长脉冲激光沉积原位生成YBaCuO超导膜

用长脉冲激光(脉冲宽度150μs,波长1.06μm)辐照高温烧结的YBa_2Cu_3O_(7-x)靶,在6Pa的氧气压强下,巳在(100)YSZ单晶衬底上原位生成YBa_2Cu_(?)O_(7-x)超导膜。衬底置于750℃的加热器上,衬底与靶之间的距离5cm,用该法制得的薄膜光亮坚实,正常态呈金属性,零电阻温度为84.7K。用XRD和SEM对薄膜进行了分析研究。     

Ni(pz)_4Br_2型络合物的光、热、磁性质的理论研究

本文利用d8（D*（4h））对称性与d8（D*（2h））对称性线性叠加d8［（1－C2）D*（4h）＋C2D*（2h）］作为Ni2+离子的环境品场，借助于强场能量矩阵和全组态混合EPR理论对Ni（pz）_4Br_2型络合物的吸收光谱、肖特基（Schottky）热容量和顺碰碰化车进行了统一计算和理论分析．理论结果与实验观测值符合甚好．从而对Ni（pz）_4Br_2的光、热、磁性质作出了完整、合理的理论解释．     

空气中烧成的镍导体及其应用

将空气中烧成的镍导体用于散热制冷片制作工艺中，可降低成本，提高合格率。通过实验得到的最佳值为：镍导体中４号玻璃（ＳｉＯ２＞３０，Ｂ２Ｏ３＞１０，ＰｂＯ＜５５，ＴｉＯ２少许）的含量４．５％，化学镀镍时间５０ｍｉｎ，方阻４７．５ｍΩ／□，附着力８．１Ｎ／ｍｍ２。     

激光熔敷NiCrSiB合金组织与物相研究

报道了对ＮｉＣｒＳｉＢ激光熔敷合金中共晶组织的研究和观察，将共晶中的第二相标定为Ｎｉ３１Ｓｉ１２。γ′（Ｎｉ３Ｓｉ）相与γ（Ｎｉ，Ｃｒ）相共存于枝晶中，共晶包围着枝晶形成合金的基体，其上弥散分布着硬质强化相ＣｒＢ，Ｎｉ３Ｂ和Ｍ２３（ＣＢ）６。研究方法包括ＳＥＭ（扫描电子显微镜），电子探针，ＸＲＤ（Ｘ射线衍射），ＥＤＡＸ（能谱分析）和波谱分析等     

热超声倒装焊在制作大功率GaN基LED中的应用

设计了适合于倒装的大功率GaN基LED芯片结构,在倒装基板硅片上制作了金凸点,采用热超声倒装焊接(FCB)技术将芯片倒装在基板上.测试结果表明获得的大面积金凸点连接的剪切力最高达53.93 g/bump,焊接后的GaN基绿光LED在350 mA工作电流下正向电压为3.0 V.将热超声倒装焊接技术用于制作大功率GaN基LED器件,能起到良好的机械互连和电气互连.     

Aging study on interfacial microstructure and solder-ball shear strength of a wafer-level chip-size package with Au/Ni metallization on a Cu pad

Eutectic solder balls (63Sn-37Pb) joined to Cu pads with an Au/Ni metallization have been widely used in wafer-level chip-size package (WLCSP) technology for providing electrical and mechanical interconnections between components. However, some reliability issues must be addressed regarding the intermetallic compounds (IMCs). The formation of a brittle IMC layer between the solder/Cu pad interface impacts considerably upon the solder-ball shear strength. In addition, it will degrade the long-term operating reliability of the WLCSP. This study investigates, by means of experiments, the growth of the IMC layer under isothermal aging for the eutectic Sn-Pb solder reflowed on a Cu pad with an Au/Ni metallization. Forming the Cu pad with an Au/Ni metallization was achieved by a simple semiconductor-manufacturing process. The effects of the intermetallic layer on solder-ball shear strength were examined for various parameters, including the thickness of the Au layer, solder-ball size, and the diameter of the Cu pad. Experimental results indicate that two IMC layers, Au_0.5Ni_0.5Sn₄ and Ni₃Sn₄, form at the solder/Cu pad interface after aging. The Au_0.5Ni_0.5Sn₄ intermetallic layer dominates the total thickness of the IMC layer and grows with aging time while the solder-ball shear strength decreases after aging. The degradation of the solder-ball shear strength was found to be caused mainly by the formation of the Au_0.5Ni_0.5Sn₄ layer. The experimental results established that a thinner Au layer on Cu pad can effectively control the degradation of solder-ball shear strength, and this is especially true for smaller ball sizes.     

