with low-k (dielectric constant ∼2.7) and prediction of 100 nm Cu wiring module will be discussed.     

Evaluation of rapeseed meals in broiler chicks: Effect of iodine supply and glucosinolate degradation by myrosinase or copper

In rapeseed meals (RSM) of a conventional (c) or a newly bred (n) variety 117 or 44 mmol glucosinolates and glucosinolate degradation products per kg dry matter were detected. Soaking meals in aqueous myrosinase or copper sulphate solution and subsequent drying reduced the content of antinutrients by more than 90%. Broiler chickens were fed (i) a glucosinolate-free diet, or this diet in which half the soybean meal was replaced by RSM of various origins and treatment; (ii) untreated cRSM; (iii) cRSM treated with myrosinase: (iv) cRSM treated with Cu (v) untreated nRSM; or (vi) nRSM treated with myrosinase. These diets were administered with or without supplementary iodine. Chickens receiving the iodine-deficient diets with myrosinase-treated RSM showed growth depression, incomplete feathering, leg injuries and severe goitre. In the serum T⁴ could not be detected. Giving myrosinase-treated RSM plus iodine, or giving other RSM diets irrespective of iodine administration, no growth depression was observed. RSM diets without iodine dosage markedly increased thyroid weight: there were no differences between the RSM variants. In contrast to the treatment with myrosinase, in the sera of the chickens fed on untreated RSM or RSM treated with copper T⁴ could be detected, suggesting that in iodine-deficient conditions differences in serum T⁴ concentration between RSM groups indicate a differing anti-thyroid activity. With iodine supplementation the RSM had a significant effect on thyroid weight. The largest thyroids (five-fold heavier) were in the animals with myrosinase-treated cRSM. The untreated cRSM and the nRSM trebled or doubled the thyroid weight, and the myrosinase-treated nRSM trebled it. The thyroid weight of chicks fed cRSM treated with copper did not differ significantly from the glucosinolate-free control. There was evidence that heating the myrosinase-treated RMS produced anti-thyroid compounds; these should be identified in further investigations.     

用高效捕收剂Y89分选铜录山难选泥质氧化铜矿石的研究

用Ｙ８９－０黄药和异丁基黄药分别作捕收剂分选铜录山难选泥质氧化铜矿石,结果表明,在选矿指标相近的情况下,Ｙ８９－０用量比异丁基黄药用量少３０％－４０％;采用硫化铜和氧化铜矿物混合浮选的流程,在药剂用量相同的条件下,用Ｙ８９－０比用异丁基黄药所获得的铜精矿含Ｃｕ高２．１８％,含Ａｕ高６．５ｇ／ｔ,Ｃｕ回收率高１．３７％,Ａｕ回收率高９．３２％。     

铜蒸汽激光器双闸流管触发系统的研究

研制成用于钢蒸汽激光器的双间流管触发系统。用两个闸流管并联进行交替触发，总输入电功率达7．8kW。低功率运行时，激光器的效率为0．6％与单间流管激光器的效率一致。     

铜蒸气激光器的热设计

本文系统阐述了铜蒸气激光器的设计过程.在大量实验资料的基础上,给出了激光器放电管尺寸、输入功率密度的选择原则,通过分析放电管内气体温度分布、激光管径向热导损耗,建立了一套确定保温层厚度的方法.分析了光束"黑心"的原因,进而提出了解决途径.以上的设计思想在我们新近研制5W器件上得到验证.     

强激光系统中铜镜微变形实验研究

利用泰曼干涉仪及图像处理系统对强激光作用下不同冷却结构镜片包括空腔、环形通道几何结构铜镜的变形进行了实验研究，对其变形规律、变形机理作了探讨和分析。设计了一种新型多层冷却结构铜镜。将这几种铜镜的变形作比较．结果表明新结构铜镜不仅热变形小．而且由冷却流体压力引起的附加变形也很小．为有效控制强激光系统中镜片表面变形提供了有效途径。     

激光诱导化学沉积（铜）的实验研究

利用５１４．５ｎｍＡ＾＋ｒ激光作诱导光源，研究了激光功率、辐照时间、镀液组份等化学沉积的影响规律，利用扫描电镜分析了镀斑形成过程的微观形貌，结果表明：与普通化学镀相比，激光诱导化学沉积所形成的镀层其表面平滑，颗粒分布均匀，致密。文中还初步探讨了有关激光诱导作用的机理。     

某高泥高硫硫化铜矿选矿试验研究（增刊）

某硫化铜矿含铜1.03%,含硫8.12%,铜矿物嵌布粒度较细,且存在大量易泥化脉石矿物,难以获得理想的选矿指标。以Z-200为捕收剂,BK204为起泡剂,采用“铜硫混选—铜硫分离”工艺流程,闭路试验可获得铜精矿含铜23.70%,铜回收率87.17%,硫精矿含硫41.34%,硫回收率60.88%,取得了较好的浮选指标,实现了资源的有效利用。