自对准硅化物工艺研究

对适用于深亚微米CMOS器件的各种自对准硅化物工艺进行了讨论，并对不同硅化物薄膜的特性进行了分析。结果表明，随着大规模集成电路特征尺寸的不断缩减及其对器件性能要求的不断提高，常规Ti和Co的自对准硅化物工艺已经不能满足器件特征尺寸进一步缩小的需要；Ni的自对准硅化物工艺可以很好地满足超深亚微米及纳米器件对硅化物的需求。     

Electrical characteristics of high performance Au/n-GaN schottky diodes

Au/n-GaN Schottky diodes with the Au electrode deposited at low temperature (LT=77K) have been studied. In comparison, the same chip of GaN epitaxial layer was also used for room temperature Schottky diodes. The low temperature Schottky diodes exhibit excellent performance. Leakage current density as low as 2.55×10⁻¹¹ A·cm⁻² at −2.5 V was obtained in the LT Schottky diodes. The linear region in the current-voltage curve at forward bias extends more than eight orders in current magnitude. Current-voltage-temperature measurements were carried out to study the characteristics of the LT Schottky diodes. A typical barrier height of about 1.32 eV for the LT diode, which is the highest value ever reported, was obtained. The obvious enhancement in electrical performance makes the LT processing a very promising technique for GaN device application although the detailed mechanisms for the LT Au/n-GaN Schottky diodes are still under investigation.     

高可靠镀Ni／Au工艺及其在微波PTFE电路上的应用

介绍了高可靠电镀Ｎｉ／Ａｕ工艺在ＰＴＦＥ微波印制电路上的应用，并分析了氨基磺酸盐镀软镍和亚硫酸盐镀软金工艺的影响因素及提高Ｎｉ／Ａｕ镀层之间附着力的措施。通过实验及应用证明了与直接镀金工艺相比，在软基材ＰＴＦＥ敷铜箔板上镀Ｎｉ／Ａｕ工艺能大大提高微波电路的可焊性，高温稳定性和长期可靠性，并且用其所制作的微波器件的高频性能也优于直接镀金工业。     

Copper migration in cdte heterojunction solar cells

CdTe solar cells were fabricated by depositing a Au/Cu contact with Cu thickness in the range of 50 to 150Å on polycrystalline CdTe/CdS/SnO₂/glass structures. The increase in Cu thickness improves ohmic contact and reduces series resistance (R_s), but the excess Cu tends to diffuse into CdTe and lower shunt resistance (R_sh) and cell performance. Light I-V and secondary ion mass spectros-copy (SIMS) measurements were performed to understand the correlations between the Cu contact thickness, the extent of Cu incorporation in the CdTe cells, and its impact on the cell performance. The CdTe/CdS/SnO₂/glass, CdTe/ CdS/GaAs, and CdTe/GaAs structures were prepared in an attempt to achieve CdTe films with different degrees of crystallinity and grain size. A large grain polycrystalline CdTe thin film solar cell was obtained for the first time by selective etching the GaAs substrate coupled with the film transfer onto a glass substrate. SIMS measurement showed that poor crystallinity and smaller grain size of the CdTe film promotes Cu diffusion and decreases the cell performance. Therefore, grain boundaries are the main conduits for Cu migration and larger CdTe grain size or alternate method of contact formation can mitigate the adverse effect of Cu and improve the cell performance.